Spatial light modulator and method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5061049
SERIAL NO

07582804

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An electrostatically deflectable beam spatial light modulator with the beams (30), address electrodes (42, 46), and landing electrodes (40, 41) to provide soft-landing of the beams on the landing electrodes (40, 41) which gives uniform large-angle deflection plus high reliability.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX17133

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hornbeck, Larry J Van Alstyne, TX 35 12323

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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CANON KABUSHIKI KAISHA (1)
* 4793699 Projection apparatus provided with an electro-mechanical transducer element 30 1988
* Cited By Examiner

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Patent Info (Count) # Cites Year
 
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6232936 DMD Architecture to improve horizontal resolution 225 1995
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6447126 Support post architecture for micromechanical devices 340 1995
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6204085 Reduced deformation of micromechanical devices through thermal stabilization 33 1999
6843936 Getter for enhanced micromechanical device performance 49 1999
6300294 Lubricant delivery for micromechanical devices 66 1999
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6285490 High yield spring-ring micromirror 35 1999
6324006 Spoke light recapture in sequential color imaging systems 55 2000
6552840 Electrostatic efficiency of micromechanical devices 252 2000
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6683290 Constant light disable for spatial light modulator 5 2001
7071025 Separating wafers coated with plastic films 6 2001
6787187 Micromechanical device fabrication 5 2001
6542282 Post metal etch clean process using soft mask 6 2001
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7019881 Display system with clock dropping 11 2003
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* 2003/0227,465 Constant-weight bit-slice PWM method and system for scrolling color display systems 3 2003
7090787 Drying getters 5 2003
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7164397 Discrete light color processor 15 2003
* 2005/0068,464 Discrete light color processor 6 2003
7280126 Methods and apparatus for converting an orthogonal pixel format to a diamond pixel format 0 2003
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7009745 Coating for optical MEMS devices 8 2003
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7289090 Pulsed LED scan-ring array for boosting display system lumens 75 2003
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6987601 Damped control of a micromechanical device 4 2003
6985278 Damped control of a micromechanical device 14 2003
6891657 Damped control of a micromechanical device 19 2003
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7884988 Supplemental reset pulse 1 2004
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7651734 Micromechanical device fabrication 0 2004
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7119940 Capacitively coupled micromirror 4 2005
7362493 Micromirror and post arrangements on substrates 3 2005
7075702 Micromirror and post arrangements on substrates 30 2005
7403324 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 2 2006
7233427 Display system with clock dropping 9 2006
8040305 Constant-weight bit-slice PWM method and system for scrolling color display systems 0 2006
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8493288 System and method for color-specific sequence scaling for sequential color systems 1 2006
7737989 System and method for computing color correction coefficients 6 2006
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8305391 System and method to generate multiprimary signals 1 2006
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7405856 Display system timing control method 9 2007
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8472100 Multilayered deformable element with reduced memory properties in a MEMS device 0 2008
7997744 Electrically conductive protection layer and a microelectromechanical device using the same 0 2008
8693082 Micromirror array assembly with in-array pillars 1 2010
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9176316 Spatial light modulation display system 0 2013
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INSTITUT NATIONAL D'OPTIQUE (1)
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6555201 Method for fabricating a microelectromechanical bearing 30 2000
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RESEARCH TRIANGLE INSTITUTE (3)
6485273 Distributed MEMS electrostatic pumping devices 50 2000
6590267 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods 88 2000
6586738 Electromagnetic radiation detectors having a micromachined electrostatic chopper device 10 2001
 
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7230752 Electronically controlled stage lighting system 7 2004
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6988338 Lid with a thermally protected window 6 2002
7098396 Method and apparatus for making a lid with an optically transmissive window 1 2004
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7484857 Light modulating mirror device and array 4 2004
 
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7026695 Method and apparatus to reduce parasitic forces in electro-mechanical systems 8 2003
7118234 Reflective spatial light modulator 6 2004
7092140 Architecture of a reflective spatial light modulator 9 2004
7022245 Fabrication of a reflective spatial light modulator 11 2004
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7449284 Method and structure for fabricating mechanical mirror structures using backside alignment techniques 1 2004
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7034984 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 34 2004
6992810 High fill ratio reflective spatial light modulator with hidden hinge 36 2004
7042619 Mirror structure with single crystal silicon cross-member 23 2004
7068417 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 26 2004
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7206110 Memory cell dual protection 4 2004
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7172921 Method and structure for forming an integrated spatial light modulator 5 2005
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7199918 Electrical contact method and structure for deflection devices formed in an array configuration 0 2005
7142349 Method and structure for reducing parasitic influences of deflection devices on spatial light modulators 4 2005
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7298539 Co-planar surface and torsion device mirror structure and method of manufacture for optical displays 1 2005
7202989 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 2 2005
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7190508 Method and structure of patterning landing pad structures for spatial light modulators 1 2005
7184195 Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator 59 2005
7502158 Method and structure for high fill factor spatial light modulator with integrated spacer layer 0 2005
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7369297 Mirror structure with single crystal silicon cross-member 2 2005
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7670880 Method and structure for forming an integrated spatial light modulator 1 2007
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7034811 Image display system and method 15 2002
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7172288 Display device including a spatial light modulator with plural image regions 0 2003
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7317465 Image display system and method 1 2004
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7675510 Image display system and method 1 2005
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7394586 Spatial light modulator 2 2006
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7667885 Spatial light modulator 0 2008
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7123216 Photonic MEMS and structures 614 1999
7138984 Directly laminated touch sensitive screen 139 2001
7042643 Interferometric modulation of radiation 219 2002
7110158 Photonic MEMS and structures 205 2002
7550794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 47 2002
7297471 Method for manufacturing an array of interferometric modulators 27 2003
7221495 Thin film precursor stack for MEMS manufacturing 122 2003
7460291 Separable modulator 70 2003
7012726 MEMS devices with unreleased thin film components 94 2003
7198973 Method for fabricating an interference display unit 118 2003
7161728 Area array modulation and lead reduction in interferometric modulators 167 2003
7692844 Interferometric modulation of radiation 42 2004
7532194 Driver voltage adjuster 6 2004
7119945 Altering temporal response of microelectromechanical elements 154 2004
7706050 Integrated modulator illumination 42 2004
7193768 Interference display cell 25 2004
7291921 Structure of a micro electro mechanical system and the manufacturing method thereof 30 2004
7476327 Method of manufacture for microelectromechanical devices 55 2004
7060895 Modifying the electro-mechanical behavior of devices 66 2004
7280265 Interferometric modulation of radiation 50 2004
7164520 Packaging for an interferometric modulator 54 2004
7250315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 58 2004
7855824 Method and system for color optimization in a display 26 2005
7893919 Display region architectures 21 2005
7813026 System and method of reducing color shift in a display 22 2005
7551159 System and method of sensing actuation and release voltages of an interferometric modulator 19 2005
7424198 Method and device for packaging a substrate 5 2005
7142346 System and method for addressing a MEMS display 45 2005
7515147 Staggered column drive circuit systems and methods 16 2005
7379227 Method and device for modulating light 21 2005
7355780 System and method of illuminating interferometric modulators using backlighting 53 2005
7289259 Conductive bus structure for interferometric modulator array 83 2005
7460246 Method and system for sensing light using interferometric elements 14 2005
7560299 Systems and methods of actuating MEMS display elements 27 2005
7012732 Method and device for modulating light with a time-varying signal 87 2005
7359066 Electro-optical measurement of hysteresis in interferometric modulators 10 2005
7701631 Device having patterned spacers for backplates and method of making the same 5 2005
7259449 Method and system for sealing a substrate 18 2005
7781850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 13 2005
7668415 Method and device for providing electronic circuitry on a backplate 10 2005
7429334 Methods of fabricating interferometric modulators by selectively removing a material 17 2005
7420728 Methods of fabricating interferometric modulators by selectively removing a material 20 2005
7405924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 12 2005
7368803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 10 2005
7299681 Method and system for detecting leak in electronic devices 5 2005
7920135 Method and system for driving a bi-stable display 13 2005
7679627 Controller and driver features for bi-stable display 10 2005
7586484 Controller and driver features for bi-stable display 25 2005
7535466 System with server based control of client device display features 23 2005
7532195 Method and system for reducing power consumption in a display 10 2005
7302157 System and method for multi-level brightness in interferometric modulation 66 2005
7289256 Electrical characterization of interferometric modulators 16 2005
7602375 Method and system for writing data to MEMS display elements 8 2005
7916103 System and method for display device with end-of-life phenomena 2 2005
7321456 Method and device for corner interferometric modulation 62 2005
7626581 Device and method for display memory using manipulation of mechanical response 8 2005
7372613 Method and device for multistate interferometric light modulation 91 2005
7889163 Drive method for MEMS devices 26 2005
7692839 System and method of providing MEMS device with anti-stiction coating 4 2005
7420725 Device having a conductive light absorbing mask and method for fabricating same 68 2005
7405861 Method and device for protecting interferometric modulators from electrostatic discharge 5 2005
7843410 Method and device for electrically programmable display 6 2005
7719500 Reflective display pixels arranged in non-rectangular arrays 57 2005
7547565 Method of manufacturing optical interference color display 21 2005
7527995 Method of making prestructure for MEMS systems 46 2005
7808703 System and method for implementation of interferometric modulator displays 6 2005
7349136 Method and device for a display having transparent components integrated therein 11 2005
RE42119 Microelectrochemical systems device and method for fabricating same 14 2005
8008736 Analog interferometric modulator device 13 2005
7710629 System and method for display device with reinforcing substance 7 2005
8124434 Method and system for packaging a display 7 2005
7554714 Device and method for manipulation of thermal response in a modulator 42 2005
7471444 Interferometric modulation of radiation 21 2005
7388706 Photonic MEMS and structures 29 2005
7345805 Interferometric modulator array with integrated MEMS electrical switches 26 2005
7196837 Area array modulation and lead reduction in interferometric modulators 49 2005
7130104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 84 2005
8004504 Reduced capacitance display element 9 2005
7553684 Method of fabricating interferometric devices using lift-off processing techniques 8 2005
* 2006/0077,153 Reduced capacitance display element 53 2005
7417783 Mirror and mirror layer for optical modulator and method 10 2005
7373026 MEMS device fabricated on a pre-patterned substrate 18 2005
7343080 System and method of testing humidity in a sealed MEMS device 11 2005
RE40436 Hermetic seal and method to create the same 14 2005
8878825 System and method for providing a variable refresh rate of an interferometric modulator display 0 2005
7304784 Reflective display device having viewable display on both sides 63 2005
7161730 System and method for providing thermal compensation for an interferometric modulator display 95 2005
7567373 System and method for micro-electromechanical operation of an interferometric modulator 47 2005
7936497 MEMS device having deformable membrane characterized by mechanical persistence 15 2005
7317568 System and method of implementation of interferometric modulators for display mirrors 4 2005
7310179 Method and device for selective adjustment of hysteresis window 13 2005
7724993 MEMS switches with deforming membranes 2 2005
7492502 Method of fabricating a free-standing microstructure 13 2005
7417735 Systems and methods for measuring color and contrast in specular reflective devices 60 2005
7369296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 24 2005
7630119 Apparatus and method for reducing slippage between structures in an interferometric modulator 34 2005
7136213 Interferometric modulators having charge persistence 23 2005
7564612 Photonic MEMS and structures 92 2005
7327510 Process for modifying offset voltage characteristics of an interferometric modulator 240 2005
7369294 Ornamental display device 59 2005
7710636 Systems and methods using interferometric optical modulators and diffusers 30 2005
7684104 MEMS using filler material and method 17 2005
7653371 Selectable capacitance circuit 30 2005
7415186 Methods for visually inspecting interferometric modulators for defects 7 2005
7675669 Method and system for driving interferometric modulators 5 2005
7453579 Measurement of the dynamic characteristics of interferometric modulators 14 2005
7545550 Systems and methods of actuating MEMS display elements 7 2005
8310441 Method and system for writing data to MEMS display elements 1 2005
7446927 MEMS switch with set and latch electrodes 7 2005
7486429 Method and device for multistate interferometric light modulation 17 2005
7236284 Photonic MEMS and structures 112 2005
7630114 Diffusion barrier layer for MEMS devices 10 2005
8014059 System and method for charge control in a MEMS device 7 2005
7776631 MEMS device and method of forming a MEMS device 28 2005
7618831 Method of monitoring the manufacture of interferometric modulators 2 2005
7403323 Process control monitors for interferometric modulators 3 2005
7369252 Process control monitors for interferometric modulators 2 2005
7259865 Process control monitors for interferometric modulators 22 2005
8391630 System and method for power reduction when decompressing video streams for interferometric modulator displays 1 2005
7795061 Method of creating MEMS device cavities by a non-etching process 6 2005
9158106 Display methods and apparatus 1 2006
8159428 Display methods and apparatus 16 2006
7755582 Display methods and apparatus 20 2006
7355779 Method and system for driving MEMS display elements 6 2006
7916980 Interconnect structure for MEMS device 11 2006
7382515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 16 2006
8194056 Method and system for writing data to MEMS display elements 2 2006
7582952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 4 2006
7547568 Electrical conditioning of MEMS device and insulating layer thereof 10 2006
7550810 MEMS device having a layer movable at asymmetric rates 48 2006
7405852 Display apparatus and methods for manufacture thereof 75 2006
7450295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 60 2006
7483197 Photonic MEMS and structures 27 2006
7616369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 14 2006
7532377 Movable micro-electromechanical device 59 2006
7643203 Interferometric optical display system with broadband characteristics 34 2006
7948457 Systems and methods of actuating MEMS display elements 1 2006
7903047 Mode indicator for interferometric modulator displays 4 2006
7711239 Microelectromechanical device and method utilizing nanoparticles 17 2006
7623287 Non-planar surface structures and process for microelectromechanical systems 19 2006
7527996 Non-planar surface structures and process for microelectromechanical systems 13 2006
7417784 Microelectromechanical device and method utilizing a porous surface 64 2006
8049713 Power consumption optimized display update 2 2006
7920136 System and method of driving a MEMS display device 1 2006
7706044 Optical interference display cell and method of making the same 12 2006
7880954 Integrated modulator illumination 25 2006
7369292 Electrode and interconnect materials for MEMS devices 24 2006
7349139 System and method of illuminating interferometric modulators using backlighting 28 2006
8174469 Dynamic driver IC and display panel configuration 0 2006
7907319 Method and device for modulating light with optical compensation 34 2006
7161094 Modifying the electro-mechanical behavior of devices 42 2006
7372619 Display device having a movable structure for modulating light and method thereof 102 2006
7649671 Analog interferometric modulator device with electrostatic actuation and release 32 2006
7405863 Patterning of mechanical layer in MEMS to reduce stresses at supports 16 2006
7321457 Process and structure for fabrication of MEMS device having isolated edge posts 88 2006
7187489 Photonic MEMS and structures 107 2006
7636151 System and method for providing residual stress test structures 2 2006
7471442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 13 2006
7702192 Systems and methods for driving MEMS display 1 2006
7835061 Support structures for free-standing electromechanical devices 18 2006
7385744 Support structure for free-standing MEMS device and methods for forming the same 61 2006
7777715 Passive circuits for de-multiplexing display inputs 4 2006
7527998 Method of manufacturing MEMS devices providing air gap control 20 2006
7388704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 6 2006
7534640 Support structure for MEMS device and methods therefor 23 2006
7830586 Transparent thin films 34 2006
7554711 MEMS devices with stiction bumps 67 2006
7763546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 10 2006
7566664 Selective etching of MEMS using gaseous halides and reactive co-etchants 47 2006
7660058 Methods for etching layers within a MEMS device to achieve a tapered edge 16 2006
7928940 Drive method for MEMS devices 0 2006
7876489 Display apparatus with optical cavities 63 2006
7580172 MEMS device and interconnects for same 7 2006
7898722 Microelectromechanical device with restoring electrode 51 2006
7388697 System and method for addressing a MEMS display 16 2006
7242512 System and method for addressing a MEMS display 16 2006
7667884 Interferometric modulators having charge persistence 6 2006
7355782 Systems and methods of controlling micro-electromechanical devices 12 2006
8310442 Circuits for controlling display apparatus 15 2006
7535621 Aluminum fluoride films for microelectromechanical system applications 50 2006
7652814 MEMS device with integrated optical element 7 2007
* 7872792 Method and device for modulating light with multiple electrodes 25 2007
* 2007/0177,247 Method and device for modulating light with multiple electrodes 85 2007
7846344 Method and device for modulating light 7 2007
7733552 MEMS cavity-coating layers and methods 11 2007
8059326 Display devices comprising of interferometric modulator and sensor 16 2007
8482496 Circuits for controlling MEMS display apparatus on a transparent substrate 7 2007
7642110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 24 2007
7570415 MEMS device and interconnects for same 2 2007
8081369 System and method for a MEMS device 9 2007
7852545 Method and device for modulating light 30 2007
7839556 Method and device for modulating light 8 2007
7830587 Method and device for modulating light with semiconductor substrate 31 2007
7826120 Method and device for multi-color interferometric modulation 30 2007
7808694 Method and device for modulating light 31 2007
7800809 System and method for a MEMS device 8 2007
7738157 System and method for a MEMS device 36 2007
* 2008/0106,782 SYSTEM AND METHOD FOR A MEMS DEVICE 87 2007
* 2008/0088,911 SYSTEM AND METHOD FOR A MEMS DEVICE 81 2007
* 2008/0088,904 Method and device for modulating light with semiconductor substrate 90 2007
* 2008/0088,912 SYSTEM AND METHOD FOR A MEMS DEVICE 88 2007
* 2008/0088,908 SYSTEM AND METHOD FOR A MEMS DEVICE 5 2007
* 2008/0036,795 METHOD AND DEVICE FOR MODULATING LIGHT 5 2007
* 2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 90 2007
8072402 Interferometric optical modulator with broadband reflection characteristics 12 2007
7719752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 9 2007
7636189 Display methods and apparatus 21 2007
7551344 Methods for manufacturing displays 28 2007
7927654 Methods and apparatus for spatial light modulation 44 2007
7564613 Microelectromechanical device and method utilizing a porous surface 17 2007
9229222 Alignment methods in fluid-filled MEMS displays 0 2007
9176318 Methods for manufacturing fluid-filled MEMS displays 0 2007
7852546 Spacers for maintaining display apparatus alignment 30 2007
7746529 MEMS display apparatus 34 2007
8519945 Circuits for controlling display apparatus 10 2007
7532386 Process for modifying offset voltage characteristics of an interferometric modulator 16 2007
7623752 System and method of testing humidity in a sealed MEMS device 7 2008
7570865 System and method of testing humidity in a sealed MEMS device 3 2008
7660031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 11 2008
8105496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 8 2008
* 2008/0130,089 METHOD OF FABRICATING MEMS DEVICES (SUCH AS IMod) COMPRISING USING A GAS PHASE ETCHANT TO REMOVE A LAYER 34 2008
8040588 System and method of illuminating interferometric modulators using backlighting 2 2008
8222066 Eliminate release etch attack by interface modification in sacrificial layers 1 2008
* 2008/0311,690 ELIMINATE RELEASE ETCH ATTACK BY INTERFACE MODIFICATION IN SACRIFICIAL LAYERS 8 2008
7688494 Electrode and interconnect materials for MEMS devices 18 2008
7944603 Microelectromechanical device and method utilizing a porous surface 6 2008
* 2008/0218,843 MICROELECTROMECHANICAL DEVICE AND METHOD UTILIZING A POROUS SURFACE 4 2008
7851239 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 1 2008
7738158 Electromechanical device treatment with water vapor 1 2008
* 2009/0002,804 ELECTROMECHANICAL DEVICE TREATMENT WITH WATER VAPOR 2 2008
8248560 Light guides and backlight systems incorporating prismatic structures and light redirectors 3 2008
8416487 Photonic MEMS and structures 5 2009
7791787 Moveable micro-electromechanical device 8 2009
* 2009/0135,463 MOVEABLE MICRO-ELECTROMECHANICAL DEVICE 2 2009
7830588 Method of making a light modulating display device and associated transistor circuitry and structures thereof 40 2009
8526096 Mechanical light modulators with stressed beams 15 2009
8735225 Method and system for packaging MEMS devices with glass seal 0 2009
9182587 Manufacturing structure and process for compliant mechanisms 0 2009
7830589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 7 2009
8077379 Interferometric optical display system with broadband characteristics 0 2009
8422108 Method and device for modulating light with optical compensation 6 2009
9082353 Circuits for controlling display apparatus 2 2010
8736590 Low voltage driver scheme for interferometric modulators 0 2010
8126297 MEMS device fabricated on a pre-patterned substrate 1 2010
8164815 MEMS cavity-coating layers and methods 4 2010
7929197 System and method for a MEMS device 6 2010
8394656 Method of creating MEMS device cavities by a non-etching process 0 2010
8928967 Method and device for modulating light 3 2010
8853747 Method of making an electronic device with a curved backplate 0 2010
8035884 Method and device for modulating light with semiconductor substrate 12 2010
* 2011/0038,027 METHOD AND DEVICE FOR MODULATING LIGHT WITH SEMICONDUCTOR SUBSTRATE 44 2010
* 2011/0043,891 METHOD FOR MODULATING LIGHT 8 2010
9261694 Display apparatus and methods for manufacture thereof 1 2011
9110289 Device for modulating light with multiple electrodes 3 2011
9087486 Circuits for controlling display apparatus 3 2011
8520285 Methods for manufacturing cold seal fluid-filled display apparatus 3 2011
9398666 Reflective and transflective operation modes for a display device 0 2011
8971675 Interconnect structure for MEMS device 1 2011
9134527 Pixel via and methods of forming the same 1 2011
8963159 Pixel via and methods of forming the same 1 2011
8817357 Mechanical layer and methods of forming the same 2 2011
8682130 Method and device for packaging a substrate 0 2011
8749538 Device and method of controlling brightness of a display based on ambient lighting conditions 0 2011
8964280 Method of manufacturing MEMS devices providing air gap control 1 2012
8970939 Method and device for multistate interferometric light modulation 0 2012
8519923 Display methods and apparatus 9 2012
8599463 MEMS anchors 13 2012
8441602 Light guides and backlight systems incorporating prismatic structures and light redirectors 5 2012
8638491 Device having a conductive light absorbing mask and method for fabricating same 3 2012
8545084 Light guides and backlight systems incorporating light redirectors at varying densities 1 2012
8878771 Method and system for reducing power consumption in a display 0 2012
9135868 Direct-view MEMS display devices and methods for generating images thereon 0 2012
9274333 Alignment methods in fluid-filled MEMS displays 0 2012
8830557 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2012
9500853 MEMS-based display apparatus 0 2012
9336732 Circuits for controlling display apparatus 0 2012
9001412 Electromechanical device with optical function separated from mechanical and electrical function 1 2012
8791897 Method and system for writing data to MEMS display elements 0 2012
8885244 Display device 0 2013
9183812 Ambient light aware display apparatus 0 2013
9086564 Conductive bus structure for interferometric modulator array 1 2013
9134552 Display apparatus with narrow gap electrostatic actuators 0 2013
9243774 Light guides and backlight systems incorporating prismatic structures and light redirectors 0 2013
8891152 Methods for manufacturing cold seal fluid-filled display apparatus 0 2013
9177523 Circuits for controlling display apparatus 1 2013
9128277 Mechanical light modulators with stressed beams 0 2013
9116344 MEMS anchors 0 2013
9097885 Device having a conductive light absorbing mask and method for fabricating same 1 2014
9400382 Circuits for controlling display apparatus 0 2015
9530344 Circuits for controlling display apparatus 0 2015
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (10)
* 5459610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 323 1993
* 5677783 Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 110 1995
* 5742419 Miniature scanning confocal microscope 130 1995
* 5907425 Miniature scanning confocal microscope 74 1997
* 6007208 Miniature scanning confocal microscope 42 1997
6749346 Miniature scanning confocal microscope 30 1998
* 6075639 Micromachined scanning torsion mirror and method 37 1998
* 6088145 Miniature scanning confocal microscope 44 1998
* 6154305 Miniature scanning confocal microscope 66 1999
* 6122090 Method of micromachining a scanning torsion mirror 14 1999
 
QUALCOMM MEMS TECHNOLOGIES, INC. (3)
7738156 Display devices comprising of interferometric modulator and sensor 0 2007
8169687 Photonic MEMS and structures 0 2009
8681079 Interferometric optical modulator with broadband reflection characteristics 0 2011
 
SILICON LIGHT MACHINES CORPORATION (48)
5841579 Flat diffraction grating light valve 186 1995
5808797 Method and apparatus for modulating a light beam 334 1996
5982553 Display device incorporating one-dimensional grating light-valve array 395 1997
6088102 Display apparatus including grating light-valve array and interferometric optical system 141 1997
6271808 Stereo head mounted display using a single display device 95 1998
6130770 Electron gun activated grating light valve 74 1998
6101036 Embossed diffraction grating alone and in combination with changeable image display 74 1998
6215579 Method and apparatus for modulating an incident light beam for forming a two-dimensional image 116 1998
6956878 Method and apparatus for reducing laser speckle using polarization averaging 36 2000
7177081 High contrast grating light valve type device 31 2001
6764875 Method of and apparatus for sealing an hermetic lid to a semiconductor die 34 2001
6865346 Fiber optic transceiver 6 2001
6747781 Method, apparatus, and diffuser for reducing laser speckle 68 2001
6829092 Blazed grating light valve 13 2001
6707591 Angled illumination for a single order light modulator based projection system 4 2001
6800238 Method for domain patterning in low coercive field ferroelectrics 1 2002
6782205 Method and apparatus for dynamic equalization in wavelength division multiplexing 72 2002
6991953 Microelectronic mechanical system and methods 13 2002
6767751 Integrated driver process flow 7 2002
6728023 Optical device arrays with optimized image resolution 28 2002
7054515 Diffractive light modulator-based dynamic equalizer with integrated spectral monitor 1 2002
6822797 Light modulator structure for producing high-contrast operation using zero-order light 6 2002
6872984 Method of sealing a hermetic lid to a semiconductor die at an angle 27 2002
6829258 Rapidly tunable external cavity laser 36 2002
6908201 Micro-support structures 6 2002
6813059 Reduced formation of asperities in contact micro-structures 90 2002
6714337 Method and device for modulating a light beam and having an improved gamma response 8 2002
7057795 Micro-structures with individually addressable ribbon pairs 4 2002
6801354 2-D diffraction grating for substantially eliminating polarization dependent losses 10 2002
6956995 Optical communication arrangement 9 2002
6712480 Controlled curvature of stressed micro-structures 7 2002
7049164 Microelectronic mechanical system and methods 61 2002
6928207 Apparatus for selectively blocking WDM channels 3 2002
7057819 High contrast tilting ribbon blazed grating 6 2002
6987600 Arbitrary phase profile for better equalization in dynamic gain equalizer 2 2002
6934070 Chirped optical MEM device 6 2002
6927891 Tilt-able grating plane for improved crosstalk in 1×N blaze switches 3 2002
7068372 MEMS interferometer-based reconfigurable optical add-and-drop multiplexor 6 2003
7286764 Reconfigurable modulator-based optical add-and-drop multiplexer 4 2003
6947613 Wavelength selective switch and equalizer 1 2003
6922272 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices 9 2003
7391973 Two-stage gain equalizer 2 2003
* 7046420 MEM micro-structures and methods of making the same 3 2003
7027202 Silicon substrate as a light modulator sacrificial layer 55 2003
6922273 PDL mitigation structure for diffractive MEMS and gratings 2 2003
6829077 Diffractive light modulator with dynamically rotatable diffraction plane 4 2003
6806997 Patterned diffractive light modulator ribbon for PDL reduction 3 2003
7042611 Pre-deflected bias ribbons 0 2003
 
Digital Projection Limited (1)
* 6184852 Spatial light modulators 11 1999
 
LUMENTUM OPERATIONS LLC (4)
7095546 Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays 73 2004
* 2004/0212,907 Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays 17 2004
7432629 Articulated MEMs structures 6 2006
* 2006/0222,312 Articulated MEMs structures 1 2006
 
DEERE & COMPANY (6)
7064810 Optical range finder with directed attention 38 2003
* 2005/0057,741 Optical range finder with directed attention 3 2003
6839127 Optical range finder having a micro-mirror array 25 2003
7916898 Method and system for identifying an edge of a crop 38 2004
* 2005/0088,643 Method and system for identifying an edge of a crop 29 2004
7206063 Optical range finder with directed attention 11 2006
 
TECHNION RESEARCH & DEVELOPMENT FOUNDATION LTD. (3)
7412358 Efficient method of extracting the pull-in parameters of an electrostatically activated MEMS device for the purpose of designing the device 1 2002
7423794 Device and method for stacked multi-level uncoupled electrostatic actuators 0 2004
* 2006/0279,862 Device and method for stacked multi-level uncoupled electrostatic actuators 3 2004
 
Strasbaugh (2)
7018268 Protection of work piece during surface processing 6 2003
* 2003/0211,813 PROTECTION OF WORK PIECE DURING SURFACE PROCESSING 0 2003
 
ANALOG DEVICES, INC. (4)
6674140 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor 22 2001
7220614 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor 6 2003
* 2003/0211,650 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor 2 2003
7364942 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor 5 2007
 
MICROSS ADVANCED INTERCONNECT TECHNOLOGY LLC (5)
6373682 Electrostatically controlled variable capacitor 59 1999
6377438 Hybrid microelectromechanical system tunable capacitor and associated fabrication methods 68 2000
6396620 Electrostatically actuated electromagnetic radiation shutter 13 2000
7026602 Electromagnetic radiation detectors having a microelectromechanical shutter device 7 2003
* 2004/0046,123 Electromagnetic radiation detectors having a microelectromechanical shutter device 8 2003
 
EASTMAN KODAK COMPANY (30)
* 5910856 Integrated hybrid silicon-based micro-reflector 52 1998
* 6084626 Grating modulator array 84 1998
6215547 Reflective liquid crystal modulator based printing system 56 1998
6330018 Method and apparatus for printing high resolution images using reflective LCD modulators 15 1999
6396530 Method for improving exposure resolution using multiple exposures 1 2000
6943919 Method and apparatus for correcting defects in a spatial light modulator based printing system 1 2000
6407766 Method and apparatus for printing to a photosensitive media using multiple spatial light modulators 34 2000
6646716 Method and apparatus for printing multiple simultaneous images onto a photosensitive media 15 2000
6614462 Method and apparatus for printing high resolution images using reflective LCD modulators 3 2000
6930797 Method and apparatus for printing high resolution images using multiple reflective spatial light modulators 4 2001
* 2002/0118,375 Method and apparatus for printing high resolution images using multiple reflective spatial light modulators 0 2001
6980321 Method and apparatus for printing high resolution images using multiple reflective spatial light modulators 2 2001
* 2003/0035,123 Method and apparatus for printing high resolution images using multiple reflective spatial light modulators 1 2001
6778290 Printing image frames corresponding to motion pictures 6 2001
6980280 Two level image writer 4 2001
7145520 Display apparatus box using a spatial light modulator 8 2001
6574043 Method for enhanced bit depth in an imaging apparatus using a spatial light modulator 13 2001
6574032 Imaging apparatus using dither to minimize pixel effects 14 2002
6590695 Micro-mechanical polarization-based modulator 14 2002
6734889 Color printer comprising a linear grating spatial light modulator 4 2002
7164434 LCD based imaging apparatus for printing multiple formats 0 2002
* 2004/0070,665 LCD based imaging apparatus for printing multiple formats 0 2002
7369268 Light source using large area LEDs 6 2003
* 2004/0135,874 Light source using large area LEDs 4 2003
6707595 Micro-mechanical polarization-based modulator 8 2003
6700599 Apparatus for printing high resolution images using reflective LCD modulators 1 2003
7042483 Apparatus and method for printing using a light emissive array 2 2003
6801238 Apparatus for printing high resolution images using reflective LCD modulators 2 2003
* 2007/0153,080 High-speed continuous film writer 3 2005
7782347 Light source using large area LEDs 4 2008
 
PLAIN SIGHT SYSTEMS, INC. (6)
7652765 Hyper-spectral imaging methods and devices 12 2005
7219086 System and method for hyper-spectral analysis 11 2005
7180588 Devices and method for spectral measurements 22 2005
* 2005/0270,528 Hyper-spectral imaging methods and devices 23 2005
* 2005/0243,312 Devices and method for spectral measurements 13 2005
7248358 Devices and method for spectral measurements 10 2005
 
HER MAJESTY THE QUEEN AS REPRESENTED BY THE MINISTER OF NATIONAL DEFENCE OF HER MAJESTY'S CANADIAN GOVERNMENT (1)
7088493 Light modulating microdevice 10 2004
 
SILICON QUEST KABUSHIKI-KAISHA (28)
7835062 Mircromirror device having a vertical hinge 2 2007
* 2008/0074,729 Mircromirror device having a vertical hinge 1 2007
7907320 Micromirror device with a single address electrode 0 2008
7907325 Control methods for micromirror devices implemented with a single address electrode 0 2008
7839561 Micromirror device with a single address electrode 0 2008
7649673 Micromirror device with a single address electrode 2 2008
* 2009/0174,926 Micromirror device with a single address electrode 2 2008
8179591 Spatial light modulator and mirror array device 0 2008
7973994 Spatial light modulator 0 2008
7876492 Spatial light modulator and mirror array device 0 2008
7848005 Spatial light modulator implemented with a mirror array device 0 2008
* 2009/0128,462 Spatial light modulator and mirror device 0 2008
* 2009/0128,884 Spatial light modulator implemented with a mirror array device 1 2008
* 2009/0080,059 Spatial light modulator 0 2008
7911680 Micromirror device having a vertical hinge 1 2009
* 2009/0195,858 Changing an electrode function 0 2009
* 2009/0207,325 Algorithm for SLM of single hinge type 0 2009
* 2009/0180,038 Mirror control within time slot for SLM 1 2009
7916381 Spatial light modulator including drive lines 0 2009
8154474 Driving method of memory access 2 2009
7733558 Display device with an addressable movable electrode 1 2009
* 2009/0219,279 Driving method of memory access 2 2009
* 2009/0185,085 Display device with an addressable movable electrode 1 2009
7969395 Spatial light modulator and mirror device 0 2009
8081371 Spatial light modulator and display apparatus 0 2009
8228595 Sequence and timing control of writing and rewriting pixel memories with substantially lower data rate 0 2009
7957050 Mirror device comprising layered electrode 0 2009
8199394 Mircromirror device having a vertical hinge 0 2010
 
KAWASAKI MICROELECTRONICS, INC. (1)
6933998 Display devices with integrated control elements and methods of making devices 3 2000
 
AGILENT TECHNOLOGIES, INC. (1)
6642498 Micromirror optical multiplexer and method for directing light towards an array of sensors 2 2001
 
HOEL, CARLTON H. (1)
* 5619061 Micromechanical microwave switching 203 1994
 
LOS ALAMOS NATIONAL SECURITY, LLC (1)
* 2005/0190,286 Integrated array sensor for real time measurements of biological samples 5 2004
 
360 TV, INC. (1)
* 6072545 Video image rotating apparatus 14 1998
* Cited By Examiner