US Patent No: 5,061,049

Number of patents in Portfolio can not be more than 2000

Spatial light modulator and method

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Abstract

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An electrostatically deflectable beam spatial light modulator with the beams (30), address electrodes (42, 46), and landing electrodes (40, 41) to provide soft-landing of the beams on the landing electrodes (40, 41) which gives uniform large-angle deflection plus high reliability.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX18253

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hornbeck, Larry J Van Alstyne, TX 38 11777

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (5)
4,441,791 Deformable mirror light modulator 627 1982
4,638,309 Spatial light modulator drive system 67 1983
4,710,732 Spatial light modulator and method 490 1984
4,596,992 Linear spatial light modulator and printer 394 1984
4,662,746 Spatial light modulator and method 495 1985
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (3)
4,317,611 Optical ray deflection apparatus 177 1980
4,592,628 Mirror array light valve 96 1981
4,831,614 Direct access storage unit using tunneling current techniques 92 1987
 
CANON KABUSHIKI KAISHA (1)
4,793,699 Projection apparatus provided with an electro-mechanical transducer element 30 1988
 
The United States of America as represented by the Secretary of the Air Force (1)
4,698,602 Micromirror spatial light modulator 91 1985

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (226)
7,123,216 Photonic MEMS and structures 556 1999
7,138,984 Directly laminated touch sensitive screen 108 2001
7,042,643 Interferometric modulation of radiation 186 2002
7,110,158 Photonic MEMS and structures 179 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 31 2002
7,297,471 Method for manufacturing an array of interferometric modulators 19 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 106 2003
7,460,291 Separable modulator 54 2003
7,012,726 MEMS devices with unreleased thin film components 76 2003
7,198,973 Method for fabricating an interference display unit 102 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 152 2003
7,692,844 Interferometric modulation of radiation 23 2004
7,532,194 Driver voltage adjuster 4 2004
7,119,945 Altering temporal response of microelectromechanical elements 137 2004
7,706,050 Integrated modulator illumination 32 2004
7,193,768 Interference display cell 24 2004
7,476,327 Method of manufacture for microelectromechanical devices 39 2004
7,060,895 Modifying the electro-mechanical behavior of devices 49 2004
7,280,265 Interferometric modulation of radiation 46 2004
7,164,520 Packaging for an interferometric modulator 38 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 50 2004
7,855,824 Method and system for color optimization in a display 20 2005
7,893,919 Display region architectures 9 2005
7,813,026 System and method of reducing color shift in a display 16 2005
7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator 18 2005
7,424,198 Method and device for packaging a substrate 3 2005
7,142,346 System and method for addressing a MEMS display 32 2005
7,515,147 Staggered column drive circuit systems and methods 14 2005
7,379,227 Method and device for modulating light 13 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 40 2005
7,289,259 Conductive bus structure for interferometric modulator array 67 2005
7,460,246 Method and system for sensing light using interferometric elements 12 2005
7,560,299 Systems and methods of actuating MEMS display elements 21 2005
7,012,732 Method and device for modulating light with a time-varying signal 63 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 8 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 4 2005
7,259,449 Method and system for sealing a substrate 16 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 4 2005
7,668,415 Method and device for providing electronic circuitry on a backplate 6 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 15 2005
7,420,728 Methods of fabricating interferometric modulators by selectively removing a material 17 2005
7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 8 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 8 2005
7,299,681 Method and system for detecting leak in electronic devices 2 2005
7,920,135 Method and system for driving a bi-stable display 5 2005
7,679,627 Controller and driver features for bi-stable display 3 2005
7,586,484 Controller and driver features for bi-stable display 17 2005
7,535,466 System with server based control of client device display features 9 2005
7,532,195 Method and system for reducing power consumption in a display 8 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 48 2005
7,289,256 Electrical characterization of interferometric modulators 13 2005
7,602,375 Method and system for writing data to MEMS display elements 4 2005
7,916,103 System and method for display device with end-of-life phenomena 2 2005
7,321,456 Method and device for corner interferometric modulation 43 2005
7,626,581 Device and method for display memory using manipulation of mechanical response 4 2005
7,372,613 Method and device for multistate interferometric light modulation 74 2005
7,889,163 Drive method for MEMS devices 20 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 1 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 43 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 4 2005
7,843,410 Method and device for electrically programmable display 6 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 39 2005
7,547,565 Method of manufacturing optical interference color display 13 2005
7,527,995 Method of making prestructure for MEMS systems 31 2005
7,808,703 System and method for implementation of interferometric modulator displays 5 2005
7,349,136 Method and device for a display having transparent components integrated therein 8 2005
RE42119 Microelectrochemical systems device and method for fabricating same 7 2005
8,008,736 Analog interferometric modulator device 4 2005
7,710,629 System and method for display device with reinforcing substance 4 2005
8,124,434 Method and system for packaging a display 1 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 27 2005
7,471,444 Interferometric modulation of radiation 14 2005
7,388,706 Photonic MEMS and structures 15 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 6 2005
7,196,837 Area array modulation and lead reduction in interferometric modulators 26 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 65 2005
8,004,504 Reduced capacitance display element 6 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 6 2005
7,417,783 Mirror and mirror layer for optical modulator and method 9 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 15 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 8 2005
RE40436 Hermetic seal and method to create the same 8 2005
8,878,825 System and method for providing a variable refresh rate of an interferometric modulator display 0 2005
7,304,784 Reflective display device having viewable display on both sides 45 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 83 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 32 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 5 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 3 2005
7,310,179 Method and device for selective adjustment of hysteresis window 8 2005
7,724,993 MEMS switches with deforming membranes 2 2005
7,492,502 Method of fabricating a free-standing microstructure 12 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 34 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 17 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 19 2005
7,136,213 Interferometric modulators having charge persistence 16 2005
7,564,612 Photonic MEMS and structures 71 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 201 2005
7,369,294 Ornamental display device 46 2005
7,710,636 Systems and methods using interferometric optical modulators and diffusers 23 2005
7,684,104 MEMS using filler material and method 11 2005
7,653,371 Selectable capacitance circuit 18 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 5 2005
7,675,669 Method and system for driving interferometric modulators 4 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 11 2005
7,545,550 Systems and methods of actuating MEMS display elements 5 2005
8,310,441 Method and system for writing data to MEMS display elements 1 2005
7,446,927 MEMS switch with set and latch electrodes 6 2005
7,486,429 Method and device for multistate interferometric light modulation 12 2005
7,236,284 Photonic MEMS and structures 94 2005
7,630,114 Diffusion barrier layer for MEMS devices 3 2005
8,014,059 System and method for charge control in a MEMS device 0 2005
7,776,631 MEMS device and method of forming a MEMS device 16 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 0 2005
7,403,323 Process control monitors for interferometric modulators 1 2005
7,369,252 Process control monitors for interferometric modulators 0 2005
7,259,865 Process control monitors for interferometric modulators 20 2005
8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays 1 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 4 2005
7,355,779 Method and system for driving MEMS display elements 4 2006
7,916,980 Interconnect structure for MEMS device 2 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 8 2006
8,194,056 Method and system for writing data to MEMS display elements 1 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 2 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 8 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 28 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 46 2006
7,483,197 Photonic MEMS and structures 18 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 13 2006
7,532,377 Movable micro-electromechanical device 38 2006
7,643,203 Interferometric optical display system with broadband characteristics 24 2006
7,948,457 Systems and methods of actuating MEMS display elements 1 2006
7,903,047 Mode indicator for interferometric modulator displays 3 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 2 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 8 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 5 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 50 2006
8,049,713 Power consumption optimized display update 2 2006
7,920,136 System and method of driving a MEMS display device 1 2006
7,706,044 Optical interference display cell and method of making the same 9 2006
7,880,954 Integrated modulator illumination 17 2006
7,369,292 Electrode and interconnect materials for MEMS devices 16 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 19 2006
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,907,319 Method and device for modulating light with optical compensation 26 2006
7,161,094 Modifying the electro-mechanical behavior of devices 25 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 84 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 18 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 6 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 73 2006
7,187,489 Photonic MEMS and structures 91 2006
7,636,151 System and method for providing residual stress test structures 0 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 7 2006
7,702,192 Systems and methods for driving MEMS display 0 2006
7,835,061 Support structures for free-standing electromechanical devices 10 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 50 2006
7,777,715 Passive circuits for de-multiplexing display inputs 3 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 13 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 4 2006
7,534,640 Support structure for MEMS device and methods therefor 15 2006
7,830,586 Transparent thin films 18 2006
7,554,711 MEMS devices with stiction bumps 44 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 6 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 35 2006
7,660,058 Methods for etching layers within a MEMS device to achieve a tapered edge 8 2006
7,928,940 Drive method for MEMS devices 0 2006
7,580,172 MEMS device and interconnects for same 5 2006
7,898,722 Microelectromechanical device with restoring electrode 35 2006
7,388,697 System and method for addressing a MEMS display 8 2006
7,242,512 System and method for addressing a MEMS display 9 2006
7,667,884 Interferometric modulators having charge persistence 3 2006
7,355,782 Systems and methods of controlling micro-electromechanical devices 6 2006
7,535,621 Aluminum fluoride films for microelectromechanical system applications 34 2006
7,652,814 MEMS device with integrated optical element 4 2007
7,872,792 Method and device for modulating light with multiple electrodes 11 2007
7,846,344 Method and device for modulating light 1 2007
7,733,552 MEMS cavity-coating layers and methods 5 2007
8,059,326 Display devices comprising of interferometric modulator and sensor 6 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 17 2007
7,570,415 MEMS device and interconnects for same 2 2007
8,081,369 System and method for a MEMS device 2 2007
7,852,545 Method and device for modulating light 16 2007
7,839,556 Method and device for modulating light 2 2007
7,830,587 Method and device for modulating light with semiconductor substrate 17 2007
7,826,120 Method and device for multi-color interferometric modulation 16 2007
7,808,694 Method and device for modulating light 16 2007
7,800,809 System and method for a MEMS device 2 2007
7,738,157 System and method for a MEMS device 21 2007
8,072,402 Interferometric optical modulator with broadband reflection characteristics 8 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 5 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 7 2007
7,532,386 Process for modifying offset voltage characteristics of an interferometric modulator 9 2007
7,623,752 System and method of testing humidity in a sealed MEMS device 5 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 1 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 4 2008
8,105,496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 2 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 2 2008
8,222,066 Eliminate release etch attack by interface modification in sacrificial layers 0 2008
7,688,494 Electrode and interconnect materials for MEMS devices 14 2008
7,944,603 Microelectromechanical device and method utilizing a porous surface 0 2008
7,851,239 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 1 2008
7,738,158 Electromechanical device treatment with water vapor 1 2008
8,416,487 Photonic MEMS and structures 0 2009
8,169,687 Photonic MEMS and structures 0 2009
7,791,787 Moveable micro-electromechanical device 2 2009
7,830,588 Method of making a light modulating display device and associated transistor circuitry and structures thereof 24 2009
8,735,225 Method and system for packaging MEMS devices with glass seal 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 0 2009
8,077,379 Interferometric optical display system with broadband characteristics 0 2009
8,422,108 Method and device for modulating light with optical compensation 0 2009
8,736,590 Low voltage driver scheme for interferometric modulators 0 2010
8,126,297 MEMS device fabricated on a pre-patterned substrate 1 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
7,929,197 System and method for a MEMS device 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,853,747 Method of making an electronic device with a curved backplate 0 2010
8,035,884 Method and device for modulating light with semiconductor substrate 4 2010
8,817,357 Mechanical layer and methods of forming the same 0 2011
8,682,130 Method and device for packaging a substrate 0 2011
8,749,538 Device and method of controlling brightness of a display based on ambient lighting conditions 0 2011
8,681,079 Interferometric optical modulator with broadband reflection characteristics 0 2011
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 0 2012
8,878,771 Method and system for reducing power consumption in a display 0 2012
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
8,791,897 Method and system for writing data to MEMS display elements 0 2012
8,885,244 Display device 0 2013
 
TEXAS INSTRUMENTS INCORPORATED (136)
5,212,555 Image capture with spatial light modulator and single-cell photosensor 128 1991
5,202,785 Method and device for steering light 109 1991
5,223,971 Light beam steering with deformable membrane device 12 1991
5,212,582 Electrostatically controlled beam steering device and method 347 1992
5,312,513 Methods of forming multiple phase light modulators 278 1992
5,818,095 High-yield spatial light modulator with light blocking layer 311 1992
5,280,277 Field updated deformable mirror device 335 1992
5,504,575 SLM spectrometer 138 1993
5,457,493 Digital micro-mirror based image simulation system 328 1993
5,452,024 DMD display system 424 1993
6,362,835 Brightness and contrast control for a digital pulse-width modulated display system 23 1993
5,602,671 Low surface energy passivation layer for micromechanical devices 278 1994
5,606,441 Multiple phase light modulation using binary addressing 225 1994
5,444,566 Optimized electronic operation of digital micromirror devices 361 1994
5,576,878 Use of incompatible materials to eliminate sticking of micro-mechanical devices 55 1994
5,458,716 Methods for manufacturing a thermally enhanced molded cavity package having a parallel lid 76 1994
5,392,151 Method and apparatus for steering light 88 1994
5,640,214 Printer and display systems with bidirectional light collection structures 15 1994
5,490,009 Enhanced resolution for digital micro-mirror displays 118 1994
5,796,442 Multi-format television reciever 94 1994
5,703,728 Support post architecture for micromechanical devices 35 1994
5,650,881 Support post architecture for micromechanical devices 264 1994
5,552,924 Micromechanical device having an improved beam 249 1994
5,687,130 Memory cell with single bit line read back 0 1994
5,648,730 Large integrated circuit with modular probe structures 17 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 205 1994
5,602,043 Monolithic thermal detector with pyroelectric film and method 19 1995
5,508,841 Spatial light modulator based phase contrast image projection system 79 1995
5,717,513 Unsticking mirror elements of digital micromirror device 24 1995
5,617,242 Repair of digital micromirror device having white defects 4 1995
5,844,588 DMD modulated continuous wave light source for xerographic printer 84 1995
5,622,900 Wafer-like processing after sawing DMDs 37 1995
5,612,753 Full-color projection display system using two light modulators 86 1995
5,504,614 Method for fabricating a DMD spatial light modulator with a hardened hinge 113 1995
5,671,083 Spatial light modulator with buried passive charge storage cell array 33 1995
5,682,174 Memory cell array for digital spatial light modulator 19 1995
5,670,977 Spatial light modulator having single bit-line dual-latch memory cells 19 1995
5,579,151 Spatial light modulator 70 1995
5,696,619 Micromechanical device having an improved beam 105 1995
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 244 1995
5,670,976 Spatial light modulator having redundant memory cells 8 1995
5,610,438 Micro-mechanical device with non-evaporable getter 298 1995
6,232,936 DMD Architecture to improve horizontal resolution 215 1995
5,706,061 Spatial light image display system with synchronized and modulated light source 149 1995
5,535,047 Active yoke hidden hinge digital micromirror device 467 1995
5,754,217 Printing system and method using a staggered array spatial light modulator having masked mirror elements 58 1995
5,629,794 Spatial light modulator having an analog beam for steering light 92 1995
6,447,126 Support post architecture for micromechanical devices 330 1995
5,771,060 Method for printing control in the process direction 15 1995
5,729,276 Method for printing using horizontal offset 2 1995
5,696,549 Method of reducing print artifacts 1 1995
5,631,782 Support post architecture for micromechanical devices 79 1995
5,627,580 System and method for enhanced printing 29 1995
5,614,937 Method for high resolution printing 46 1995
5,604,625 Micromechanical device manufactured out of incompatible materials 5 1995
5,597,736 High-yield spatial light modulator with light blocking layer 251 1995
5,523,881 Optical correlator using light phase modulation and two reflective spatial light modulators 59 1995
5,699,168 Grayscale printing with sliding window memory 1 1995
5,739,941 Non-linear hinge for micro-mechanical device 41 1995
5,668,062 Method for processing semiconductor wafer with reduced particle contamination during saw 9 1995
6,002,452 Sequential color display system with spoke synchronous frame rate conversion 48 1996
5,815,641 Spatial light modulator with improved peak white performance 26 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 289 1996
5,719,695 Spatial light modulator with superstructure light shield 80 1996
6,024,801 Method of cleaning and treating a semiconductor device including a micromechanical device 95 1996
5,942,054 Micromechanical device with reduced load relaxation 13 1996
6,249,374 Wide field of view infrared zoom lens assembly having a constant F/number 13 1997
6,018,414 Dual band infrared lens assembly using diffractive optics 11 1997
5,852,516 Dual purpose infrared lens assembly using diffractive optics 8 1997
5,796,514 Infrared zoom lens assembly having a variable F/number 10 1997
6,107,979 Monolithic programmable format pixel array 23 1997
5,939,785 Micromechanical device including time-release passivant 123 1997
5,872,046 Method of cleaning wafer after partial saw 57 1997
5,817,569 Method of reducing wafer particles after partial saw 11 1997
6,686,291 Undercut process with isotropic plasma etching at package level 4 1997
6,246,446 Auto focus system for a SLM based image display system 36 1997
5,953,153 Spatial light modulator with improved light shield 15 1997
5,912,758 Bipolar reset for spatial light modulators 208 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 293 1998
6,163,363 Photofinishing utilizing modulated light source array 28 1998
6,147,790 Spring-ring micromechanical device 243 1999
6,038,056 Spatial light modulator having improved contrast ratio 266 1999
6,204,085 Reduced deformation of micromechanical devices through thermal stabilization 31 1999
6,843,936 Getter for enhanced micromechanical device performance 45 1999
6,300,294 Lubricant delivery for micromechanical devices 49 1999
6,590,549 Analog pulse width modulation of video data 10 1999
6,285,490 High yield spring-ring micromirror 35 1999
6,324,006 Spoke light recapture in sequential color imaging systems 52 2000
6,552,840 Electrostatic efficiency of micromechanical devices 239 2000
6,469,821 Micromirror structures for orthogonal illumination 19 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 218 2000
7,026,710 Molded package for micromechanical devices and method of fabrication 16 2001
6,753,037 Re-coating MEMS devices using dissolved resins 3 2001
6,816,640 Optical add drop multiplexer 7 2001
6,633,694 Micromirror optical switch 10 2001
6,618,520 Micromirror optical switch 13 2001
7,230,656 Sequential color filter 3 2001
6,992,375 Anchor for device package 14 2001
6,445,505 Spoke light recapture in sequential color imaging systems 17 2001
6,906,850 Capacitively coupled micromirror 2 2001
6,683,290 Constant light disable for spatial light modulator 4 2001
7,071,025 Separating wafers coated with plastic films 1 2001
6,787,187 Micromechanical device fabrication 5 2001
6,542,282 Post metal etch clean process using soft mask 6 2001
6,475,570 Diluent assisted lubrication of micromechanical devices 16 2001
6,858,910 Method of fabricating a molded package for micromechanical devices 19 2002
7,106,491 Split beam micromirror 5 2002
6,724,518 Split beam micromirror 2002
7,079,095 Analog pulse width modulation of video data 2 2003
7,061,512 Constant-weight bit-slice PWM method and system for scrolling color display systems 16 2003
7,019,881 Display system with clock dropping 11 2003
7,090,787 Drying getters 4 2003
7,164,397 Discrete light color processor 14 2003
7,280,126 Methods and apparatus for converting an orthogonal pixel format to a diamond pixel format 0 2003
7,009,745 Coating for optical MEMS devices 6 2003
7,289,090 Pulsed LED scan-ring array for boosting display system lumens 28 2003
6,987,601 Damped control of a micromechanical device 4 2003
6,985,278 Damped control of a micromechanical device 10 2003
6,891,657 Damped control of a micromechanical device 16 2003
7,884,988 Supplemental reset pulse 1 2004
7,651,734 Micromechanical device fabrication 0 2004
7,119,940 Capacitively coupled micromirror 3 2005
7,362,493 Micromirror and post arrangements on substrates 3 2005
7,075,702 Micromirror and post arrangements on substrates 15 2005
7,403,324 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 2 2006
7,233,427 Display system with clock dropping 9 2006
8,040,305 Constant-weight bit-slice PWM method and system for scrolling color display systems 0 2006
8,432,597 Micro-mirror hinge 0 2006
8,493,288 System and method for color-specific sequence scaling for sequential color systems 1 2006
7,737,989 System and method for computing color correction coefficients 5 2006
8,305,391 System and method to generate multiprimary signals 1 2006
7,405,856 Display system timing control method 6 2007
8,472,100 Multilayered deformable element with reduced memory properties in a MEMS device 0 2008
7,997,744 Electrically conductive protection layer and a microelectromechanical device using the same 0 2008
8,693,082 Micromirror array assembly with in-array pillars 0 2010
8,542,244 System and method to generate multiprimary signals 0 2012
 
SILICON LIGHT MACHINES CORPORATION (48)
5,841,579 Flat diffraction grating light valve 182 1995
5,808,797 Method and apparatus for modulating a light beam 324 1996
5,982,553 Display device incorporating one-dimensional grating light-valve array 359 1997
6,088,102 Display apparatus including grating light-valve array and interferometric optical system 132 1997
6,271,808 Stereo head mounted display using a single display device 63 1998
6,130,770 Electron gun activated grating light valve 73 1998
6,101,036 Embossed diffraction grating alone and in combination with changeable image display 69 1998
6,215,579 Method and apparatus for modulating an incident light beam for forming a two-dimensional image 112 1998
6,956,878 Method and apparatus for reducing laser speckle using polarization averaging 31 2000
7,177,081 High contrast grating light valve type device 18 2001
6,764,875 Method of and apparatus for sealing an hermetic lid to a semiconductor die 28 2001
6,865,346 Fiber optic transceiver 4 2001
6,747,781 Method, apparatus, and diffuser for reducing laser speckle 65 2001
6,829,092 Blazed grating light valve 13 2001
6,707,591 Angled illumination for a single order light modulator based projection system 4 2001
6,800,238 Method for domain patterning in low coercive field ferroelectrics 1 2002
6,782,205 Method and apparatus for dynamic equalization in wavelength division multiplexing 64 2002
6,991,953 Microelectronic mechanical system and methods 10 2002
6,767,751 Integrated driver process flow 5 2002
6,728,023 Optical device arrays with optimized image resolution 24 2002
7,054,515 Diffractive light modulator-based dynamic equalizer with integrated spectral monitor 1 2002
6,822,797 Light modulator structure for producing high-contrast operation using zero-order light 6 2002
6,872,984 Method of sealing a hermetic lid to a semiconductor die at an angle 25 2002
6,829,258 Rapidly tunable external cavity laser 30 2002
6,908,201 Micro-support structures 4 2002
6,813,059 Reduced formation of asperities in contact micro-structures 76 2002
6,714,337 Method and device for modulating a light beam and having an improved gamma response 8 2002
7,057,795 Micro-structures with individually addressable ribbon pairs 2 2002
6,801,354 2-D diffraction grating for substantially eliminating polarization dependent losses 10 2002
6,956,995 Optical communication arrangement 4 2002
6,712,480 Controlled curvature of stressed micro-structures 7 2002
7,049,164 Microelectronic mechanical system and methods 55 2002
6,928,207 Apparatus for selectively blocking WDM channels 2 2002
7,057,819 High contrast tilting ribbon blazed grating 4 2002
6,987,600 Arbitrary phase profile for better equalization in dynamic gain equalizer 1 2002
6,934,070 Chirped optical MEM device 4 2002
6,927,891 Tilt-able grating plane for improved crosstalk in 1×N blaze switches 3 2002
7,068,372 MEMS interferometer-based reconfigurable optical add-and-drop multiplexor 5 2003
7,286,764 Reconfigurable modulator-based optical add-and-drop multiplexer 3 2003
6,947,613 Wavelength selective switch and equalizer 1 2003
6,922,272 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices 7 2003
7,391,973 Two-stage gain equalizer 1 2003
7,046,420 MEM micro-structures and methods of making the same 3 2003
7,027,202 Silicon substrate as a light modulator sacrificial layer 55 2003
6,922,273 PDL mitigation structure for diffractive MEMS and gratings 2 2003
6,829,077 Diffractive light modulator with dynamically rotatable diffraction plane 3 2003
6,806,997 Patterned diffractive light modulator ribbon for PDL reduction 2 2003
7,042,611 Pre-deflected bias ribbons 0 2003
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (39)
6,498,686 Single light valve projector with reduced sequential color artifacts 3 2001
7,081,928 Optical system for full color, video projector using single light valve with plural sub-pixel reflectors 4 2001
6,666,561 Continuously variable analog micro-mirror device 234 2002
6,903,487 Micro-mirror device with increased mirror tilt 9 2003
7,098,936 Image display system and method including optical scaling 3 2003
6,972,882 Micro-mirror device with light angle amplification 4 2003
7,289,114 Generating and displaying spatially offset sub-frames 0 2003
7,109,981 Generating and displaying spatially offset sub-frames 8 2003
7,253,811 Generating and displaying spatially offset sub-frames 1 2003
7,190,380 Generating and displaying spatially offset sub-frames 16 2003
6,843,576 Continuously variable analog micro-mirror device 8 2003
7,301,549 Generating and displaying spatially offset sub-frames on a diamond grid 3 2003
7,355,612 Displaying spatially offset sub-frames with a display device having a set of defective display pixels 1 2003
7,086,736 Display system with sequential color and wobble device 3 2004
7,483,044 Displaying sub-frames at spatially offset positions on a circle 0 2004
7,463,272 Generating and displaying spatially offset sub-frames 1 2004
7,660,485 Generating and displaying spatially offset sub-frames using error values 1 2004
7,668,398 Generating and displaying spatially offset sub-frames using image data with a portion converted to zero values 1 2004
7,453,478 Address generation in a light modulator 0 2004
7,522,177 Image display system and method 0 2004
7,623,142 Flexure 2 2004
7,453,449 System and method for correcting defective pixels of a display device 2 2004
7,676,113 Generating and displaying spatially offset sub-frames using a sharpening factor 0 2004
8,872,869 System and method for correcting defective pixels of a display device 0 2004
7,466,291 Projection of overlapping single-color sub-frames onto a surface 3 2005
7,443,364 Projection of overlapping sub-frames onto a surface 0 2005
7,407,295 Projection of overlapping sub-frames onto a surface using light sources with different spectral distributions 3 2005
7,557,819 Image display system and method including optical scaling 0 2005
7,387,392 System and method for projecting sub-frames onto a surface 3 2005
7,470,032 Projection of overlapping and temporally offset sub-frames onto a surface 19 2005
7,559,661 Image analysis for generation of image data subsets 0 2005
7,154,508 Displaying least significant color image bit-planes in less than all image sub-frame locations 5 2006
7,907,792 Blend maps for rendering an image frame 5 2006
7,854,518 Mesh for rendering an image frame 5 2006
7,800,628 System and method for generating scale maps 1 2006
7,742,011 Image display system 4 2006
7,499,214 Ambient light absorbing screen 8 2006
7,986,356 System and method for determining a gamma curve of a display device 3 2007
8,328,365 Mesh for mapping domains based on regularized fiducial marks 0 2009
 
VENTURE LENDING & LEASING IV, INC. (36)
6,538,800 Reflective spatial light modulator with deflectable elements formed on a light transmissive substrate 48 2002
6,690,502 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 5 2002
7,099,065 Micromirrors with OFF-angle electrodes and stops 5 2003
6,804,039 Multilayer hinge structures for micro-mirror arrays in projection displays 14 2003
6,798,561 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 11 2003
7,300,162 Projection display 5 2004
7,196,740 Projection TV with improved micromirror array 7 2004
7,172,296 Projection display 9 2004
7,167,297 Micromirror array 2 2004
7,023,606 Micromirror array for projection TV 8 2004
7,018,052 Projection TV with improved micromirror array 5 2004
7,012,731 Packaged micromirror array for a projection display 4 2004
7,006,275 Packaged micromirror array for a projection display 5 2004
7,787,170 Micromirror array assembly with in-array pillars 20 2004
7,212,359 Color rendering of illumination light in display systems 4 2004
7,131,762 Color rendering of illumination light in display systems 6 2004
7,262,817 Rear projection TV with improved micromirror array 11 2004
7,436,572 Micromirrors and hinge structures for micromirror arrays in projection displays 2 2004
7,019,880 Micromirrors and hinge structures for micromirror arrays in projection displays 1 2004
6,980,349 Micromirrors with novel mirror plates 20 2004
7,113,322 Micromirror having offset addressing electrode 4 2004
6,947,200 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 159 2004
7,158,279 Spatial light modulators with non-uniform pixels 1 2004
7,092,143 Micromirror array device and a method for making the same 4 2004
7,023,607 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 9 2004
7,012,733 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 2 2004
7,405,860 Spatial light modulators with light blocking/absorbing areas 3 2005
7,027,207 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 17 2005
7,009,754 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 89 2005
6,975,444 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 21 2005
7,629,190 Method for making a micromechanical device by using a sacrificial substrate 0 2005
7,671,428 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 1 2005
7,655,492 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 0 2005
7,573,111 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 0 2005
7,286,278 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 2 2005
7,295,363 Optical coating on light transmissive substrates of micromirror devices 1 2005
 
Miradia Inc. (26)
7,026,695 Method and apparatus to reduce parasitic forces in electro-mechanical systems 8 2003
7,118,234 Reflective spatial light modulator 5 2004
7,092,140 Architecture of a reflective spatial light modulator 9 2004
7,022,245 Fabrication of a reflective spatial light modulator 10 2004
7,449,284 Method and structure for fabricating mechanical mirror structures using backside alignment techniques 0 2004
7,034,984 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 34 2004
6,992,810 High fill ratio reflective spatial light modulator with hidden hinge 36 2004
7,042,619 Mirror structure with single crystal silicon cross-member 21 2004
7,068,417 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 26 2004
7,206,110 Memory cell dual protection 4 2004
7,172,921 Method and structure for forming an integrated spatial light modulator 4 2005
7,199,918 Electrical contact method and structure for deflection devices formed in an array configuration 0 2005
7,142,349 Method and structure for reducing parasitic influences of deflection devices on spatial light modulators 0 2005
7,298,539 Co-planar surface and torsion device mirror structure and method of manufacture for optical displays 1 2005
7,202,989 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 2 2005
7,190,508 Method and structure of patterning landing pad structures for spatial light modulators 1 2005
7,184,195 Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator 48 2005
7,502,158 Method and structure for high fill factor spatial light modulator with integrated spacer layer 0 2005
7,369,297 Mirror structure with single crystal silicon cross-member 2 2005
7,233,428 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 4 2006
7,670,880 Method and structure for forming an integrated spatial light modulator 1 2007
7,382,519 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 1 2007
7,570,416 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 0 2007
7,428,094 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 0 2007
8,207,004 Method and structure for forming a gyroscope and accelerometer 2 2009
8,530,259 Method and structure for forming a gyroscope and accelerometer 0 2012
 
EASTMAN KODAK COMPANY (25)
5,910,856 Integrated hybrid silicon-based micro-reflector 52 1998
6,084,626 Grating modulator array 80 1998
6,215,547 Reflective liquid crystal modulator based printing system 49 1998
6,330,018 Method and apparatus for printing high resolution images using reflective LCD modulators 15 1999
6,396,530 Method for improving exposure resolution using multiple exposures 1 2000
6,943,919 Method and apparatus for correcting defects in a spatial light modulator based printing system 1 2000
6,407,766 Method and apparatus for printing to a photosensitive media using multiple spatial light modulators 31 2000
6,646,716 Method and apparatus for printing multiple simultaneous images onto a photosensitive media 15 2000
6,614,462 Method and apparatus for printing high resolution images using reflective LCD modulators 3 2000
6,930,797 Method and apparatus for printing high resolution images using multiple reflective spatial light modulators 4 2001
6,980,321 Method and apparatus for printing high resolution images using multiple reflective spatial light modulators 2 2001
6,778,290 Printing image frames corresponding to motion pictures 5 2001
6,980,280 Two level image writer 3 2001
7,145,520 Display apparatus box using a spatial light modulator 7 2001
6,574,043 Method for enhanced bit depth in an imaging apparatus using a spatial light modulator 13 2001
6,574,032 Imaging apparatus using dither to minimize pixel effects 13 2002
6,590,695 Micro-mechanical polarization-based modulator 14 2002
6,734,889 Color printer comprising a linear grating spatial light modulator 3 2002
7,164,434 LCD based imaging apparatus for printing multiple formats 0 2002
7,369,268 Light source using large area LEDs 3 2003
6,707,595 Micro-mechanical polarization-based modulator 7 2003
6,700,599 Apparatus for printing high resolution images using reflective LCD modulators 1 2003
7,042,483 Apparatus and method for printing using a light emissive array 2 2003
6,801,238 Apparatus for printing high resolution images using reflective LCD modulators 2 2003
7,782,347 Light source using large area LEDs 1 2008
 
PIXTRONIX, INC. (19)
8,159,428 Display methods and apparatus 3 2006
7,755,582 Display methods and apparatus 6 2006
7,405,852 Display apparatus and methods for manufacture thereof 42 2006
7,876,489 Display apparatus with optical cavities 32 2006
8,310,442 Circuits for controlling display apparatus 5 2006
8,482,496 Circuits for controlling MEMS display apparatus on a transparent substrate 0 2007
7,636,189 Display methods and apparatus 5 2007
7,551,344 Methods for manufacturing displays 9 2007
7,927,654 Methods and apparatus for spatial light modulation 12 2007
7,852,546 Spacers for maintaining display apparatus alignment 10 2007
7,746,529 MEMS display apparatus 13 2007
8,519,945 Circuits for controlling display apparatus 0 2007
8,248,560 Light guides and backlight systems incorporating prismatic structures and light redirectors 1 2008
8,526,096 Mechanical light modulators with stressed beams 0 2009
8,520,285 Methods for manufacturing cold seal fluid-filled display apparatus 1 2011
8,519,923 Display methods and apparatus 0 2012
8,599,463 MEMS anchors 0 2012
8,441,602 Light guides and backlight systems incorporating prismatic structures and light redirectors 2 2012
8,545,084 Light guides and backlight systems incorporating light redirectors at varying densities 0 2012
 
SILICON QUEST KABUSHIKI-KAISHA (18)
7,835,062 Mircromirror device having a vertical hinge 1 2007
7,907,320 Micromirror device with a single address electrode 0 2008
7,907,325 Control methods for micromirror devices implemented with a single address electrode 0 2008
7,839,561 Micromirror device with a single address electrode 0 2008
7,649,673 Micromirror device with a single address electrode 2 2008
8,179,591 Spatial light modulator and mirror array device 0 2008
7,973,994 Spatial light modulator 0 2008
7,876,492 Spatial light modulator and mirror array device 0 2008
7,848,005 Spatial light modulator implemented with a mirror array device 0 2008
7,911,680 Micromirror device having a vertical hinge 1 2009
7,916,381 Spatial light modulator including drive lines 0 2009
8,154,474 Driving method of memory access 2 2009
7,733,558 Display device with an addressable movable electrode 1 2009
7,969,395 Spatial light modulator and mirror device 0 2009
8,081,371 Spatial light modulator and display apparatus 0 2009
8,228,595 Sequence and timing control of writing and rewriting pixel memories with substantially lower data rate 0 2009
7,957,050 Mirror device comprising layered electrode 0 2009
8,199,394 Mircromirror device having a vertical hinge 0 2010
 
CITIZEN FINETECH MIYOTA CO., LTD. (12)
5,808,800 Optics arrangements including light source arrangements for an active matrix liquid crystal image generator 106 1994
5,757,348 Active matrix liquid crystal image generator with hybrid writing scheme 35 1994
5,748,164 Active matrix liquid crystal image generator 86 1994
6,570,550 Active matrix liquid crystal image generator 13 1998
6,317,112 Active matrix liquid crystal image generator with hybrid writing scheme 12 1998
6,038,005 Optics arrangements including light source arrangements for an active matrix liquid crystal image generator 28 1998
6,195,136 Optics arrangement including light source arrangement for an active matrix liquid crystal image generator 13 1999
6,359,723 Optics arrangements including light source arrangements for an active matrix liquid crystal image generator 9 2000
7,012,730 Optics arrangements including light source arrangements for an active matrix liquid crystal image generator 6 2002
7,170,483 Active matrix liquid crystal image generator 3 2003
8,130,185 Active matrix liquid crystal image generator 1 2007
8,130,439 Optics arrangements including light source arrangements for an active matrix liquid crystal generator 0 2007
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (10)
5,459,610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 307 1993
5,677,783 Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 102 1995
5,742,419 Miniature scanning confocal microscope 123 1995
5,907,425 Miniature scanning confocal microscope 60 1997
6,007,208 Miniature scanning confocal microscope 38 1997
6,749,346 Miniature scanning confocal microscope 25 1998
6,075,639 Micromachined scanning torsion mirror and method 37 1998
6,088,145 Miniature scanning confocal microscope 38 1998
6,154,305 Miniature scanning confocal microscope 64 1999
6,122,090 Method of micromachining a scanning torsion mirror 14 1999
 
QUALCOMM INCORPORATED (8)
7,030,894 Image display system and method 9 2002
7,034,811 Image display system and method 13 2002
6,963,319 Image display system and method 14 2002
7,172,288 Display device including a spatial light modulator with plural image regions 0 2003
7,317,465 Image display system and method 1 2004
7,657,118 Generating and displaying spatially offset sub-frames using image data converted from a different color space 2 2004
7,675,510 Image display system and method 0 2005
7,679,613 Image display system and method 0 2005
 
SPATIAL PHOTONICS, INC. (8)
7,167,298 High contrast spatial light modulator and method 30 2004
7,471,440 Fabricating micro devices using sacrificial materials 3 2006
7,423,798 Addressing circuit and method for bi-directional micro-mirror array 2 2006
7,586,669 Non-contact micro mirrors 2 2006
7,508,569 Low voltage micro mechanical device 1 2006
7,394,586 Spatial light modulator 2 2006
7,667,885 Spatial light modulator 0 2008
7,618,835 Fabricating a spatial light modulator 0 2008
 
RESEARCH TRIANGLE INSTITUTE (7)
6,373,682 Electrostatically controlled variable capacitor 48 1999
6,485,273 Distributed MEMS electrostatic pumping devices 39 2000
6,590,267 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods 56 2000
6,377,438 Hybrid microelectromechanical system tunable capacitor and associated fabrication methods 55 2000
6,396,620 Electrostatically actuated electromagnetic radiation shutter 11 2000
6,586,738 Electromagnetic radiation detectors having a micromachined electrostatic chopper device 9 2001
7,026,602 Electromagnetic radiation detectors having a microelectromechanical shutter device 2 2003
 
L-3 COMMUNICATIONS CORPORATION (6)
5,486,698 Thermal imaging system with integrated thermal chopper 88 1994
5,512,748 Thermal imaging system with a monolithic focal plane array and method 92 1994
5,559,332 Thermal detector and method 17 1994
5,644,838 Method of fabricating a focal plane array for hybrid thermal imaging system 12 1995
5,743,006 Method for fabricating a focal plane array for thermal imaging system 10 1995
5,708,269 Thermal detector and method 2 1996
 
OL SECURITY LIMITED LIABILITY COMPANY (5)
6,745,449 Method and apparatus for making a lid with an optically transmissive window 11 2001
6,667,837 Method and apparatus for configuring an aperture edge 9 2002
6,988,338 Lid with a thermally protected window 3 2002
7,098,396 Method and apparatus for making a lid with an optically transmissive window 1 2004
6,908,026 Method and apparatus for making a lid with an optically transmissive window 3 2004
 
DEERE & COMPANY (4)
7,064,810 Optical range finder with directed attention 27 2003
6,839,127 Optical range finder having a micro-mirror array 15 2003
7,916,898 Method and system for identifying an edge of a crop 16 2004
7,206,063 Optical range finder with directed attention 5 2006
 
PLAIN SIGHT SYSTEMS, INC. (4)
7,652,765 Hyper-spectral imaging methods and devices 8 2005
7,219,086 System and method for hyper-spectral analysis 6 2005
7,180,588 Devices and method for spectral measurements 17 2005
7,248,358 Devices and method for spectral measurements 7 2005
 
PRODUCTION RESOURCE GROUP, L.L.C. (4)
6,188,933 Electronically controlled stage lighting system 54 1997
6,736,528 Electronically controlled stage lighting system 9 2001
7,230,752 Electronically controlled stage lighting system 5 2004
7,379,230 Electronically controlled stage lighting system 1 2006
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (4)
6,844,953 Micro-mirror device including dielectrophoretic liquid 14 2003
6,841,081 Method for manufacturing reflective spatial light modulator mirror devices 85 2003
7,023,603 Micro-mirror device including dielectrophoretic microemulsion 4 2003
6,924,922 Micro-mirror device including dielectrophoretic liquid 1 2004
 
Adriatic Research Institute (3)
7,295,726 Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same 11 2004
7,428,353 MEMS device control with filtered voltage signal shaping 9 2006
8,043,513 Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same 2 2007
 
AFA CONTROLS LLC (3)
7,753,072 Valve assemblies including at least three chambers and related methods 1 2005
7,448,412 Microvalve assemblies and related structures and related methods 2 2005
7,946,308 Methods of packaging valve chips and related valve assemblies 0 2008
 
ANALOG DEVICES, INC. (3)
6,674,140 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor 22 2001
7,220,614 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor 5 2003
7,364,942 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor 2 2007
 
ANDOR TECHNOLOGY PLC (3)
6,885,492 Spatial light modulator apparatus 7 2002
7,034,983 Spatial light modulator apparatus 3 2004
6,972,892 Spatial light modulator apparatus 1 2005
 
JDS UNIPHASE CORPORATION (3)
6,275,320 MEMS variable optical attenuator 79 1999
7,095,546 Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays 23 2004
7,432,629 Articulated MEMs structures 4 2006
 
RAYTHEON COMPANY (3)
6,208,318 System and method for high resolution volume display using a planar array 37 1995
6,151,170 Dual purpose infrared lens assembly using diffractive optics 2 1998
6,974,517 Lid with window hermetically sealed to frame, and a method of making it 4 2001
 
ALTERA CORPORATION (2)
6,614,581 Methods and apparatus for providing a multi-stop micromirror 20 2001
6,859,580 Systems and methods for overcoming stiction using a lever 6 2003
 
CANON KABUSHIKI KAISHA (2)
5,658,698 Microstructure, process for manufacturing thereof and devices incorporating the same 100 1995
6,154,302 Light deflection device and array thereof 23 1998
 
CHEETAH OMNI, LLC (2)
7,339,714 Variable blazed grating based signal processing 1 2005
7,522,836 Optical logic gate based optical router 5 2006
 
FUJITSU LIMITED (2)
8,107,157 Micromirror unit and method of making the same 1 2006
8,693,083 Micromirror unit and method of making the same 0 2011
 
INTEL CORPORATION (2)
6,445,106 Micro-electromechanical structure resonator, method of making, and method of using 17 2000
6,479,921 Micro-electromechanical structure resonator, method of making, and method of using 10 2002
 
MCNC (2)
6,555,201 Method for fabricating a microelectromechanical bearing 30 2000
6,256,134 Microelectromechanical devices including rotating plates and related methods 15 2000
 
MONSELLA MGMT. NY, LLC (2)
6,259,450 Three-dimensional display system apparatus and method 40 1996
6,304,263 Three-dimensional display system: apparatus and method 59 1998
 
OLYMPUS OPTICAL CO., LTD. (2)
6,396,053 Scanning optical microscope apparatus capable of detecting a plurality of flourescent light beams 29 1999
6,898,004 Microscope system 7 2002
 
POLYCHROMIX, INC. (2)
5,905,571 Optical apparatus for forming correlation spectrometers and optical processors 111 1995
5,757,536 Electrically-programmable diffraction grating 153 1995
 
ROYAL BANK CAPITAL PARTNERS (2)
6,134,042 Reflective mems actuator with a laser 34 1999
6,087,747 Microelectromechanical beam for allowing a plate to rotate in relation to a frame in a microelectromechanical device 40 1999
 
SMITH, JEFFERY M. (2)
6,391,245 Method for creating three-dimensional objects by cross-sectional lithography 31 1999
6,500,378 Method and apparatus for creating three-dimensional objects by cross-sectional lithography 64 2000
 
TECHNION RESEARCH & DEVELOPMENT FOUNDATION LTD. (2)
7,412,358 Efficient method of extracting the pull-in parameters of an electrostatically activated MEMS device for the purpose of designing the device 0 2002
7,423,794 Device and method for stacked multi-level uncoupled electrostatic actuators 0 2004
 
Three LC, Inc. (2)
6,046,808 Radiation filter, spectrometer and imager using a micro-mirror array 91 1999
6,128,078 Radiation filter, spectrometer and imager using a micro-mirror array 55 2000
 
360TV, INC. (1)
6,072,545 Video image rotating apparatus 13 1998
 
AGILENT TECHNOLOGIES, INC. (1)
6,642,498 Micromirror optical multiplexer and method for directing light towards an array of sensors 2 2001
 
AUTOMOTIVE RESEARCH & TEST CENTER (1)
8,854,281 Head up display (HUD) 0 2011
 
BEI SENSORS & SYSTEMS COMPANY, INC. (1)
6,865,313 Bistable latching actuator for optical switching applications 9 2003
 
Capella Photonics, Inc. (1)
6,753,960 Optical spectral power monitors employing frequency-division-multiplexing detection schemes 17 2001
 
CENTOCOR ORTHO BIOTECH INC. (1)
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 26 2004
 
CREO SRL (1)
6,191,882 Micromachined linear light valve 2 1997
 
DAEWOO ELECTRONICS CO., LTD. (1)
5,585,956 Electrostrictive actuated mirror array 12 1994
 
DENSO CORPORATION (1)
7,088,492 Micro movable mechanism system and control method for the same 4 2002
 
DIGITAL PROJECTION LIMITED (1)
6,184,852 Spatial light modulators 11 1999
 
FANTASY SPORTS PREDICTIONS, INC. (1)
6,622,053 Electronically controlled stage lighting system 18 2000
 
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (1)
6,595,055 Micromechanical component comprising an oscillating body 13 2001
 
FUJI PHOTO FILM CO., LTD. (1)
6,288,829 Light modulation element, array-type light modulation element, and flat-panel display unit 24 1999
 
FUJINON CORPORATION (1)
7,008,060 Projector optical system and projector apparatus using the same 0 2003
 
GOOCH AND HOUSEGO PLC (1)
8,436,630 Corrected optical spectral responses for photoelectric devices 0 2010
 
Her Majesty the Queen in Right of Canada, as represented by Institut National d'Optique (1)
7,835,056 Image projector with flexible reflective analog modulator 21 2006
 
Her Majesty the Queen in right of Canada, as represented by the Minister of National Defence (1)
7,088,493 Light modulating microdevice 9 2004
 
HEWLETT-PACKARD INDIGO B.V. (1)
7,800,778 LED print head printing 0 2002
 
HOEL, CARLTON H. (1)
5,619,061 Micromechanical microwave switching 186 1994
 
InterScience, Inc. (1)
5,999,319 Reconfigurable compound diffraction grating 86 1998
 
IRIDIGM DISPLAY CORPORATION (1)
7,256,922 Interferometric modulators with thin film transistors 33 2004
 
KAWASAKI MICROELECTRONICS, INC. (1)
6,933,998 Display devices with integrated control elements and methods of making devices 2 2000
 
KONINKLIJKE PHILIPS ELECTRONICS N.V. (1)
6,578,968 Image projection system having an extra optical system for at least partly re-illuminating the image display system 4 2000
 
LUCENT TECHNOLOGIES INC. (1)
6,242,989 Article comprising a multi-port variable capacitor 79 1998
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (1)
7,484,857 Light modulating mirror device and array 2 2004
 
MIRRORCLE TECHNOLOGIES, INC. (1)
8,427,657 Device for optical imaging, tracking, and position measurement with a scanning MEMS mirror 2 2012
 
MOVAZ NETWORKS, INC. (1)
6,788,981 Multiplexed analog control system for electrostatic actuator array 6 2001
 
National Optics Institute (1)
6,025,951 Light modulating microdevice and method 131 1996
 
NORITSU KOKI CO., LTD. (1)
6,456,359 Photograph printing device 1 1999
 
Northrop Corporation (1)
5,170,283 Silicon spatial light modulator 166 1991
 
OLYMPUS CORPORATION (1)
7,359,117 Illumination device for microscope 4 2004
 
PINECONE IMAGING CORPORATION (1)
6,195,069 Method and apparatus for 3-dimensional motion picture display 5 1993
 
Pitronix, Inc. (1)
8,262,274 Light guides and backlight systems incorporating light redirectors at varying densities 2 2011
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 74 2004
 
Ricoh Microelectronics Co., Ltd. (1)
6,288,830 Optical image forming method and device, image forming apparatus and aligner for lithography 26 1999
 
SAMSUNG DISPLAY CO., LTD. (1)
8,617,329 Method of fabricating organic light emitting display 0 2004
 
SAMSUNG ELECTRONICS CO., LTD. (1)
6,954,297 Micro-mirror device including dielectrophoretic liquid 5 2003
 
SARNOFF CORPORATION (1)
6,535,091 Microelectronic mechanical systems (MEMS) switch and method of fabrication 13 2001
 
SHARP KABUSHIKI KAISHA (1)
8,045,097 Liquid crystal display device and viewing angle control module 2 2007
 
SILEX MICROSYSTEMS AB (1)
7,172,911 Deflectable microstructure and method of manufacturing the same through bonding of wafers 12 2003
 
STMICROELECTRONICS INTERNATIONAL N.V. (1)
8,553,308 Method and device for monitoring movement of mirrors in a MEMS device 0 2010
 
Strasbaugh (1)
7,018,268 Protection of work piece during surface processing 2 2003
 
SYMBOL TECHNOLOGIES, INC. (1)
6,059,188 Packaged mirror including mirror travel stops 36 1996
 
UDC, LLC (1)
7,499,208 Current mode display driver circuit realization feature 10 2005
 
WOLFSON MICROELECTRONICS PLC (1)
8,497,149 MEMS device 0 2007
 
Other [Check patent profile for assignment information] (1)
8,891,152 Methods for manufacturing cold seal fluid-filled display apparatus 0 2013