US Patent No: 5,061,049

Number of patents in Portfolio can not be more than 2000

Spatial light modulator and method

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An electrostatically deflectable beam spatial light modulator with the beams (30), address electrodes (42, 46), and landing electrodes (40, 41) to provide soft-landing of the beams on the landing electrodes (40, 41) which gives uniform large-angle deflection plus high reliability.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX16406

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hornbeck, Larry J Van Alstyne, TX 35 12274

Cited Art Landscape

Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (3)
* 4,317,611 Optical ray deflection apparatus 177 1980
* 4,592,628 Mirror array light valve 97 1981
* 4,831,614 Direct access storage unit using tunneling current techniques 93 1987
 
TEXAS INSTRUMENTS INCORPORATED (5)
* 4,441,791 Deformable mirror light modulator 656 1982
* 4,638,309 Spatial light modulator drive system 67 1983
* 4,710,732 Spatial light modulator and method 502 1984
* 4,596,992 Linear spatial light modulator and printer 418 1984
* 4,662,746 Spatial light modulator and method 511 1985
 
The United States of America as represented by the Secretary of the Air Force (1)
* 4,698,602 Micromirror spatial light modulator 92 1985
 
CANON KABUSHIKI KAISHA (1)
* 4,793,699 Projection apparatus provided with an electro-mechanical transducer element 30 1988
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (18)
* 2003/0197,669 Analog pulse width modulation of video data 0 2003
* 2004/0080,806 Continuously variable analog micro-mirror device 0 2003
* 2005/0094,241 Electromechanical micromirror devices and methods of manufacturing the same 2 2003
* 2005/0162,727 Micromirrors with support walls 8 2004
* 2005/0168,494 Generating and displaying spatially offset sub-frames 0 2004
* 2005/0024,640 System and method for encoded spatio-spectral information processing 7 2004
* 2004/0240,033 High fill ratio reflective spatial light modulator with hidden hinge 0 2004
* 2005/0042,389 Micromechanical device fabrication 0 2004
* 2005/0214,462 Micromechanical device recoat methods 1 2005
* 2005/0243,404 Capacitively coupled micromirror 1 2005
* 2005/0259,122 Image display system and method including optical scaling 1 2005
* 2006/0114,539 Displaying least significant color image bit-planes in less than all image sub-frame locations 1 2006
* 2006/0138,642 Micromechanical getter anchor 0 2006
* 2007/0263,214 System and method for encoded spatio-spectral information processing 2 2006
* 2006/0176,468 Optical range finder with directed attention 1 2006
* 2006/0170,698 Constant-weight bit-slice PWM method and system for scrolling color display systems 1 2006
* 2008/0012,082 LARGE AREA FLAT IMAGE SENSOR ASSEMBLY 2 2007
* 2007/0296,742 Generating and Displaying Spatially Offset Sub-Frames on a Diamond Grid 2 2007
 
ROYAL BANK CAPITAL PARTNERS (2)
* 6,134,042 Reflective mems actuator with a laser 34 1999
* 6,087,747 Microelectromechanical beam for allowing a plate to rotate in relation to a frame in a microelectromechanical device 42 1999
 
Cheetah Omni, LLC (2)
7,339,714 Variable blazed grating based signal processing 2 2005
7,522,836 Optical logic gate based optical router 7 2006
 
BEI Sensors and Systems Company, Inc. (2)
6,865,313 Bistable latching actuator for optical switching applications 10 2003
* 2004/0223,204 Bistable latching actuator for optical switching applications 11 2003
 
360TV, INC. (1)
* 6,072,545 Video image rotating apparatus 13 1998
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (7)
6,844,953 Micro-mirror device including dielectrophoretic liquid 17 2003
* 2004/0179,281 Micro-mirror device including dielectrophoretic liquid 21 2003
* 6,841,081 Method for manufacturing reflective spatial light modulator mirror devices 98 2003
* 2004/0245,215 METHOD FOR MANUFACTURING REFLECTIVE SPATIAL LIGHT MODULATOR MIRROR DEVICES 0 2003
7,023,603 Micro-mirror device including dielectrophoretic microemulsion 5 2003
* 2005/0152,017 Micro-mirror device including dielectrophoretic microemulsion 0 2003
6,924,922 Micro-mirror device including dielectrophoretic liquid 1 2004
 
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (1)
* 6,595,055 Micromechanical component comprising an oscillating body 13 2001
 
Mirrorcle Technologies, Inc. (1)
8,427,657 Device for optical imaging, tracking, and position measurement with a scanning MEMS mirror 2 2012
 
FUJI PHOTO FILM CO., LTD. (1)
* 6,288,829 Light modulation element, array-type light modulation element, and flat-panel display unit 41 1999
 
Capella Photonics, Inc. (1)
* 6,753,960 Optical spectral power monitors employing frequency-division-multiplexing detection schemes 18 2001
 
SAMSUNG ELECTRONICS CO., LTD. (1)
6,954,297 Micro-mirror device including dielectrophoretic liquid 5 2003
 
IRIDIGM DISPLAY CORPORATION (1)
7,256,922 Interferometric modulators with thin film transistors 44 2004
 
Three LC, Inc. (2)
* 6,046,808 Radiation filter, spectrometer and imager using a micro-mirror array 99 1999
* 6,128,078 Radiation filter, spectrometer and imager using a micro-mirror array 59 2000
 
Pinecone Imaging Corporation (1)
* 6,195,069 Method and apparatus for 3-dimensional motion picture display 5 1993
 
STMICROELECTRONICS INTERNATIONAL N.V. (1)
* 8,553,308 Method and device for monitoring movement of mirrors in a MEMS device 0 2010
 
Himax Display, Inc. (1)
* 2016/0004,068 MICRO-MIRROR DEVICE AND METHOD FOR DRIVING MIRROR THEREOF 0 2014
 
OLYMPUS CORPORATION (2)
7,359,117 Illumination device for microscope 4 2004
* 2004/0196,550 Illumination device for microscope 0 2004
 
CITICORP NORTH AMERICA, INC. (2)
* 2004/0066,470 Apparatus for printing high resolution images using reflective LCD modulators 0 2003
* 2008/0117,278 LIGHT SOURCE USING LARGE AREA LEDS 2 2008
 
CITIZEN FINETECH MIYOTA CO., LTD. (11)
* 5,808,800 Optics arrangements including light source arrangements for an active matrix liquid crystal image generator 134 1994
* 5,757,348 Active matrix liquid crystal image generator with hybrid writing scheme 35 1994
* 5,748,164 Active matrix liquid crystal image generator 90 1994
* 6,570,550 Active matrix liquid crystal image generator 13 1998
6,317,112 Active matrix liquid crystal image generator with hybrid writing scheme 12 1998
* 6,038,005 Optics arrangements including light source arrangements for an active matrix liquid crystal image generator 28 1998
6,195,136 Optics arrangement including light source arrangement for an active matrix liquid crystal image generator 31 1999
6,359,723 Optics arrangements including light source arrangements for an active matrix liquid crystal image generator 22 2000
7,012,730 Optics arrangements including light source arrangements for an active matrix liquid crystal image generator 8 2002
7,170,483 Active matrix liquid crystal image generator 3 2003
8,130,439 Optics arrangements including light source arrangements for an active matrix liquid crystal generator 0 2007
 
MOVAZ NETWORKS, INC. (2)
* 6,788,981 Multiplexed analog control system for electrostatic actuator array 6 2001
* 2002/0106,144 Multiplexed analog control system for electrostatic actuator array 0 2001
 
SILEX MICROSYSTEMS AB (1)
7,172,911 Deflectable microstructure and method of manufacturing the same through bonding of wafers 12 2003
 
Northrop Corporation (1)
* 5,170,283 Silicon spatial light modulator 181 1991
 
GOOCH AND HOUSEGO PLC (1)
8,436,630 Corrected optical spectral responses for photoelectric devices 1 2010
 
SMITH, JEFFERY M. (2)
6,391,245 Method for creating three-dimensional objects by cross-sectional lithography 39 1999
6,500,378 Method and apparatus for creating three-dimensional objects by cross-sectional lithography 79 2000
 
FUJINON CORPORATION (1)
* 7,008,060 Projector optical system and projector apparatus using the same 0 2003
 
HEWLETT-PACKARD INDIGO B.V. (2)
7,800,778 LED print head printing 0 2002
* 2005/0117,014 Led print head printing 2 2004
 
CENTOCOR ORTHO BIOTECH INC. (1)
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 30 2004
 
RAYTHEON COMPANY (4)
* 6,208,318 System and method for high resolution volume display using a planar array 40 1995
* 6,151,170 Dual purpose infrared lens assembly using diffractive optics 3 1998
6,974,517 Lid with window hermetically sealed to frame, and a method of making it 4 2001
* 2002/0192,403 Lid with window hermetically sealed to frame, and a method of making it 1 2001
 
AUTOMOTIVE RESEARCH & TEST CENTER (2)
* 8,854,281 Head up display (HUD) 0 2011
* 2013/0141,311 HEAD UP DISPLAY (HUD) 0 2011
 
CANON KABUSHIKI KAISHA (2)
* 5,658,698 Microstructure, process for manufacturing thereof and devices incorporating the same 100 1995
* 6,154,302 Light deflection device and array thereof 23 1998
 
NORITSU KOKI CO., LTD. (1)
* 6,456,359 Photograph printing device 1 1999
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (83)
6,498,686 Single light valve projector with reduced sequential color artifacts 3 2001
7,081,928 Optical system for full color, video projector using single light valve with plural sub-pixel reflectors 4 2001
* 2003/0202,264 Micro-mirror device 215 2002
* 6,666,561 Continuously variable analog micro-mirror device 259 2002
6,903,487 Micro-mirror device with increased mirror tilt 10 2003
* 2004/0160,143 Micro-mirror device with increased mirror tilt 22 2003
7,098,936 Image display system and method including optical scaling 4 2003
* 2004/0179,030 Image display system and method including optical scaling 1 2003
6,972,882 Micro-mirror device with light angle amplification 4 2003
* 2003/0202,266 Micro-mirror device with light angle amplification 32 2003
7,289,114 Generating and displaying spatially offset sub-frames 1 2003
7,109,981 Generating and displaying spatially offset sub-frames 9 2003
* 2005/0025,388 Generating and displaying spatially offset sub-frames 0 2003
7,253,811 Generating and displaying spatially offset sub-frames 2 2003
7,190,380 Generating and displaying spatially offset sub-frames 17 2003
* 2005/0068,335 Generating and displaying spatially offset sub-frames 0 2003
* 2005/0069,209 Generating and displaying spatially offset sub-frames 29 2003
6,843,576 Continuously variable analog micro-mirror device 8 2003
7,301,549 Generating and displaying spatially offset sub-frames on a diamond grid 6 2003
* 2005/0093,895 Generating and displaying spatially offset sub-frames on a diamond grid 1 2003
* 2005/0093,894 Generating an displaying spatially offset sub-frames on different types of grids 8 2003
7,355,612 Displaying spatially offset sub-frames with a display device having a set of defective display pixels 2 2003
* 2005/0147,321 Displaying spatially offset sub-frames with a display device having a set of defective display pixels 0 2003
7,086,736 Display system with sequential color and wobble device 4 2004
* 2005/0157,272 Synchronizing periodic variation of a plurality of colors of light and projection of a plurality of sub-frame images 1 2004
* 2005/0157,273 Display system with sequential color and wobble device 1 2004
7,483,044 Displaying sub-frames at spatially offset positions on a circle 1 2004
7,463,272 Generating and displaying spatially offset sub-frames 2 2004
* 2005/0168,493 Displaying sub-frames at spatially offset positions on a circle 4 2004
7,660,485 Generating and displaying spatially offset sub-frames using error values 2 2004
* 2005/0225,568 Generating and displaying spatially offset sub-frames 4 2004
* 2005/0225,571 Generating and displaying spatially offset sub-frames 6 2004
* 2005/0243,100 Displaying least significant color image bit-planes in less than all image sub-frame locations 4 2004
7,668,398 Generating and displaying spatially offset sub-frames using image data with a portion converted to zero values 2 2004
* 2005/0276,517 Generating and displaying spatially offset sub-frames 4 2004
* 2005/0275,669 Generating and displaying spatially offset sub-frames 3 2004
7,453,478 Address generation in a light modulator 1 2004
* 2006/0022,965 Address generation in a light modulator 0 2004
7,522,177 Image display system and method 1 2004
* 2006/0044,294 Image display system and method 6 2004
7,623,142 Flexure 2 2004
7,453,449 System and method for correcting defective pixels of a display device 3 2004
* 2006/0061,604 System and method for correcting defective pixels of a display device 1 2004
7,676,113 Generating and displaying spatially offset sub-frames using a sharpening factor 2 2004
* 2006/0110,072 Generating and displaying spatially offset sub-frames 9 2004
8,872,869 System and method for correcting defective pixels of a display device 1 2004
* 2006/0109,286 System and method for correcting defective pixels of a display device 5 2004
7,466,291 Projection of overlapping single-color sub-frames onto a surface 4 2005
7,443,364 Projection of overlapping sub-frames onto a surface 4 2005
* 2006/0221,304 Projection of overlapping single-color sub-frames onto a surface 4 2005
* 2006/0209,057 Projection of overlapping sub-frames onto a surface 1 2005
7,407,295 Projection of overlapping sub-frames onto a surface using light sources with different spectral distributions 6 2005
* 2007/0024,824 Projection of overlapping sub-frames onto a surface using light sources with different spectral distributions 3 2005
7,557,819 Image display system and method including optical scaling 3 2005
7,387,392 System and method for projecting sub-frames onto a surface 4 2005
* 2007/0052,934 System and method for projecting sub-frames onto a surface 3 2005
7,470,032 Projection of overlapping and temporally offset sub-frames onto a surface 25 2005
* 2007/0097,334 Projection of overlapping and temporally offset sub-frames onto a surface 10 2005
7,559,661 Image analysis for generation of image data subsets 1 2005
* 2007/0132,967 Generation of image data subsets 3 2005
* 2007/0132,965 System and method for displaying an image 9 2005
7,154,508 Displaying least significant color image bit-planes in less than all image sub-frame locations 5 2006
9,137,504 System and method for projecting multiple image streams 0 2006
7,907,792 Blend maps for rendering an image frame 6 2006
7,854,518 Mesh for rendering an image frame 7 2006
7,800,628 System and method for generating scale maps 1 2006
* 2007/0291,184 System and method for displaying images 17 2006
* 2007/0291,047 System and method for generating scale maps 12 2006
* 2008/0002,160 System and method for generating and displaying sub-frames with a multi-projector system 11 2006
* 2008/0024,683 Overlapped multi-projector system with dithering 21 2006
* 2008/0095,363 System and method for causing distortion in captured images 3 2006
* 2008/0101,725 Image display system configured to update correspondences using arbitrary features 1 2006
* 2008/0101,711 Rendering engine for forming an unwarped reproduction of stored content from warped content 5 2006
7,742,011 Image display system 6 2006
7,499,214 Ambient light absorbing screen 9 2006
* 2008/0143,978 Image display system 14 2006
* 2007/0217,005 Ambient light absorbing screen 4 2006
9,282,335 System and method for coding image frames 0 2007
7,986,356 System and method for determining a gamma curve of a display device 4 2007
* 2009/0027,523 System and method for determining a gamma curve of a display device 5 2007
* 2009/0027,504 System and method for calibrating a camera 13 2007
8,328,365 Mesh for mapping domains based on regularized fiducial marks 2 2009
9,235,575 Systems and methods using a slideshow generator 0 2010
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 83 2004
 
LUCENT TECHNOLOGIES INC. (1)
* 6,242,989 Article comprising a multi-port variable capacitor 103 1998
 
Ricoh Microelectronics Co., Ltd. (1)
* 6,288,830 Optical image forming method and device, image forming apparatus and aligner for lithography 26 1999
 
SAMSUNG DISPLAY CO., LTD. (3)
* 8,617,329 Method of fabricating organic light emitting display 0 2004
* 2006/0060,297 Method of fabricating organic light emitting display 2 2004
* 2006/0197,086 Organic light emitting diode display and manufacturing method thereof 6 2005
 
DRNC HOLDINGS, INC. (3)
8,107,157 Micromirror unit and method of making the same 2 2006
* 2007/0091,415 Micromirror unit and method of making the same 2 2006
8,693,083 Micromirror unit and method of making the same 0 2011
 
FANTASY SPORTS PREDICTIONS, INC. (1)
6,622,053 Electronically controlled stage lighting system 23 2000
 
OLYMPUS OPTICAL CO., LTD. (3)
6,396,053 Scanning optical microscope apparatus capable of detecting a plurality of flourescent light beams 32 1999
6,898,004 Microscope system 9 2002
* 2003/0063,376 Microscope system 1 2002
 
PIXTRONIX, INC. (36)
9,158,106 Display methods and apparatus 0 2006
8,159,428 Display methods and apparatus 13 2006
7,755,582 Display methods and apparatus 16 2006
7,405,852 Display apparatus and methods for manufacture thereof 73 2006
7,876,489 Display apparatus with optical cavities 61 2006
8,310,442 Circuits for controlling display apparatus 15 2006
8,482,496 Circuits for controlling MEMS display apparatus on a transparent substrate 6 2007
7,636,189 Display methods and apparatus 20 2007
7,551,344 Methods for manufacturing displays 27 2007
7,927,654 Methods and apparatus for spatial light modulation 37 2007
9,229,222 Alignment methods in fluid-filled MEMS displays 0 2007
9,176,318 Methods for manufacturing fluid-filled MEMS displays 0 2007
7,852,546 Spacers for maintaining display apparatus alignment 28 2007
7,746,529 MEMS display apparatus 32 2007
8,519,945 Circuits for controlling display apparatus 8 2007
8,248,560 Light guides and backlight systems incorporating prismatic structures and light redirectors 3 2008
8,526,096 Mechanical light modulators with stressed beams 13 2009
9,182,587 Manufacturing structure and process for compliant mechanisms 0 2009
9,082,353 Circuits for controlling display apparatus 1 2010
9,261,694 Display apparatus and methods for manufacture thereof 0 2011
9,087,486 Circuits for controlling display apparatus 0 2011
8,520,285 Methods for manufacturing cold seal fluid-filled display apparatus 1 2011
8,519,923 Display methods and apparatus 8 2012
8,599,463 MEMS anchors 12 2012
8,441,602 Light guides and backlight systems incorporating prismatic structures and light redirectors 5 2012
8,545,084 Light guides and backlight systems incorporating light redirectors at varying densities 1 2012
9,135,868 Direct-view MEMS display devices and methods for generating images thereon 0 2012
9,274,333 Alignment methods in fluid-filled MEMS displays 0 2012
9,336,732 Circuits for controlling display apparatus 0 2012
9,183,812 Ambient light aware display apparatus 0 2013
9,134,552 Display apparatus with narrow gap electrostatic actuators 0 2013
9,243,774 Light guides and backlight systems incorporating prismatic structures and light redirectors 0 2013
8,891,152 Methods for manufacturing cold seal fluid-filled display apparatus 0 2013
9,177,523 Circuits for controlling display apparatus 0 2013
9,128,277 Mechanical light modulators with stressed beams 0 2013
9,116,344 MEMS anchors 0 2013
 
SYMBOL TECHNOLOGIES, INC. (1)
* 6,059,188 Packaged mirror including mirror travel stops 38 1996
 
CREO SRL (1)
* 6,191,882 Micromachined linear light valve 2 1997
 
InterScience, Inc. (1)
* 5,999,319 Reconfigurable compound diffraction grating 87 1998
 
DENSO CORPORATION (2)
7,088,492 Micro movable mechanism system and control method for the same 6 2002
* 2003/0094,914 Micro movable mechanism system and control method for the same 4 2002
 
L-3 COMMUNICATIONS CORPORATION (6)
* 5,486,698 Thermal imaging system with integrated thermal chopper 88 1994
* 5,512,748 Thermal imaging system with a monolithic focal plane array and method 92 1994
* 5,559,332 Thermal detector and method 17 1994
* 5,644,838 Method of fabricating a focal plane array for hybrid thermal imaging system 13 1995
* 5,743,006 Method for fabricating a focal plane array for thermal imaging system 10 1995
* 5,708,269 Thermal detector and method 2 1996
 
INTEL CORPORATION (2)
6,445,106 Micro-electromechanical structure resonator, method of making, and method of using 17 2000
6,479,921 Micro-electromechanical structure resonator, method of making, and method of using 10 2002
 
SARNOFF CORPORATION (1)
* 6,535,091 Microelectronic mechanical systems (MEMS) switch and method of fabrication 13 2001
 
VENTURE LENDING & LEASING IV, INC. (15)
6,798,561 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 11 2003
7,196,740 Projection TV with improved micromirror array 7 2004
* 2005/0275,930 Micromirror array assembly with in-array pillars 70 2004
* 2005/0024,733 Color rendering of illumination light in display systems 0 2004
* 2005/0007,557 Rear projection TV with improved micromirror array 3 2004
* 2006/0050,353 MICROMIRRORS AND HINGE STRUCTURES FOR MICROMIRROR ARRAYS IN PROJECTION DISPLAYS 1 2004
* 2006/0044,519 Micromirrors and hinge structures for micromirror arrays in projection displays 0 2004
* 2005/0041,277 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 3 2004
* 2006/0082,858 Micromirror array device and a method for making the same 0 2004
* 2006/0082,856 Spatial light modulators with non-uniform pixels 1 2004
* 2005/0157,376 Spatial light modulators with light blocking/absorbing areas 28 2005
* 2005/0174,625 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 1 2005
* 2005/0174,626 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 0 2005
* 2005/0168,795 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 0 2005
* 2005/0170,546 Metod for making a micromechanical device by using a sacrificial substrate 3 2005
 
Her Majesty the Queen in Right of Canada, as represented by Institut National d'Optique (1)
7,835,056 Image projector with flexible reflective analog modulator 50 2006
 
TEXAS INSTRUMENTS INCORPORATED (158)
* 5,212,555 Image capture with spatial light modulator and single-cell photosensor 133 1991
* 5,202,785 Method and device for steering light 111 1991
* 5,223,971 Light beam steering with deformable membrane device 12 1991
* 5,212,582 Electrostatically controlled beam steering device and method 359 1992
* 5,312,513 Methods of forming multiple phase light modulators 313 1992
* 5,818,095 High-yield spatial light modulator with light blocking layer 329 1992
* 5,280,277 Field updated deformable mirror device 362 1992
* 5,504,575 SLM spectrometer 141 1993
* 5,457,493 Digital micro-mirror based image simulation system 379 1993
* 5,452,024 DMD display system 458 1993
6,362,835 Brightness and contrast control for a digital pulse-width modulated display system 27 1993
* 5,602,671 Low surface energy passivation layer for micromechanical devices 289 1994
* 5,606,441 Multiple phase light modulation using binary addressing 240 1994
* 5,444,566 Optimized electronic operation of digital micromirror devices 375 1994
* 5,576,878 Use of incompatible materials to eliminate sticking of micro-mechanical devices 55 1994
* 5,458,716 Methods for manufacturing a thermally enhanced molded cavity package having a parallel lid 80 1994
* 5,392,151 Method and apparatus for steering light 88 1994
* 5,640,214 Printer and display systems with bidirectional light collection structures 15 1994
* 5,490,009 Enhanced resolution for digital micro-mirror displays 123 1994
* 5,796,442 Multi-format television reciever 96 1994
* 5,703,728 Support post architecture for micromechanical devices 35 1994
* 5,650,881 Support post architecture for micromechanical devices 274 1994
* 5,552,924 Micromechanical device having an improved beam 260 1994
* 5,687,130 Memory cell with single bit line read back 0 1994
* 5,648,730 Large integrated circuit with modular probe structures 17 1994
* 5,610,624 Spatial light modulator with reduced possibility of an on state defect 215 1994
* 5,602,043 Monolithic thermal detector with pyroelectric film and method 20 1995
* 5,508,841 Spatial light modulator based phase contrast image projection system 82 1995
* 5,717,513 Unsticking mirror elements of digital micromirror device 24 1995
* 5,617,242 Repair of digital micromirror device having white defects 4 1995
* 5,844,588 DMD modulated continuous wave light source for xerographic printer 94 1995
* 5,622,900 Wafer-like processing after sawing DMDs 40 1995
* 5,612,753 Full-color projection display system using two light modulators 93 1995
* 5,504,614 Method for fabricating a DMD spatial light modulator with a hardened hinge 127 1995
* 5,671,083 Spatial light modulator with buried passive charge storage cell array 38 1995
* 5,682,174 Memory cell array for digital spatial light modulator 19 1995
* 5,670,977 Spatial light modulator having single bit-line dual-latch memory cells 20 1995
* 5,579,151 Spatial light modulator 71 1995
* 5,696,619 Micromechanical device having an improved beam 105 1995
* 5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 265 1995
* 5,670,976 Spatial light modulator having redundant memory cells 8 1995
* 5,610,438 Micro-mechanical device with non-evaporable getter 308 1995
6,232,936 DMD Architecture to improve horizontal resolution 225 1995
* 5,706,061 Spatial light image display system with synchronized and modulated light source 157 1995
* 5,535,047 Active yoke hidden hinge digital micromirror device 488 1995
* 5,754,217 Printing system and method using a staggered array spatial light modulator having masked mirror elements 60 1995
* 5,629,794 Spatial light modulator having an analog beam for steering light 99 1995
6,447,126 Support post architecture for micromechanical devices 340 1995
* 5,771,060 Method for printing control in the process direction 15 1995
* 5,729,276 Method for printing using horizontal offset 2 1995
* 5,696,549 Method of reducing print artifacts 1 1995
* 5,631,782 Support post architecture for micromechanical devices 80 1995
* 5,627,580 System and method for enhanced printing 29 1995
* 5,614,937 Method for high resolution printing 56 1995
* 5,604,625 Micromechanical device manufactured out of incompatible materials 5 1995
* 5,597,736 High-yield spatial light modulator with light blocking layer 267 1995
* 5,523,881 Optical correlator using light phase modulation and two reflective spatial light modulators 59 1995
* 5,699,168 Grayscale printing with sliding window memory 1 1995
* 5,739,941 Non-linear hinge for micro-mechanical device 44 1995
* 5,668,062 Method for processing semiconductor wafer with reduced particle contamination during saw 9 1995
* 6,002,452 Sequential color display system with spoke synchronous frame rate conversion 48 1996
* 5,815,641 Spatial light modulator with improved peak white performance 27 1996
* 5,771,116 Multiple bias level reset waveform for enhanced DMD control 305 1996
* 5,719,695 Spatial light modulator with superstructure light shield 86 1996
* 6,024,801 Method of cleaning and treating a semiconductor device including a micromechanical device 95 1996
* 5,942,054 Micromechanical device with reduced load relaxation 13 1996
6,249,374 Wide field of view infrared zoom lens assembly having a constant F/number 13 1997
* 6,018,414 Dual band infrared lens assembly using diffractive optics 12 1997
* 5,852,516 Dual purpose infrared lens assembly using diffractive optics 9 1997
* 5,796,514 Infrared zoom lens assembly having a variable F/number 13 1997
* 6,107,979 Monolithic programmable format pixel array 23 1997
* 5,939,785 Micromechanical device including time-release passivant 125 1997
* 5,872,046 Method of cleaning wafer after partial saw 57 1997
* 5,817,569 Method of reducing wafer particles after partial saw 11 1997
6,686,291 Undercut process with isotropic plasma etching at package level 4 1997
6,246,446 Auto focus system for a SLM based image display system 38 1997
* 5,953,153 Spatial light modulator with improved light shield 15 1997
* 5,912,758 Bipolar reset for spatial light modulators 218 1998
* 6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 309 1998
* 6,163,363 Photofinishing utilizing modulated light source array 29 1998
* 6,147,790 Spring-ring micromechanical device 254 1999
* 6,038,056 Spatial light modulator having improved contrast ratio 276 1999
6,204,085 Reduced deformation of micromechanical devices through thermal stabilization 31 1999
6,843,936 Getter for enhanced micromechanical device performance 48 1999
6,300,294 Lubricant delivery for micromechanical devices 63 1999
6,590,549 Analog pulse width modulation of video data 10 1999
6,285,490 High yield spring-ring micromirror 35 1999
6,324,006 Spoke light recapture in sequential color imaging systems 53 2000
6,552,840 Electrostatic efficiency of micromechanical devices 251 2000
6,469,821 Micromirror structures for orthogonal illumination 20 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 231 2000
7,026,710 Molded package for micromechanical devices and method of fabrication 18 2001
6,753,037 Re-coating MEMS devices using dissolved resins 6 2001
6,816,640 Optical add drop multiplexer 8 2001
6,633,694 Micromirror optical switch 10 2001
6,618,520 Micromirror optical switch 13 2001
7,230,656 Sequential color filter 5 2001
6,992,375 Anchor for device package 28 2001
* 2002/0093,499 Sequential color filter 0 2001
* 2002/0063,322 Micromechanical getter anchor 6 2001
6,445,505 Spoke light recapture in sequential color imaging systems 17 2001
6,906,850 Capacitively coupled micromirror 3 2001
6,683,290 Constant light disable for spatial light modulator 4 2001
7,071,025 Separating wafers coated with plastic films 4 2001
6,787,187 Micromechanical device fabrication 5 2001
6,542,282 Post metal etch clean process using soft mask 6 2001
6,475,570 Diluent assisted lubrication of micromechanical devices 16 2001
* 2002/0122,894 Separating wafers coated with plastic films 1 2001
* 2002/0122,881 Micromechanical device recoat methods 2 2001
6,858,910 Method of fabricating a molded package for micromechanical devices 19 2002
7,106,491 Split beam micromirror 5 2002
6,724,518 Split beam micromirror 0 2002
7,079,095 Analog pulse width modulation of video data 2 2003
7,061,512 Constant-weight bit-slice PWM method and system for scrolling color display systems 18 2003
7,019,881 Display system with clock dropping 11 2003
* 2003/0227,677 Display system with clock-dropping to compensate for lamp variations and for phase locking of free-running sequencer 3 2003
* 2003/0227,465 Constant-weight bit-slice PWM method and system for scrolling color display systems 3 2003
7,090,787 Drying getters 5 2003
* 2004/0132,893 Drying getters 0 2003
7,164,397 Discrete light color processor 15 2003
* 2005/0068,464 Discrete light color processor 4 2003
7,280,126 Methods and apparatus for converting an orthogonal pixel format to a diamond pixel format 0 2003
7,009,745 Coating for optical MEMS devices 8 2003
* 2004/0136,044 Coating for optical MEMS devices 2 2003
* 2004/0164,980 Nonlinearity and reset conflicts in pulse width modulated displays 3 2003
7,289,090 Pulsed LED scan-ring array for boosting display system lumens 63 2003
* 2005/0128,441 Pulsed LED scan-ring array for boosting display system lumens 12 2003
6,987,601 Damped control of a micromechanical device 4 2003
6,985,278 Damped control of a micromechanical device 13 2003
6,891,657 Damped control of a micromechanical device 18 2003
* 2004/0246,554 Damped control of a micromechanical device 1 2003
* 2004/0233,507 Damped control of a micromechanical device 1 2003
7,884,988 Supplemental reset pulse 1 2004
* 2005/0030,609 Supplemental reset pulse 3 2004
7,651,734 Micromechanical device fabrication 0 2004
* 2006/0066,540 Spatial light modulation display system 29 2004
7,119,940 Capacitively coupled micromirror 4 2005
7,362,493 Micromirror and post arrangements on substrates 3 2005
7,075,702 Micromirror and post arrangements on substrates 29 2005
7,403,324 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 2 2006
7,233,427 Display system with clock dropping 9 2006
8,040,305 Constant-weight bit-slice PWM method and system for scrolling color display systems 0 2006
* 8,432,597 Micro-mirror hinge 0 2006
8,493,288 System and method for color-specific sequence scaling for sequential color systems 1 2006
7,737,989 System and method for computing color correction coefficients 5 2006
* 2008/0100,639 System and method for computing color correction coefficients 2 2006
8,305,391 System and method to generate multiprimary signals 1 2006
* 2008/0122,861 System and method to generate multiprimary signals 1 2006
* 2007/0177,246 Micromechanical Getter Anchor 0 2007
7,405,856 Display system timing control method 9 2007
* 2007/0236,770 Display System with Clock-Dropping to Compensate for Lamp Variations and for Phase Locking of Free Running Sequencer 21 2007
8,472,100 Multilayered deformable element with reduced memory properties in a MEMS device 0 2008
7,997,744 Electrically conductive protection layer and a microelectromechanical device using the same 0 2008
8,693,082 Micromirror array assembly with in-array pillars 1 2010
* 2010/0302,618 Micromirror Array Assembly with In-Array Pillars 1 2010
8,542,244 System and method to generate multiprimary signals 0 2012
9,176,316 Spatial light modulation display system 0 2013
9,261,696 Micromirror array assembly 0 2014
 
TAMIRAS PER PTE. LTD., LLC (2)
6,259,450 Three-dimensional display system apparatus and method 42 1996
6,304,263 Three-dimensional display system: apparatus and method 61 1998
 
DAEWOO ELECTRONICS CORPORATION (1)
* 5,585,956 Electrostrictive actuated mirror array 12 1994
 
CIRRUS LOGIC, INC. (2)
8,497,149 MEMS device 0 2007
* 2009/0152,655 MEMS DEVICE 8 2007
 
ANDOR TECHNOLOGY PLC (5)
6,885,492 Spatial light modulator apparatus 13 2002
* 2003/0086,145 Spatial light modulator apparatus 4 2002
7,034,983 Spatial light modulator apparatus 5 2004
6,972,892 Spatial light modulator apparatus 4 2005
* 2005/0213,188 Spatial light modulator apparatus 0 2005
 
INSTITUT NATIONAL D'OPTIQUE (1)
* 2006/0291,269 Image projector with flexible reflective analog modulator 8 2006
 
MCNC (2)
6,555,201 Method for fabricating a microelectromechanical bearing 30 2000
6,256,134 Microelectromechanical devices including rotating plates and related methods 15 2000
 
RESEARCH TRIANGLE INSTITUTE (8)
6,373,682 Electrostatically controlled variable capacitor 55 1999
6,485,273 Distributed MEMS electrostatic pumping devices 48 2000
6,590,267 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods 75 2000
6,377,438 Hybrid microelectromechanical system tunable capacitor and associated fabrication methods 61 2000
6,396,620 Electrostatically actuated electromagnetic radiation shutter 13 2000
6,586,738 Electromagnetic radiation detectors having a micromachined electrostatic chopper device 10 2001
7,026,602 Electromagnetic radiation detectors having a microelectromechanical shutter device 6 2003
* 2004/0046,123 Electromagnetic radiation detectors having a microelectromechanical shutter device 4 2003
 
VENTURE LENDING & LEASING IV, INC. (37)
6,538,800 Reflective spatial light modulator with deflectable elements formed on a light transmissive substrate 48 2002
6,690,502 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 5 2002
7,099,065 Micromirrors with OFF-angle electrodes and stops 6 2003
6,804,039 Multilayer hinge structures for micro-mirror arrays in projection displays 15 2003
* 2004/0141,224 DOUBLE SUBSTRATE REFLECTIVE SPATIAL LIGHT MODULATOR WITH SELF-LIMITING MICRO-MECHANICAL ELEMENTS 1 2003
7,300,162 Projection display 5 2004
7,172,296 Projection display 9 2004
7,167,297 Micromirror array 4 2004
7,023,606 Micromirror array for projection TV 8 2004
7,018,052 Projection TV with improved micromirror array 5 2004
7,012,731 Packaged micromirror array for a projection display 4 2004
* 7,006,275 Packaged micromirror array for a projection display 5 2004
* 2004/0223,240 Micromirror array 24 2004
7,787,170 Micromirror array assembly with in-array pillars 32 2004
7,212,359 Color rendering of illumination light in display systems 4 2004
7,131,762 Color rendering of illumination light in display systems 6 2004
* 2005/0024,734 Color rendering of illumination light in display systems 0 2004
7,262,817 Rear projection TV with improved micromirror array 11 2004
7,436,572 Micromirrors and hinge structures for micromirror arrays in projection displays 3 2004
7,019,880 Micromirrors and hinge structures for micromirror arrays in projection displays 1 2004
6,980,349 Micromirrors with novel mirror plates 35 2004
7,113,322 Micromirror having offset addressing electrode 4 2004
6,947,200 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 175 2004
7,158,279 Spatial light modulators with non-uniform pixels 1 2004
7,092,143 Micromirror array device and a method for making the same 4 2004
7,023,607 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 9 2004
7,012,733 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 2 2004
7,405,860 Spatial light modulators with light blocking/absorbing areas 3 2005
7,027,207 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 17 2005
7,009,754 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 108 2005
6,975,444 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 21 2005
7,629,190 Method for making a micromechanical device by using a sacrificial substrate 0 2005
7,671,428 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 1 2005
7,655,492 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 0 2005
7,573,111 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 4 2005
7,286,278 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 4 2005
7,295,363 Optical coating on light transmissive substrates of micromirror devices 2 2005
 
Production Resource Group, LLC (5)
6,188,933 Electronically controlled stage lighting system 58 1997
6,736,528 Electronically controlled stage lighting system 11 2001
7,230,752 Electronically controlled stage lighting system 6 2004
* 2004/0160,198 Electronically controlled stage lighting system 5 2004
7,379,230 Electronically controlled stage lighting system 1 2006
 
Altera Corporation (2)
* 6,614,581 Methods and apparatus for providing a multi-stop micromirror 21 2001
6,859,580 Systems and methods for overcoming stiction using a lever 6 2003
 
JDS UNIPHASE CORPORATION (1)
6,275,320 MEMS variable optical attenuator 98 1999
 
Spectral Sciences, Inc. (1)
9,042,414 External cavity laser source 0 2011
 
OL SECURITY LIMITED LIABILITY COMPANY (6)
* 6,745,449 Method and apparatus for making a lid with an optically transmissive window 13 2001
6,667,837 Method and apparatus for configuring an aperture edge 9 2002
6,988,338 Lid with a thermally protected window 4 2002
7,098,396 Method and apparatus for making a lid with an optically transmissive window 1 2004
6,908,026 Method and apparatus for making a lid with an optically transmissive window 3 2004
* 2004/0221,525 Method and apparatus for making a lid with an optically transmissive window 0 2004
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (1)
7,484,857 Light modulating mirror device and array 2 2004
 
Pitronix, Inc. (1)
8,262,274 Light guides and backlight systems incorporating light redirectors at varying densities 2 2011
 
Miradia Inc. (43)
7,026,695 Method and apparatus to reduce parasitic forces in electro-mechanical systems 8 2003
7,118,234 Reflective spatial light modulator 5 2004
7,092,140 Architecture of a reflective spatial light modulator 9 2004
7,022,245 Fabrication of a reflective spatial light modulator 11 2004
* 2004/0159,631 Fabrication of a reflective spatial light modulator 0 2004
* 2004/0145,822 Reflective spatial light modulator 0 2004
* 2004/0145,795 Architecture of a reflective spatial light modulator 0 2004
7,449,284 Method and structure for fabricating mechanical mirror structures using backside alignment techniques 1 2004
* 2005/0255,666 Method and structure for aligning mechanical based device to integrated circuits 20 2004
7,034,984 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 34 2004
6,992,810 High fill ratio reflective spatial light modulator with hidden hinge 36 2004
7,042,619 Mirror structure with single crystal silicon cross-member 22 2004
7,068,417 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 26 2004
* 2006/0023,286 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 0 2004
7,206,110 Memory cell dual protection 4 2004
* 2005/0174,628 Memory cell dual protection 4 2004
7,172,921 Method and structure for forming an integrated spatial light modulator 5 2005
* 2006/0148,121 Method and structure for forming an integrated spatial light modulator 0 2005
7,199,918 Electrical contact method and structure for deflection devices formed in an array configuration 0 2005
7,142,349 Method and structure for reducing parasitic influences of deflection devices on spatial light modulators 2 2005
* 2006/0152,794 Method and structure for reducing parasitic influences of deflection devices on spatial light modulators 0 2005
* 2006/0152,795 Electrical contact method and structure for deflection devices formed in an array configuration 8 2005
7,298,539 Co-planar surface and torsion device mirror structure and method of manufacture for optical displays 1 2005
7,202,989 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 2 2005
* 2006/0274,397 Co-planar surface and torsion device mirror structure and method of manufacture for optical displays 0 2005
7,190,508 Method and structure of patterning landing pad structures for spatial light modulators 1 2005
7,184,195 Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator 59 2005
7,502,158 Method and structure for high fill factor spatial light modulator with integrated spacer layer 0 2005
* 2006/0082,862 High fill ratio reflective spatial light modulator with hidden hinge 1 2005
7,369,297 Mirror structure with single crystal silicon cross-member 2 2005
* 2006/0087,717 Mirror structure with single crystal silicon cross-member 2 2005
* 2006/0131,262 Fabrication of a reflective spatial light modulator 0 2005
7,233,428 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 4 2006
* 2006/0187,525 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 0 2006
7,670,880 Method and structure for forming an integrated spatial light modulator 1 2007
7,382,519 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 1 2007
7,570,416 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 0 2007
* 2008/0055,709 METHOD AND APPARATUS FOR A REFLECTIVE SPATIAL LIGHT MODULATOR WITH A FLEXIBLE PEDESTAL 0 2007
7,428,094 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 0 2007
* 2008/0062,503 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 0 2007
8,207,004 Method and structure for forming a gyroscope and accelerometer 3 2009
* 2010/0109,102 Method and structure for forming a gyroscope and accelerometer 26 2009
8,530,259 Method and structure for forming a gyroscope and accelerometer 0 2012
 
POLYCHROMIX, INC. (2)
* 5,905,571 Optical apparatus for forming correlation spectrometers and optical processors 116 1995
* 5,757,536 Electrically-programmable diffraction grating 159 1995
 
CITIZEN FINEDEVICE CO., LTD. (1)
8,130,185 Active matrix liquid crystal image generator 2 2007
 
BTENDO (1)
* 2011/0109,951 METHOD AND DEVICE FOR MONITORING MOVEMENT OF MIRRORS IN A MEMS DEVICE 1 2010
 
NETWORK PHOTONICS, INC. (1)
* 2004/0022,483 Systems and methods for overcoming stiction using a lever 4 2003
 
KONINKLIJKE PHILIPS ELECTRONICS N.V. (1)
6,578,968 Image projection system having an extra optical system for at least partly re-illuminating the image display system 4 2000
 
SHARP KABUSHIKI KAISHA (1)
8,045,097 Liquid crystal display device and viewing angle control module 2 2007
 
QUALCOMM INCORPORATED (12)
7,030,894 Image display system and method 12 2002
7,034,811 Image display system and method 14 2002
6,963,319 Image display system and method 17 2002
* 2004/0027,363 Image display system and method 3 2002
7,172,288 Display device including a spatial light modulator with plural image regions 0 2003
* 2005/0024,593 Display device including a spatial light modulator with plural image regions 1 2003
7,317,465 Image display system and method 1 2004
* 2004/0207,815 Image display system and method 22 2004
7,657,118 Generating and displaying spatially offset sub-frames using image data converted from a different color space 4 2004
* 2005/0275,642 Generating and displaying spatially offset sub-frames 7 2004
7,675,510 Image display system and method 1 2005
7,679,613 Image display system and method 1 2005
 
National Optics Institute (1)
* 6,025,951 Light modulating microdevice and method 135 1996
 
AFA Controls LLC (3)
7,753,072 Valve assemblies including at least three chambers and related methods 1 2005
7,448,412 Microvalve assemblies and related structures and related methods 2 2005
7,946,308 Methods of packaging valve chips and related valve assemblies 0 2008
 
Spatial Photonics, Inc. (14)
7,167,298 High contrast spatial light modulator and method 30 2004
* 2005/0128,564 High contrast spatial light modulator and method 1 2004
* 2007/0132,681 Passive micro-mirror-array spatial light modulation 5 2005
7,471,440 Fabricating micro devices using sacrificial materials 3 2006
* 2006/0187,523 Fabricating micro devices using sacrificial materials 1 2006
7,423,798 Addressing circuit and method for bi-directional micro-mirror array 2 2006
* 2007/0041,078 ADDRESSING CIRCUIT AND METHOD FOR BI-DIRECTIONAL MICRO-MIRROR ARRAY 0 2006
* 7,586,669 Non-contact micro mirrors 3 2006
7,508,569 Low voltage micro mechanical device 1 2006
* 2008/0122,822 LOW VOLTAGE MICRO MECHANICAL DEVICE 1 2006
7,394,586 Spatial light modulator 2 2006
* 2007/0080,131 Spatial light modulator 0 2006
7,667,885 Spatial light modulator 0 2008
7,618,835 Fabricating a spatial light modulator 0 2008
 
UDC, LLC (1)
7,499,208 Current mode display driver circuit realization feature 12 2005
 
Adriatic Research Institute (4)
7,295,726 Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same 15 2004
7,428,353 MEMS device control with filtered voltage signal shaping 13 2006
8,043,513 Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same 2 2007
* 2008/0061,026 GIMBAL-LESS MICRO-ELECTRO-MECHANICAL-SYSTEM TIP-TILT AND TIP-TILT-PISTON ACTUATORS AND A METHOD FOR FORMING THE SAME 10 2007
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (10)
* 5,459,610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 322 1993
* 5,677,783 Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 109 1995
* 5,742,419 Miniature scanning confocal microscope 126 1995
* 5,907,425 Miniature scanning confocal microscope 68 1997
* 6,007,208 Miniature scanning confocal microscope 41 1997
6,749,346 Miniature scanning confocal microscope 29 1998
* 6,075,639 Micromachined scanning torsion mirror and method 37 1998
* 6,088,145 Miniature scanning confocal microscope 41 1998
* 6,154,305 Miniature scanning confocal microscope 66 1999
* 6,122,090 Method of micromachining a scanning torsion mirror 14 1999
 
QUALCOMM MEMS TECHNOLOGIES, INC. (249)
7,123,216 Photonic MEMS and structures 610 1999
7,138,984 Directly laminated touch sensitive screen 133 2001
7,042,643 Interferometric modulation of radiation 217 2002
7,110,158 Photonic MEMS and structures 204 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 47 2002
7,297,471 Method for manufacturing an array of interferometric modulators 27 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 122 2003
7,460,291 Separable modulator 70 2003
7,012,726 MEMS devices with unreleased thin film components 93 2003
7,198,973 Method for fabricating an interference display unit 118 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 167 2003
7,692,844 Interferometric modulation of radiation 42 2004
7,532,194 Driver voltage adjuster 6 2004
7,119,945 Altering temporal response of microelectromechanical elements 154 2004
7,706,050 Integrated modulator illumination 42 2004
7,193,768 Interference display cell 25 2004
7,476,327 Method of manufacture for microelectromechanical devices 55 2004
7,060,895 Modifying the electro-mechanical behavior of devices 65 2004
7,280,265 Interferometric modulation of radiation 50 2004
7,164,520 Packaging for an interferometric modulator 53 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 57 2004
7,855,824 Method and system for color optimization in a display 26 2005
7,893,919 Display region architectures 21 2005
7,813,026 System and method of reducing color shift in a display 22 2005
7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator 19 2005
7,424,198 Method and device for packaging a substrate 5 2005
7,142,346 System and method for addressing a MEMS display 45 2005
7,515,147 Staggered column drive circuit systems and methods 16 2005
7,379,227 Method and device for modulating light 20 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 52 2005
7,289,259 Conductive bus structure for interferometric modulator array 83 2005
7,460,246 Method and system for sensing light using interferometric elements 14 2005
7,560,299 Systems and methods of actuating MEMS display elements 27 2005
7,012,732 Method and device for modulating light with a time-varying signal 85 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 9 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 5 2005
7,259,449 Method and system for sealing a substrate 18 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 13 2005
7,668,415 Method and device for providing electronic circuitry on a backplate 9 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 17 2005
7,420,728 Methods of fabricating interferometric modulators by selectively removing a material 19 2005
7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 11 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 9 2005
7,299,681 Method and system for detecting leak in electronic devices 3 2005
7,920,135 Method and system for driving a bi-stable display 13 2005
7,679,627 Controller and driver features for bi-stable display 10 2005
7,586,484 Controller and driver features for bi-stable display 25 2005
7,535,466 System with server based control of client device display features 22 2005
7,532,195 Method and system for reducing power consumption in a display 10 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 65 2005
7,289,256 Electrical characterization of interferometric modulators 15 2005
7,602,375 Method and system for writing data to MEMS display elements 8 2005
7,916,103 System and method for display device with end-of-life phenomena 2 2005
7,321,456 Method and device for corner interferometric modulation 61 2005
7,626,581 Device and method for display memory using manipulation of mechanical response 8 2005
7,372,613 Method and device for multistate interferometric light modulation 91 2005
7,889,163 Drive method for MEMS devices 26 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 3 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 67 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 5 2005
7,843,410 Method and device for electrically programmable display 6 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 57 2005
7,547,565 Method of manufacturing optical interference color display 21 2005
7,527,995 Method of making prestructure for MEMS systems 45 2005
7,808,703 System and method for implementation of interferometric modulator displays 6 2005
7,349,136 Method and device for a display having transparent components integrated therein 10 2005
RE42119 Microelectrochemical systems device and method for fabricating same 14 2005
8,008,736 Analog interferometric modulator device 11 2005
7,710,629 System and method for display device with reinforcing substance 6 2005
8,124,434 Method and system for packaging a display 7 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 41 2005
7,471,444 Interferometric modulation of radiation 21 2005
7,388,706 Photonic MEMS and structures 29 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 25 2005
7,196,837 Area array modulation and lead reduction in interferometric modulators 48 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 84 2005
8,004,504 Reduced capacitance display element 9 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 7 2005
* 2006/0077,153 Reduced capacitance display element 52 2005
7,417,783 Mirror and mirror layer for optical modulator and method 10 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 18 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 10 2005
RE40436 Hermetic seal and method to create the same 14 2005
8,878,825 System and method for providing a variable refresh rate of an interferometric modulator display 0 2005
7,304,784 Reflective display device having viewable display on both sides 62 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 94 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 46 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 14 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 4 2005
7,310,179 Method and device for selective adjustment of hysteresis window 13 2005
7,724,993 MEMS switches with deforming membranes 2 2005
7,492,502 Method of fabricating a free-standing microstructure 13 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 57 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 23 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 33 2005
7,136,213 Interferometric modulators having charge persistence 23 2005
7,564,612 Photonic MEMS and structures 91 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 237 2005
7,369,294 Ornamental display device 59 2005
7,710,636 Systems and methods using interferometric optical modulators and diffusers 30 2005
7,684,104 MEMS using filler material and method 17 2005
7,653,371 Selectable capacitance circuit 29 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 6 2005
7,675,669 Method and system for driving interferometric modulators 5 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 13 2005
7,545,550 Systems and methods of actuating MEMS display elements 7 2005
8,310,441 Method and system for writing data to MEMS display elements 1 2005
7,446,927 MEMS switch with set and latch electrodes 7 2005
7,486,429 Method and device for multistate interferometric light modulation 17 2005
7,236,284 Photonic MEMS and structures 111 2005
7,630,114 Diffusion barrier layer for MEMS devices 8 2005
8,014,059 System and method for charge control in a MEMS device 6 2005
7,776,631 MEMS device and method of forming a MEMS device 28 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 1 2005
7,403,323 Process control monitors for interferometric modulators 2 2005
7,369,252 Process control monitors for interferometric modulators 1 2005
7,259,865 Process control monitors for interferometric modulators 21 2005
8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays 1 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 6 2005
7,355,779 Method and system for driving MEMS display elements 6 2006
7,916,980 Interconnect structure for MEMS device 10 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 15 2006
8,194,056 Method and system for writing data to MEMS display elements 2 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 3 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 9 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 46 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 57 2006
7,483,197 Photonic MEMS and structures 26 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 14 2006
7,532,377 Movable micro-electromechanical device 58 2006
7,643,203 Interferometric optical display system with broadband characteristics 34 2006
7,948,457 Systems and methods of actuating MEMS display elements 1 2006
7,903,047 Mode indicator for interferometric modulator displays 4 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 13 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 18 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 13 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 63 2006
8,049,713 Power consumption optimized display update 2 2006
7,920,136 System and method of driving a MEMS display device 1 2006
7,706,044 Optical interference display cell and method of making the same 11 2006
7,880,954 Integrated modulator illumination 25 2006
7,369,292 Electrode and interconnect materials for MEMS devices 24 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 28 2006
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,907,319 Method and device for modulating light with optical compensation 34 2006
7,161,094 Modifying the electro-mechanical behavior of devices 41 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 101 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 31 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 15 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 88 2006
7,187,489 Photonic MEMS and structures 105 2006
7,636,151 System and method for providing residual stress test structures 1 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 12 2006
7,702,192 Systems and methods for driving MEMS display 1 2006
7,835,061 Support structures for free-standing electromechanical devices 17 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 60 2006
7,777,715 Passive circuits for de-multiplexing display inputs 4 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 19 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 5 2006
7,534,640 Support structure for MEMS device and methods therefor 22 2006
7,830,586 Transparent thin films 33 2006
7,554,711 MEMS devices with stiction bumps 64 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 9 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 47 2006
7,660,058 Methods for etching layers within a MEMS device to achieve a tapered edge 16 2006
7,928,940 Drive method for MEMS devices 0 2006
7,580,172 MEMS device and interconnects for same 7 2006
7,898,722 Microelectromechanical device with restoring electrode 51 2006
7,388,697 System and method for addressing a MEMS display 16 2006
7,242,512 System and method for addressing a MEMS display 16 2006
7,667,884 Interferometric modulators having charge persistence 6 2006
7,355,782 Systems and methods of controlling micro-electromechanical devices 12 2006
7,535,621 Aluminum fluoride films for microelectromechanical system applications 50 2006
7,652,814 MEMS device with integrated optical element 7 2007
* 7,872,792 Method and device for modulating light with multiple electrodes 25 2007
* 2007/0177,247 Method and device for modulating light with multiple electrodes 85 2007
7,846,344 Method and device for modulating light 7 2007
7,733,552 MEMS cavity-coating layers and methods 11 2007
8,059,326 Display devices comprising of interferometric modulator and sensor 15 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 24 2007
7,570,415 MEMS device and interconnects for same 2 2007
8,081,369 System and method for a MEMS device 9 2007
7,852,545 Method and device for modulating light 30 2007
7,839,556 Method and device for modulating light 8 2007
7,830,587 Method and device for modulating light with semiconductor substrate 31 2007
7,826,120 Method and device for multi-color interferometric modulation 30 2007
7,808,694 Method and device for modulating light 31 2007
7,800,809 System and method for a MEMS device 8 2007
7,738,157 System and method for a MEMS device 36 2007
* 2008/0106,782 SYSTEM AND METHOD FOR A MEMS DEVICE 87 2007
* 2008/0088,911 SYSTEM AND METHOD FOR A MEMS DEVICE 81 2007
* 2008/0088,904 Method and device for modulating light with semiconductor substrate 89 2007
* 2008/0088,912 SYSTEM AND METHOD FOR A MEMS DEVICE 88 2007
* 2008/0036,795 METHOD AND DEVICE FOR MODULATING LIGHT 5 2007
* 2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 90 2007
8,072,402 Interferometric optical modulator with broadband reflection characteristics 12 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 8 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 16 2007
7,532,386 Process for modifying offset voltage characteristics of an interferometric modulator 16 2007
7,623,752 System and method of testing humidity in a sealed MEMS device 6 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 2 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 11 2008
8,105,496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 8 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 2 2008
8,222,066 Eliminate release etch attack by interface modification in sacrificial layers 1 2008
* 2008/0311,690 ELIMINATE RELEASE ETCH ATTACK BY INTERFACE MODIFICATION IN SACRIFICIAL LAYERS 7 2008
7,688,494 Electrode and interconnect materials for MEMS devices 18 2008
7,944,603 Microelectromechanical device and method utilizing a porous surface 6 2008
7,851,239 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 1 2008
7,738,158 Electromechanical device treatment with water vapor 1 2008
* 2009/0002,804 ELECTROMECHANICAL DEVICE TREATMENT WITH WATER VAPOR 2 2008
8,416,487 Photonic MEMS and structures 5 2009
8,169,687 Photonic MEMS and structures 0 2009
7,791,787 Moveable micro-electromechanical device 8 2009
* 2009/0135,463 MOVEABLE MICRO-ELECTROMECHANICAL DEVICE 1 2009
7,830,588 Method of making a light modulating display device and associated transistor circuitry and structures thereof 40 2009
8,735,225 Method and system for packaging MEMS devices with glass seal 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 7 2009
8,077,379 Interferometric optical display system with broadband characteristics 0 2009
8,422,108 Method and device for modulating light with optical compensation 6 2009
8,736,590 Low voltage driver scheme for interferometric modulators 0 2010
8,126,297 MEMS device fabricated on a pre-patterned substrate 1 2010
8,164,815 MEMS cavity-coating layers and methods 4 2010
7,929,197 System and method for a MEMS device 6 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,928,967 Method and device for modulating light 0 2010
8,853,747 Method of making an electronic device with a curved backplate 0 2010
8,035,884 Method and device for modulating light with semiconductor substrate 12 2010
* 2011/0038,027 METHOD AND DEVICE FOR MODULATING LIGHT WITH SEMICONDUCTOR SUBSTRATE 44 2010
* 2011/0043,891 METHOD FOR MODULATING LIGHT 8 2010
9,110,289 Device for modulating light with multiple electrodes 0 2011
8,971,675 Interconnect structure for MEMS device 0 2011
9,134,527 Pixel via and methods of forming the same 0 2011
8,963,159 Pixel via and methods of forming the same 0 2011
8,817,357 Mechanical layer and methods of forming the same 1 2011
8,682,130 Method and device for packaging a substrate 0 2011
8,749,538 Device and method of controlling brightness of a display based on ambient lighting conditions 0 2011
8,681,079 Interferometric optical modulator with broadband reflection characteristics 0 2011
8,964,280 Method of manufacturing MEMS devices providing air gap control 0 2012
8,970,939 Method and device for multistate interferometric light modulation 0 2012
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 2 2012
8,878,771 Method and system for reducing power consumption in a display 0 2012
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
9,001,412 Electromechanical device with optical function separated from mechanical and electrical function 0 2012
8,791,897 Method and system for writing data to MEMS display elements 0 2012
8,885,244 Display device 0 2013
9,086,564 Conductive bus structure for interferometric modulator array 0 2013
9,097,885 Device having a conductive light absorbing mask and method for fabricating same 0 2014
 
SILICON LIGHT MACHINES CORPORATION (48)
5,841,579 Flat diffraction grating light valve 185 1995
5,808,797 Method and apparatus for modulating a light beam 332 1996
5,982,553 Display device incorporating one-dimensional grating light-valve array 380 1997
6,088,102 Display apparatus including grating light-valve array and interferometric optical system 141 1997
6,271,808 Stereo head mounted display using a single display device 85 1998
6,130,770 Electron gun activated grating light valve 73 1998
6,101,036 Embossed diffraction grating alone and in combination with changeable image display 71 1998
6,215,579 Method and apparatus for modulating an incident light beam for forming a two-dimensional image 115 1998
6,956,878 Method and apparatus for reducing laser speckle using polarization averaging 34 2000
7,177,081 High contrast grating light valve type device 30 2001
6,764,875 Method of and apparatus for sealing an hermetic lid to a semiconductor die 31 2001
6,865,346 Fiber optic transceiver 5 2001
6,747,781 Method, apparatus, and diffuser for reducing laser speckle 66 2001
6,829,092 Blazed grating light valve 13 2001
6,707,591 Angled illumination for a single order light modulator based projection system 4 2001
6,800,238 Method for domain patterning in low coercive field ferroelectrics 1 2002
6,782,205 Method and apparatus for dynamic equalization in wavelength division multiplexing 68 2002
6,991,953 Microelectronic mechanical system and methods 10 2002
6,767,751 Integrated driver process flow 6 2002
6,728,023 Optical device arrays with optimized image resolution 26 2002
7,054,515 Diffractive light modulator-based dynamic equalizer with integrated spectral monitor 1 2002
6,822,797 Light modulator structure for producing high-contrast operation using zero-order light 6 2002
6,872,984 Method of sealing a hermetic lid to a semiconductor die at an angle 27 2002
6,829,258 Rapidly tunable external cavity laser 36 2002
6,908,201 Micro-support structures 6 2002
6,813,059 Reduced formation of asperities in contact micro-structures 90 2002
6,714,337 Method and device for modulating a light beam and having an improved gamma response 8 2002
7,057,795 Micro-structures with individually addressable ribbon pairs 4 2002
6,801,354 2-D diffraction grating for substantially eliminating polarization dependent losses 10 2002
6,956,995 Optical communication arrangement 8 2002
6,712,480 Controlled curvature of stressed micro-structures 7 2002
7,049,164 Microelectronic mechanical system and methods 60 2002
6,928,207 Apparatus for selectively blocking WDM channels 3 2002
7,057,819 High contrast tilting ribbon blazed grating 5 2002
6,987,600 Arbitrary phase profile for better equalization in dynamic gain equalizer 2 2002
6,934,070 Chirped optical MEM device 6 2002
6,927,891 Tilt-able grating plane for improved crosstalk in 1×N blaze switches 3 2002
7,068,372 MEMS interferometer-based reconfigurable optical add-and-drop multiplexor 6 2003
7,286,764 Reconfigurable modulator-based optical add-and-drop multiplexer 4 2003
6,947,613 Wavelength selective switch and equalizer 1 2003
6,922,272 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices 9 2003
7,391,973 Two-stage gain equalizer 2 2003
* 7,046,420 MEM micro-structures and methods of making the same 3 2003
7,027,202 Silicon substrate as a light modulator sacrificial layer 55 2003
6,922,273 PDL mitigation structure for diffractive MEMS and gratings 2 2003
6,829,077 Diffractive light modulator with dynamically rotatable diffraction plane 4 2003
6,806,997 Patterned diffractive light modulator ribbon for PDL reduction 3 2003
7,042,611 Pre-deflected bias ribbons 0 2003
 
DIGITAL PROJECTION LIMITED (1)
* 6,184,852 Spatial light modulators 11 1999
 
LUMENTUM OPERATIONS LLC (4)
7,095,546 Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays 51 2004
* 2004/0212,907 Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays 15 2004
7,432,629 Articulated MEMs structures 6 2006
* 2006/0222,312 Articulated MEMs structures 1 2006
 
DEERE & COMPANY (6)
7,064,810 Optical range finder with directed attention 37 2003
* 2005/0057,741 Optical range finder with directed attention 3 2003
6,839,127 Optical range finder having a micro-mirror array 24 2003
7,916,898 Method and system for identifying an edge of a crop 32 2004
* 2005/0088,643 Method and system for identifying an edge of a crop 29 2004
7,206,063 Optical range finder with directed attention 10 2006
 
TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD. (3)
7,412,358 Efficient method of extracting the pull-in parameters of an electrostatically activated MEMS device for the purpose of designing the device 1 2002
7,423,794 Device and method for stacked multi-level uncoupled electrostatic actuators 0 2004
* 2006/0279,862 Device and method for stacked multi-level uncoupled electrostatic actuators 3 2004
 
Strasbaugh (2)
7,018,268 Protection of work piece during surface processing 3 2003
* 2003/0211,813 PROTECTION OF WORK PIECE DURING SURFACE PROCESSING 0 2003
 
ANALOG DEVICES, INC. (4)
6,674,140 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor 22 2001
7,220,614 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor 6 2003
* 2003/0211,650 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor 2 2003
7,364,942 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor 5 2007
 
EASTMAN KODAK COMPANY (29)
* 5,910,856 Integrated hybrid silicon-based micro-reflector 52 1998
* 6,084,626 Grating modulator array 83 1998
6,215,547 Reflective liquid crystal modulator based printing system 55 1998
6,330,018 Method and apparatus for printing high resolution images using reflective LCD modulators 15 1999
6,396,530 Method for improving exposure resolution using multiple exposures 1 2000
6,943,919 Method and apparatus for correcting defects in a spatial light modulator based printing system 1 2000
6,407,766 Method and apparatus for printing to a photosensitive media using multiple spatial light modulators 33 2000
6,646,716 Method and apparatus for printing multiple simultaneous images onto a photosensitive media 15 2000
6,614,462 Method and apparatus for printing high resolution images using reflective LCD modulators 3 2000
6,930,797 Method and apparatus for printing high resolution images using multiple reflective spatial light modulators 4 2001
* 2002/0118,375 Method and apparatus for printing high resolution images using multiple reflective spatial light modulators 0 2001
6,980,321 Method and apparatus for printing high resolution images using multiple reflective spatial light modulators 2 2001
6,778,290 Printing image frames corresponding to motion pictures 6 2001
6,980,280 Two level image writer 4 2001
7,145,520 Display apparatus box using a spatial light modulator 7 2001
6,574,043 Method for enhanced bit depth in an imaging apparatus using a spatial light modulator 13 2001
6,574,032 Imaging apparatus using dither to minimize pixel effects 14 2002
6,590,695 Micro-mechanical polarization-based modulator 14 2002
6,734,889 Color printer comprising a linear grating spatial light modulator 4 2002
7,164,434 LCD based imaging apparatus for printing multiple formats 0 2002
* 2004/0070,665 LCD based imaging apparatus for printing multiple formats 0 2002
7,369,268 Light source using large area LEDs 6 2003
* 2004/0135,874 Light source using large area LEDs 3 2003
6,707,595 Micro-mechanical polarization-based modulator 8 2003
6,700,599 Apparatus for printing high resolution images using reflective LCD modulators 1 2003
7,042,483 Apparatus and method for printing using a light emissive array 2 2003
6,801,238 Apparatus for printing high resolution images using reflective LCD modulators 2 2003
* 2007/0153,080 High-speed continuous film writer 2 2005
7,782,347 Light source using large area LEDs 4 2008
 
PLAIN SIGHT SYSTEMS, INC. (5)
7,652,765 Hyper-spectral imaging methods and devices 10 2005
7,219,086 System and method for hyper-spectral analysis 7 2005
7,180,588 Devices and method for spectral measurements 22 2005
* 2005/0243,312 Devices and method for spectral measurements 11 2005
7,248,358 Devices and method for spectral measurements 8 2005
 
HER MAJESTY THE QUEEN IN RIGHT OF CANADA AS REPRESENTED BY THE MINISTER OF NATIONAL DEFENCE (1)
7,088,493 Light modulating microdevice 9 2004
 
SILICON QUEST KABUSHIKI-KAISHA (28)
7,835,062 Mircromirror device having a vertical hinge 1 2007
* 2008/0074,729 Mircromirror device having a vertical hinge 1 2007
7,907,320 Micromirror device with a single address electrode 0 2008
7,907,325 Control methods for micromirror devices implemented with a single address electrode 0 2008
7,839,561 Micromirror device with a single address electrode 0 2008
7,649,673 Micromirror device with a single address electrode 2 2008
* 2009/0174,926 Micromirror device with a single address electrode 2 2008
8,179,591 Spatial light modulator and mirror array device 0 2008
7,973,994 Spatial light modulator 0 2008
7,876,492 Spatial light modulator and mirror array device 0 2008
7,848,005 Spatial light modulator implemented with a mirror array device 0 2008
* 2009/0128,462 Spatial light modulator and mirror device 0 2008
* 2009/0128,884 Spatial light modulator implemented with a mirror array device 1 2008
* 2009/0080,059 Spatial light modulator 0 2008
7,911,680 Micromirror device having a vertical hinge 1 2009
* 2009/0195,858 Changing an electrode function 0 2009
* 2009/0207,325 Algorithm for SLM of single hinge type 0 2009
* 2009/0180,038 Mirror control within time slot for SLM 1 2009
7,916,381 Spatial light modulator including drive lines 0 2009
8,154,474 Driving method of memory access 2 2009
7,733,558 Display device with an addressable movable electrode 1 2009
* 2009/0219,279 Driving method of memory access 1 2009
* 2009/0185,085 Display device with an addressable movable electrode 1 2009
7,969,395 Spatial light modulator and mirror device 0 2009
8,081,371 Spatial light modulator and display apparatus 0 2009
8,228,595 Sequence and timing control of writing and rewriting pixel memories with substantially lower data rate 0 2009
7,957,050 Mirror device comprising layered electrode 0 2009
8,199,394 Mircromirror device having a vertical hinge 0 2010
 
KAWASAKI MICROELECTRONICS, INC. (1)
6,933,998 Display devices with integrated control elements and methods of making devices 2 2000
 
AGILENT TECHNOLOGIES, INC. (1)
6,642,498 Micromirror optical multiplexer and method for directing light towards an array of sensors 2 2001
 
HOEL, CARLTON H. (1)
* 5,619,061 Micromechanical microwave switching 197 1994
 
LOS ALAMOS NATIONAL SECURITY, LLC (1)
* 2005/0190,286 Integrated array sensor for real time measurements of biological samples 4 2004
* Cited By Examiner