Halogen-compatible high-frequency discharge apparatus
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United States of America Patent
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Oct 29, 1991
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N/A
app pub date -
May 17, 1990
filing date -
May 17, 1990
priority date (Note) -
Expired
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Abstract
Discharge tubes formed of metal fluoride gases are used in apparatus for emitting high frequency laser and fluorescent light. The discharge tubes are resistant to corrosion from halogen-containing gas mixtures subjected to high frequency excitation in the apparatus.
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