Semiconductor transducer or actuator utilizing corrugated supports
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United States of America Patent
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-
Nov 12, 1991
Grant Date -
N/A
app pub date -
Apr 7, 1989
filing date -
Apr 7, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A semiconductor transducer or actuator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-back alignment is also disclosed for forming uniform corrugations of precise thickness; independent of the thickness of the deflecting member. The cross-sectional shape of the corregations is not limited by the etching technique, so that any configuration thereof is enabled.
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