Accumulated exposure detection with exposure terminating attenuator
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United States of America Patent
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-
Dec 3, 1991
Grant Date -
N/A
app pub date -
Jun 18, 1990
filing date -
Jun 18, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The method of exposure control disclosed herein is particularly applicable to the pulsed laser illumination of photosensitive resists. The relative illuminating energy provided by successive laser pulses is measured and the successive measurements are accumulated. When the accumulated value appraoches the desired exposure level within a preselected difference, an attenuator is inserted in the optical path between the laser and the resist thereby to reduce the exposing energy provided by each pulse to a value below the acceptable deviation. The exposure is terminated when the accumulated value effectively reaches the desired exposure level.
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