Process for the preparation of novolak resins with low metal ion content

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United States of America Patent

PATENT NO 5073622
SERIAL NO

07550692

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Abstract

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The invention relates to a process for the preparation of novolak resins having a low amount of metal ions. In the process, a conventional resin in an organic solution is brought into contact with an acidic, preferably complex-forming compound which preferably is present in an aqueous phase. The resin solutions may be used in the production of photoresists.

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Patent Owner(s)

Patent OwnerAddress
AZ ELECTRONIC MATERIALS USA CORP70 MEISTER AVENUE SOMERVILLE NJ 08876

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Niederstaetter, Walter Eltville, DE 5 65
Thamm, Horst-Dieter Eschborn, DE 6 93
Wojtech, Bernhard Bad Soden am Taunus, DE 9 82

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