Flat grind stage assembly for an automatic edge grinder
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United States of America Patent
Stats
-
Dec 31, 1991
Grant Date -
N/A
app pub date -
Apr 28, 1989
filing date -
Apr 28, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The flat grind stage assembly is programmed so that the grinding wheel is first caused to move along a straight path to form a flat on a wafer while the wafer is held in a stationary position. Thereafter, the grinding wheel is returned to the mid-point of the flat and then moved away from the flat. The wafer is then rotated and grinding commences when the end of the flat is reached so that a circular periphery is ground on the remainder of the wafer while the axis of the grinding wheel remains stationary.
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