Electron microscope with an asymmetrical immersion lens
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United States of America Patent
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-
Jan 7, 1992
Grant Date -
N/A
app pub date -
Aug 31, 1989
filing date -
Aug 31, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A magnetic electron focusing lens including a first pole piece, from a back side of which low-energy electrons are injected, and a second pole piece located on a front side of the first pole piece. The first and second pole pieces are coupled to form a single magnetic circuit. The first pole piece is shaped to maximize the magnetic field at a its front side at a peak much closer to the first then to the second pole piece. The specimen is located between the first and second pole pieces near the peak of the magnetic field.
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