Double-sided radiation-assisted processing apparatus
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United States of America Patent
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Jan 21, 1992
Issued Date -
N/A
app pub date -
Mar 12, 1991
filing date -
Jul 18, 1990
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A double-sided radiation-assisted processing apparatus includes a planar radiation source having first and second sides and providing radiation having an intensity I.sub.O at the surface of substrates provided on both the first and second sides of the radiation source. Accordingly, the radiation intensity utilized for processing is 2I.sub.O.
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