Carrier for supporting workpiece to be polished

United States of America Patent

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Feb 4, 1992
Grant Date
N/A
app pub date
Apr 23, 1990
filing date
May 2, 1989

priority date (Note)
Expired

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Abstract

A carrier for supporting workpieces to be polished is composed of an integrated mica laminated sheet. The mica laminated sheet is impregnated with a thermo-setting resin. The carrier has a low warp ratio and can be made thin with a sufficient mechanical strength and accuracy of thickness.

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Patent Owner(s)

Patent Owner	Address
FUJI SPINNING CO LTD	TOKYO
SEKISUI KAGAKU KOGYO KABUSHIKI KAISHA	4-4 NISHITENMA 2-CHOME KITA-KU OSAKA-SHI OSAKA 530-8565
OKABE MICA CO LTD	6596-1 NAKAMACHI NAKAMA-CITY FUKUOKA

International Classification(s)

B24B:MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR PO....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Kimura, Tsuguji	Soka, JP	2	47
Kinumura, Akira	Nara, JP	1	14
Koretomo, Katsuhiko	Takatsuki, JP	1	14
Kuwano, Tatsuhiko	Osaka, JP	1	14
Yura, Shuichi	Nakama, JP	1	14

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Carrier for supporting workpiece to be polished

Number of patents in Portfolio can not be more than 2000

United States of America Patent

07513090

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PATENT NO	5085009
SERIAL NO	07513090
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07513090

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