Vacuum pumping apparatus
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United States of America Patent
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-
Feb 18, 1992
Grant Date -
N/A
app pub date -
Sep 4, 1990
filing date -
Sep 4, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Method and apparatus for achieving a high degree of vacuum pumping in an enclosure utilizing a single-stage pump. A vacuum pumping unit is coupled to a plurality of interconnected enclosures through a series of valves. When evacuation of a selected enclosure is desired, the valves are opened sequentially for a brief duration such that the enclosures are alternatively evacuated to the atmosphere and to other partially evacuated enclosures.
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