Importance

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Abstract

An apparatus for checking a semiconductor comprising an X-Y stage for movably holding a semiconductor chip in terms of X-Y coordinates, a charged particle beam radiating device for radiating a charged particle beam on the semiconductor chip held in the X-Y stage to generate secondary electrons therefrom, a detecting device for detecting secondary electrons emitted from the semiconductor, a magnifying device for displaying an enlarged image of the semiconductor chip on the basis of data of the detected secondary electrons, a semiconductor tester for measuring electrical characteristics of the semiconductor chip to specify a defective element of circuit elements constituting the semiconductor chip on the basis of a result of the measurement, a defective portion locating device provided with table data of a layout pattern showing the relationship between the circuit elements consituting the semiconductor chip and the arrangement thereof, for obtaining on the basis of the table data position data of the defective circuit element specified by the semiconductor tester, and a control device for issuing instructions to operate the X-Y stage, charged particle beam radiating device, and magnifying device, and further to cause the charged particle beam radiating device to impress marks on the semiconductor chip for indicating a position of the defective circuit element in positions apart from the defective circuit element at predetermined spaces by the charged particle beam radiation on the basis of the position data of the defective circuit element obtained by the defective portion locating device.

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First Claim