Illumination optical system
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United States of America Patent
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Feb 25, 1992
Issued Date -
N/A
app pub date -
Jun 18, 1991
filing date -
Feb 13, 1984
priority date (Note) -
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status (Latency Note)
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Abstract
An illumination optical system including a plurality of separate laser sources or a plurality of separate secondary light sources defined by the laser beams emerging from the laser sources. On an area to be illuminated, the laser beams emerging from the laser sources or emerging from the secondary light sources are superposed upon one another, whereby uniform exposure and an improved imaging performance are assured.
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