US Patent No: 5,092,675

Number of patents in Portfolio can not be more than 2000

Vacuum line particle detector with slab laser

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Abstract

A particle sensing cell designed to detect the size of particles in a vacuum line for semiconductor processing equipment, a YAG plate is placed adjacent to the vacuum line conduit to define an external laser cavity extending across the conduit between an end face of the YAG plate and a mirror spaced from the end face across the conduit. The YAG plate will generate a laser beam in the shape of a sheet extending across the conduit. A cylindrical lens is positioned adjacent to the mirror to focus light scattered from particles passing through the laser beam on rectilinear photodetector arrays. Pulses generated by the array are applied to pulse amplitude measuring circuitry.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
PACIFIC SCIENTIFIC COMPANYANAHEIM, CA94

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sommer, Holger T Merlin, OR 12 191

Cited Art

Patent Info (Count) # Cites Year
 
PACIFIC SCIENTIFIC COMPANY (4)
4,746,215 Particle counter air inlet assembly 29 1986
4,842,406 Optical instruments for measuring particle sizes 27 1988
4,917,496 Particle size measuring instrument with direct scattered light detection 17 1988
4,984,889 Particle size measuring system with coincidence detection 13 1989
 
PARTICLE MEASURING SYSTEMS, INC. (2)
4,571,079 Aerosol sampling device and method with improved sample flow characteristics 33 1983
4,798,465 Particle size detection device having high sensitivity in high molecular scattering environment 39 1986
 
HER MAJESTY IN RIGHT OF CANADA AS REPRESENTED BY THE MINISTER OF FISHERIES AND OCEANS (1)
4,637,719 Optical measurement of marine conditions 10 1984
 
HITACHI, LTD. (1)
4,685,802 Small particle detection system 22 1985
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (1)
4,563,763 Method and apparatus for cooling a slab laser 21 1983
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE INTERIOR (1)
4,457,624 Suspended sediment sensor 15 1982
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (1)
4,380,392 Method and apparatus for calibration of instruments serving to count and to determine the size of particles suspended in dispersion medium 9 1981

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
PARTICLE MEASURING SYSTEMS, INC. (10)
5,751,422 In-situ particle detection utilizing optical coupling 20 1996
5,726,753 Intracavity particle detection using optically pumped laser media 15 1996
5,889,589 Intracavity particle detection using optically pumped laser media 9 1998
6,859,277 Particle counter with strip laser diode 16 2002
7,576,857 Particle counter with laser diode 6 2004
8,154,724 Two-dimensional optical imaging methods and systems for particle detection 0 2008
7,916,293 Non-orthogonal particle detection systems and methods 4 2008
8,027,035 Non-orthogonal particle detection systems and methods 3 2011
8,174,697 Non-orthogonal particle detection systems and methods 0 2011
8,427,642 Two-dimensional optical imaging methods and systems for particle detection 0 2012
 
PACIFIC SCIENTIFIC INSTRUMENTS COMPANY (4)
5,642,193 Particle counter employing a solid-state laser with an intracavity view volume 22 1996
5,903,347 Particle counter employing a chromium based solid-state laser with an intracavity view volume 2 1997
5,864,399 Method for counting particles in a fluent stream 15 1997
6,031,610 Multi-lobe pump for particle counters 1 1997
 
ADVANCED MICRO DEVICES, INC. (1)
7,145,653 In situ particle monitoring for defect reduction 3 2000
 
HIGH YIELD TECHNOLOGY, A CORP. OF CA. (1)
5,247,188 Concentrator funnel for vacuum line particle monitors 4 1992
 
INFICON, INC. (1)
6,906,799 Signal processing method for in-situ, scanned-beam particle monitoring 1 2002
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
5,481,357 Apparatus and method for high-efficiency, in-situ particle detection 22 1994
 
METTLER-TOLEDO AUTOCHEM, INC. (1)
5,426,501 Apparatus and method for particle analysis 19 1993
 
STIFTUNG ALFRED-WEGENER-INSTITUT FUER POLAR-UND MEERESFORSCHUNG (1)
7,976,175 Ring lamp for illuminating a delimited volume and the use thereof 0 2006
 
THE CHARLES STARK DRAPER LABORATORY, INC. (1)
5,369,284 Active edge position measuring device 6 1993
 
TOKYO ELECTRON LIMITED (1)
7,417,732 Particle monitoring apparatus and vacuum processing apparatus 0 2005