Method for photochemical machining of titanium and zirconium
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United States of America Patent
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Mar 3, 1992
Grant Date -
N/A
app pub date -
Jun 3, 1991
filing date -
Jun 3, 1991
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Abstract
A method for use in photochemical machining of titanium or zirconium substrate articles. A coating of silver is deposited onto the substrate and a photoresist is applied onto this coating. The photoresist is selectively patterned and removed from unexposed areas thereof. The silver coating is then selectively removed from the substrate at areas not covered by the photoresist without removing material from the substrate. Photochemical etching is then performed to remove material from the substrate at areas thereof not covered by the silver coating. The remaining silver coating may then be removed to yield a titanium or zirconium workpiece having the desired pattern etched into the surface thereof.
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