Substrate heater and heating element

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5093557
SERIAL NO

07352510

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Heat is provided to substrates at a step of a process by providing identical movable heating devices, one for each substrate, placing each substrate onto one of the heating devices, sequentially moving each device into a position where the step of the process can be performed on the substrate, and causing each of the devices to provide heat to the substrate at each step of the process.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
Microscience, Inc.NORWELL, MA0

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lok, Charles K C Norwood, MA 1 16
Westner, August O Winchester, MA 2 17

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (2)
* 4334819 Battery charging system 26 1980
* 4634375 Heating and handling system for metal consolidation process 5 1985
 
USHIO DENKI KABUSHIKI KAISHA (1)
* 4493977 Method for heating semiconductor wafers by a light-radiant heating furnace 76 1983
 
APPLIED MATERIALS, INC. (1)
* 4579080 Induction heated reactor system for chemical vapor deposition 102 1985
 
MITSUBISHI DENKI KABUSHIKI KAISHA (1)
* 4487161 Semiconductor device manufacturing unit 14 1980
 
United Solar Systems Corporation (1)
* 4470369 Apparatus for uniformly heating a substrate 36 1982
 
FUJITSU LIMITED (1)
* 4449037 Method and apparatus for heating semiconductor wafers 13 1982
 
WJ SEMICONDUCTOR EQUIPMENT GROUP, INC. (1)
* 4673799 Fluidized bed heater for semiconductor processing 10 1985
 
AIXTRON, INC. (1)
* 4778559 Semiconductor substrate heater and reactor process and apparatus 73 1986
 
TAMARACK SCIENTIFIC CO. INC. (1)
* 4649261 Apparatus for heating semiconductor wafers in order to achieve annealing, silicide formation, reflow of glass passivation layers, etc. 125 1985
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (2)
* 5631536 Rechargeable battery vending apparatus 93 1994
* 2006/0093,520 Automated molecular pathology apparatus having fixed slide platforms 1 2005
 
CELERUS DIAGNOSTICS, INC. (8)
8178350 Method and apparatus for automated rapid immunohistochemistry 2 2006
8058010 Enhanced fluidic method and apparatus for automated rapid immunohistochemistry 15 2006
8034610 Parallel processing fluidic method and apparatus for automated rapid immunohistochemistry 2 2006
7838283 Wicking cassette method and apparatus for automated rapid immunohistochemistry 15 2006
* 2009/0004,691 Enhanced Fluidic Method and Apparatus for Automated Rapid Immunohistochemistry 18 2006
* 2008/0286,753 Wicking Cassette Method and Apparatus for Automated Rapid Immunohistochemistry 17 2006
* 2008/0213,804 Parallel Processing Fluidic Method and Apparatus for Automated Rapid Immunohistochemistry 6 2006
* 2008/0194,034 Method And Apparatus For Automated Rapid Immunohistochemistry 9 2006
 
The United States of America as represented by the Secretary of the Navy (1)
* 5329097 Compact substrate heater for use in an oxidizing atmosphere 5 1993
 
VENTANA MEDICAL SYSTEMS, INC. (15)
6296809 Automated molecular pathology apparatus having independent slide heaters 184 1999
6582962 Automated molecular pathology apparatus having independent slide heaters 101 2000
7270785 Automated molecular pathology apparatus having fixed slide platforms 34 2002
7303725 Automated high volume slide staining system 55 2003
* 2004/0002,163 Automated high volume slide staining system 35 2003
7378055 Automated molecular pathology apparatus having fixed slide platforms 50 2003
* 2003/0203,493 Automated molecular pathology apparatus having fixed slide platforms 30 2003
* 2004/0052,685 Automated molecular pathology apparatus having independent slide heaters 24 2003
7468161 Automated high volume slide processing system 35 2005
* 2005/0186,114 Automated high volume slide processing system 32 2005
8663991 Automated high volume slide processing system 1 2005
* 2005/0250,211 Automated high volume slide processing system 29 2005
7404927 Automated molecular pathology apparatus having fixed slide platforms 31 2005
8048373 Automated high volume slide staining system 4 2007
9528918 Automated high volume slide processing system 0 2013
* Cited By Examiner