Substrate heater and heating element

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United States of America Patent

PATENT NO 5093557
SERIAL NO

07352510

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Heat is provided to substrates at a step of a process by providing identical movable heating devices, one for each substrate, placing each substrate onto one of the heating devices, sequentially moving each device into a position where the step of the process can be performed on the substrate, and causing each of the devices to provide heat to the substrate at each step of the process.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
Microscience, Inc.NORWELL, MA0

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lok, Charles K C Norwood, MA 1 16
Westner, August O Winchester, MA 2 17

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