Substrate heater and heating element
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United States of America Patent
Stats
-
Mar 3, 1992
Grant Date -
N/A
app pub date -
May 16, 1989
filing date -
May 16, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Heat is provided to substrates at a step of a process by providing identical movable heating devices, one for each substrate, placing each substrate onto one of the heating devices, sequentially moving each device into a position where the step of the process can be performed on the substrate, and causing each of the devices to provide heat to the substrate at each step of the process.
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Family
International Classification(s)
Cited Art Landscape
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