Optoelectrical particle detection apparatus

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United States of America Patent

PATENT NO 5094533
SERIAL NO

07657989

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Abstract

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An optoelectrical particle detection apparatus comprising concave and convex reflectors spaced from each other by a predetermined distance, a laser source for emitting a laser beam and introducing the laser beam between the concave and convex reflectors, the concave and convex reflectors and the laser source being arranged so that the laser beam is multi-reflected at a much closer pitch to form a laser beam curtain in which the multi-reflected beam segments are overlapped with respect to each other to enhance a light intensity thereof, and an optoelectrical detector for receiving light scattered due to a presence of particles in the laser beam curtain, whereby the presence of particles can be detected in the laser beam curtain with a high probability and a high sensitivity.

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Patent Owner(s)

Patent OwnerAddress
FUJITSU LIMITEDKAWASAKI-SHI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobayashi, Kazuo Ayase, JP 333 6984
Sawada, Shigetomo Isehara, JP 5 87

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