Process for treating waste gases containing ClF.sub.3

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United States of America Patent

PATENT NO 5094825
SERIAL NO

07647352

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Abstract

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Waste gases containing ClF.sub.3 are treated by bringing them into contact with iron oxide substantially composed of a ferric oxide (Fe.sub.2 O.sub.3) at a linear velocity of about 10-200 cm/min at ordinary temperatures, or further into contact with an alkali agent at the same linear velocity and temperatures as the above, whereby the content of ClF.sub.3 can be reduced below the permissible level despite simultaneous emission of acidic gases, and yet which is capable of removing the concomitant acidic gases in an effective manner.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATION11-1 HANEDA ASAHI-CHO OTA-KU TOKYO 1448510 ?1448510
EBARA RESEARCH CO LTD4-2-1 HONFUJISAWA FUJISAWA-SHI KANAGAWA-KEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mori, Yoichi Fujisawa, JP 33 281

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