Importance

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Abstract

Improved methods for the treatment of spherical surfaces designed to improve their physical and chemical properties are disclosed. The methods include the provision of a fixture by which a plurality of spherical workpieces are presented to a treatment source in a way that their entire respective spherical surfaces are uniformly treated and to a uniform predetermined depth. The fixture is mounted for motion about two axes normal to each other. The methods include randomization of the motion about one of the two axes of motion by interrupting one of the two motions for a predetermined period of time. The treatment sources include: pulsed electron beam and light sources, plasma sources, reaction chambers for CVD or MOCVD, sputtering, sputter enhanced ion implantation sources and physical vapor deposition in conjunction with an ion beam source.

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First Claim