Architecture and process for integrating DMD with control circuit substrates

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United States of America Patent

PATENT NO 5099353
SERIAL NO

07637892

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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DMD projection light values for HDTV have various manufacturing requirements, including the high yield integration of the DMD superstructure on top of an underlying CMOS address circuit. The CMOS chip surface contains several processing artifacts that can lead to reduced yield for the DMD superstructure. A modified DMD architecture and process are disclosed that minimizes the yield losses caused by these CMOS artifacts while also reducing parasitic coupling of the high voltage reset pulses to the underlying CMOS address circuitry.

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Patent Owner(s)

  • TEXAS INSTRUMENTS INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hornbeck, Larry J Van Alstyne, TX 35 12498

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