Distance and tilt sensing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5101226
SERIAL NO

07601412

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In the distance and tilt sensing apparatus disclosed herein, an image of a light source is projected by a lens obliquely onto a surface to be sensed. A ring reticle is interposed in the optical path between the light source and the lens at a distance from the lens substantially equal to its focal length. A second lens projects a remote image of the first object image onto a detector. The light projected from the second lens is split into two paths. An aperture reticle is interposed in one of the paths at a distance from the second lens substantially equal to its focal length, an image of the center of the ring reticle being formed on the aperture reticle. A position responsive optical detector aligned with the aperture reticle senses the position of the image of the center of the ring reticle relative to the center of the aperture and that position is indicative of the tilt of the surface around an axis essentially perpendicular to the axis of the incident light.

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Patent Owner(s)

Patent OwnerAddress
ULTRATECH STEPPER EAST INC7 STATTUCK ROAD ANDOVER MA 01801
ULTRATECH STEPPER INC3050 ZANKER ROAD SAN JOSE CA 95134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Beaulieu, David R Wilmington, MA 17 258
Wallace, John D Newburyport, MA 10 430

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