Importance

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Abstract

A fiber optic wafer probe, for use in measuring the parameters of photodetectors and other optoelectronic test devices at the wafer level, has a probe body along which an optical fiber extends to protrude from a tip of the probe body. The probe body loosely guides the optical fiber so that at least a significant portion of the length of the optical fiber is movable longitudinally with respect to the tip and probe body. This provides protection against excessive contact force between the fiber and the test device by enabling the optical fiber to buckle longitudinally in response to longitudinal overtravel of the fiber toward the test device. The probe body is of elongate shape with a probe tip at one end and a connector at the other end for detachably connecting the optical fiber to the probe body. The probe body length between the tip and connector is preferably substantially at least four inches to minimize undesirable multimode light transmission effects in a manner consistent with providing a replaceable fiber. The fiber is loosely guided through a bend along the probe body, which aids in minimizing the multimode effects.

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First Claim