Planar-type microwave integrated circuit with at least one mesa component, method of fabrication thereof
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United States of America Patent
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Apr 7, 1992
Issued Date -
N/A
app pub date -
Oct 23, 1990
filing date -
May 10, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A microwave integrated circuit having planar and mesa components and microstrip lines and method of making the same is disclosed. To preserve a constant impedance for the microstrip lines, the mesa component is buried in a recess, which is then filled with a dielectric having substantially the same thermal expansion coefficient and the same dielectric constant as the insulating substrate. The surface of the mesa component and of the dielectric is in the plane of the planar part of the integrated circuit. Between the interconnecting microstrip lines on the planar face and the ground plane on the face of the substrate, the thickness and the dielectric constant of the material is constant.
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