Cylindrical magnetron shield structure
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United States of America Patent
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-
Apr 28, 1992
Grant Date -
N/A
app pub date -
Jan 29, 1991
filing date -
Jan 29, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A rotating cylindrical sputtering target surface as part of a magnetron has cylindrical shields adjacent each end of the target to prevent arcing that undesirably occurs when certain materials are being sputtered, particularly dielectrics. If two or more rotating targets are employed in a single magnetron system, each is similarly shielded. In a preferred form, the target is provided with a single cylindrical shield that is cut away for a significant portion of the distance around the cylinder to provide an opening through which a sputtering region of the target is accessible, while maintaining shielding of the target end regions. This preferred shield is rotatable in order to allow the position of the sputtering activity to be selected.
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