Method and apparatus for manufacturing interconnects with fine lines and spacing

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5114558
SERIAL NO

07688257

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Metallic or non-metallic wires or bristles are attached to a hollow, cylindrical core. The wires or fibers are quite fine in diameter. Space is provided in the core in the shape of perforations for the transfer of electrolyte, which is fed from the hollow inner portion of the cylinder, along the fibers, to the copper substrate on an imaged substrate. Electrical or non-electrical sources are employed. The wires may be electrically connected through the metal cylinder to the positive pole (anode) of the DC power source. The non-conductive fibers make direct contact with the metal to be etched. In the electrical device within the hollow cylinder but separated from the cylinder is positioned a perforated or mesh copper, which is connected electrically to the negative pole (cathode) of the DC power supply. A cell is now made between the copper laminate and the perforated copper inside the cylinder. Copper from the laminate (anode) is removed and deposited on the perforated copper (cathode). The same apparatus is used for electroforming applications. The wires can be connected to the negative pole of the rectifier, while an anodically insoluble conductive substrate can be used in place of the counter-electrode within the hollow cylinder. By contacting an activated or metallic substrate with negatively charged fibers one can deposit metal in the exposed areas.

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Patent Owner(s)

Patent OwnerAddress
ELECTROCHEMICAL SYSTEMS INC118 SHERWOOD ROAD RIDGEWOOD NJ 07450

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kadija, Igor V 118 Sherwood Rd., Ridgewood, NJ 07450 47 663

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