Semiconductor device and semiconductor memory device

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United States of America Patent

PATENT NO 5115289
SERIAL NO

07742196

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Abstract

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A semiconductor device, such as an FET or a charge coupled device, is provided having a channel or a charge coupled portion formed in a thin semiconductor layer which is substantially perpendicular to the substrate. Necessary electrodes, such as the gate electrode, and necessary insulating layers can be added at the thin semiconductor layer, and can maintain the necessary amount of electric current by securing the height of the semiconductor layer. The structure has the advantage that it can have its plane size reduced. Further, the semiconductor memory device using the above semiconductor device is suitable to high integration and has excellent electric characteristics.

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Patent Owner(s)

Patent OwnerAddress
HITACHI LTD A CORPORATION OF JAPAN6 KANDA SURUGADAI 4-CHOME CHIYODA-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hiraiwa, Atsushi Kodaira, JP 37 1686
Hisamoto, Dai Kokubunji, JP 10 581
Kaga, Toru Urawa, JP 46 1737
Kimura, Shinichiro Hachioji, JP 98 2579
Moniwa, Masahiro Hannou, JP 59 1380
Takeda, Eiji Koganei, JP 56 1261
Tanaka, Haruhiko Kokubunji, JP 47 846

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