Low vibration high vacuum gate valve

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5116023
SERIAL NO

07701439

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A low vibration, high cycle, high vacuum gate valve structure comprises a high vacuum housing defining a passageway, a valve actuator for providing a rectilinear displacement force, a translatable and pivotable gate valve assembly actuated by the valve actuator for translating from a fully retraction position outside of the passageway to an initial closure position adjacent to a fixed seal surface provided within the housing thereby blocking off the passageway. The gate valve assembly defines an angled sealing surface relative to an oppositely facing angled sealing surface of the fixed seal but displaced by a predetermined angular displacement at the initial closure position. The gate valve assembly includes structure defining a first fulcrum at the initial closure position for causing the gate valve assembly to rotate through the predetermined angular displacement in response to further rectilinear displacement force from the actuator until a final closure position is reached at which the gate valve assembly closes and seals against the angled sealing surface of the fixed seal within the housing.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
MDC VACUUM PRODUCTS CORPORATIONHAYWARD, CA0

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Contin, Jose L Orinda, CA 5 94

Cited Art Landscape

Patent Info (Count) # Cites Year
 
MDC VACUUM PRODUCTS, LLC (1)
* 4718637 High vacuum gate valve having improved metal vacuum joint 48 1987
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (1)
9091371 Single axis gate valve for vacuum applications 0 2011
 
Kimball Physics, Inc. (1)
* 5593123 Vacuum system components 4 1995
 
SAMSUNG CORNING PRECISION GLASS CO., LTD. (2)
* 6893544 Apparatus and method for depositing thin films on a glass substrate 6 2002
* 2003/0033,983 Apparatus and method for depositing thin films on a glass substrate 0 2002
 
APPLIED MATERIALS, INC. (9)
6347918 Inflatable slit/gate valve 46 1999
6308932 Isolation valves 9 2000
6517048 Isolation valves 10 2001
6905107 Inflatable slit/gate valve 7 2001
7007919 Slit valve method and apparatus 3 2003
* 2004/0206,921 Slit valve method and apparatus 2 2003
7086638 Methods and apparatus for sealing an opening of a processing chamber 12 2004
* 2004/0245,489 Methods and apparatus for sealing an opening of a processing chamber 0 2004
* 2006/0249,701 Methods and apparatus for sealing an opening of a processing chamber 0 2006
 
SMC CORPORATION (2)
* 8534311 Vacuum valve 0 2011
* 2011/0290,340 VACUUM VALVE 0 2011
 
MDC VACUUM PRODUCTS, LLC (1)
6854708 High-vacuum valve with retractable valve plate to eliminate abrasion 10 2003
 
Irie Koken Co., Ltd. (2)
* 5626324 Non-sliding vacuum gate valve 28 1994
* 6082706 Non-sliding vacuum gate valve 19 1998
* Cited By Examiner