Projection exposure apparatus
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United States of America Patent
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-
May 26, 1992
Grant Date -
N/A
app pub date -
Sep 13, 1991
filing date -
Sep 19, 1990
priority date (Note) -
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status (Latency Note)
Importance
Abstract
An exposure apparatus for exposing on a substrate a pattern formed on a mask, comprises a projection optical system for forming the pattern on a predetermined focusing plane and projecting an image of the pattern on the substrate located to be substantially aligned with the focusing plane, driving means for three-dimensionally moving the mask or at least one of a plurality of optical system, or for inclining the mask or said at least one of the plurality of optical members with respect to a plane substantially perpendicular to an optical axis of the projection optical system and correcting means for driving the driving means to anisotropically change optical characteristics of the projection optical system so that the projected image of the pattern is matched with a pattern already formed on the substrate.
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