Drive shaft apparatus for a susceptor

United States of America Patent

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Jun 2, 1992
Issued Date
N/A
app pub date
Jun 15, 1990
filing date
Mar 31, 1987

priority date (Note)
Expired

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Abstract

A hollow drive shaft mounted within a tubular shaft depending from a reaction chamber supports a substrate receiving susceptor to effect rotation of the susceptor.

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Patent Owner(s)

Patent Owner	Address
ASM AMERICA INC	3440 EAST UNIVERSITY DRIVE PHOENIX AS 85034

International Classification(s)

C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
deBoer, Wiebe B	Eersel, NL	15	2158
Ozias, Albert E	Aumsville, OR	20	2419

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Drive shaft apparatus for a susceptor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

07539062

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PATENT NO	5117769
SERIAL NO	07539062
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07539062

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