System for 3-D inspection of objects

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United States of America Patent

PATENT NO 5118192
SERIAL NO

07551150

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Abstract

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An inspection system for irregular objects such as solder joints wherein the system utilizes first and second sensors adapted to be pivotable about a common pivot axis and such that the projection axes of the sensors and the pivot axes are able to intersect at a common.

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Patent Owner(s)

Patent OwnerAddress
RUDOLPH TECHNOLOGIES INCONE RUDOLPH ROAD FLANDERS NJ 07836

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Sullivan Centerport, NY 2 149
Stern, Howard K Greenlawn, NY 21 642
Yonescu, William E Dix Hills, NY 12 323

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