Process for preparing oxide superconducting films by radio-frequency generated aerosol-plasma deposition in atmosphere
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United States of America Patent
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Jun 9, 1992
Grant Date -
N/A
app pub date -
Apr 17, 1990
filing date -
Apr 17, 1990
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process for coating a superconductive film onto a substrate is provided. In the first step of this process, a solution of the reagents required to produce the superconductive material is subjected to ultrasonic sound waves to create an aerosol. Thereafter, the aerosol contacted with plasma while being subjected to substantially atmospheric pressure and a radio frequency alternating current in excess of 100 kilohertz; a vapor is produced in this step. The vapor so produced is passed through an orifice and allowed to deposit onto a substrate.
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