Micro-machined switch and method of fabrication
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United States of America Patent
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Jun 9, 1992
Grant Date -
N/A
app pub date -
Nov 1, 1990
filing date -
Nov 1, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A miniature electrostatically actuated switch and process for fabricating it in which the switch is operable to connect and disconnect one or more transmission lines laid down on a dielectric substrate of an integrated circuit wafer. The switch is fabricated on the integrated circuit wafer using integrated circuit fabrication processes including thin films of conductive materials and photoresist and selective removal of these films. the switch includes a rotating switch blade which rotates about a hub formed on the dielectric substrate under the influence of electrostatic fields created by control pads and other switch elements formed on the dielectric substrate, whereupon a microwave signal can be switchably transmitted along the transmission line formed on the substrate.
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