Single crystal silicon substrate

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United States of America Patent

PATENT NO 5123975
SERIAL NO

07493335

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Abstract

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A single crystal silicon substrate which comprises an electric insulation member and a single crystal silicon film formed on the insulation member. The silicon film has first regions and second regions. Each of the first regions is formed as a strip shape and has a high density of inorganic impurities implanted thereinto. Each of the second regions is formed as a strip shape and has a low density of the impurities. The first and second regions are alternatively arranged contacting with each other so that the first regions are separated from each other.

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Patent Owner(s)

Patent OwnerAddress
RICOH COMPANY LTDTOKYO 143-8555
RICOH RESEARCH INSTITUTE OF GENERAL ELECTRONICS CO LTDNO 5-10 AZA YOKATAKAMI TAKADATE KUMANODO NATORI-SHI MIYAGI-KEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Haga, Koichi Shibata, JP 49 633
Irinoda, Mitsugu Sendai, JP 12 463

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