US Patent No: 5,124,834

Number of patents in Portfolio can not be more than 2000

Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same

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Abstract

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An elastomeric light valve has a substrate with a principal surface on which is formed a multiplicity of pixels; each pixel includes a first set of pixel electrodes interdigitated with a second set of pixel electrodes. A silicone elastomer gel is disposed over both the principal substrate surface and the two sets of pixel electrodes. At least one silicone/polycarbonate self-supporting pellicle is disposed substantially completely over the gel layer; the pellicle and elastomer gel layer are heat cured to improve the response of the layers to electrostatic forces induced in the light valve by control voltages applied during operation of the light valve. A layer of gold is disposed over the at least one pellicle and a layer of silver is disposed over the gold layer to provide an exposed specular surface which is easily deformed and resilient to transverse stresses. Address-lines are provided for applying control voltages to the first and second sets of pixel electrodes responsive to a video signal; a bias voltage is applied to the gold and silver layers to provide optimum light valve sensitivity at lower control voltages.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
LOCKHEED MARTIN CORPORATIONBETHESDA, MD5795

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cusano, Dominic A Schenectady, NY 27 800
Lubowski, Stanley J Scotia, NY 4 336

Cited Art Landscape

Patent Info (Count) # Cites Year
 
New York Institute of Technology (2)
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4,626,920 Solid state light modulator structure 25 1984
 
EASTMAN KODAK COMPANY (1)
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NEW YORK INSTITUTE OF TECHNOLOGY, WHEATLY ROAD, OLD WESTBURY, NEW YORK, A CORP. OF NEW YORK (1)
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TEXAS INSTRUMENTS INCORPORATED (1)
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Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (231)
5,835,255 Visible spectrum modulator arrays 496 1994
6,040,937 Interferometric modulation 623 1996
5,986,796 Visible spectrum modulator arrays 477 1996
6,674,562 Interferometric modulation of radiation 658 1998
6,055,090 Interferometric modulation 444 1999
7,123,216 Photonic MEMS and structures 534 1999
7,138,984 Directly laminated touch sensitive screen 101 2001
6,867,896 Interferometric modulation of radiation 388 2001
6,680,792 Interferometric modulation of radiation 501 2001
6,650,455 Photonic mems and structures 495 2001
6,710,908 Controlling micro-electro-mechanical cavities 336 2002
7,042,643 Interferometric modulation of radiation 174 2002
7,126,738 Visible spectrum modulator arrays 131 2002
7,110,158 Photonic MEMS and structures 173 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 26 2002
7,297,471 Method for manufacturing an array of interferometric modulators 18 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 101 2003
7,460,291 Separable modulator 49 2003
7,012,726 MEMS devices with unreleased thin film components 74 2003
7,198,973 Method for fabricating an interference display unit 97 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 145 2003
7,692,844 Interferometric modulation of radiation 16 2004
7,532,194 Driver voltage adjuster 3 2004
7,119,945 Altering temporal response of microelectromechanical elements 130 2004
7,706,050 Integrated modulator illumination 29 2004
7,193,768 Interference display cell 23 2004
7,476,327 Method of manufacture for microelectromechanical devices 35 2004
7,060,895 Modifying the electro-mechanical behavior of devices 47 2004
7,280,265 Interferometric modulation of radiation 45 2004
7,164,520 Packaging for an interferometric modulator 36 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 49 2004
7,893,919 Display region architectures 6 2005
7,813,026 System and method of reducing color shift in a display 14 2005
7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator 17 2005
7,424,198 Method and device for packaging a substrate 3 2005
7,142,346 System and method for addressing a MEMS display 30 2005
7,515,147 Staggered column drive circuit systems and methods 13 2005
7,379,227 Method and device for modulating light 12 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 38 2005
7,289,259 Conductive bus structure for interferometric modulator array 62 2005
7,460,246 Method and system for sensing light using interferometric elements 12 2005
7,560,299 Systems and methods of actuating MEMS display elements 16 2005
7,012,732 Method and device for modulating light with a time-varying signal 62 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 8 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 3 2005
7,259,449 Method and system for sealing a substrate 16 2005
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7,668,415 Method and device for providing electronic circuitry on a backplate 5 2005
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7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 8 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 8 2005
7,299,681 Method and system for detecting leak in electronic devices 2 2005
7,920,135 Method and system for driving a bi-stable display 4 2005
7,679,627 Controller and driver features for bi-stable display 3 2005
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7,535,466 System with server based control of client device display features 8 2005
7,532,195 Method and system for reducing power consumption in a display 7 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 44 2005
7,289,256 Electrical characterization of interferometric modulators 12 2005
7,602,375 Method and system for writing data to MEMS display elements 3 2005
7,916,103 System and method for display device with end-of-life phenomena 2 2005
7,321,456 Method and device for corner interferometric modulation 39 2005
7,626,581 Device and method for display memory using manipulation of mechanical response 3 2005
7,372,613 Method and device for multistate interferometric light modulation 70 2005
7,889,163 Drive method for MEMS devices 16 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 1 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 35 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 3 2005
7,843,410 Method and device for electrically programmable display 6 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 32 2005
7,547,565 Method of manufacturing optical interference color display 12 2005
7,527,995 Method of making prestructure for MEMS systems 26 2005
7,808,703 System and method for implementation of interferometric modulator displays 4 2005
7,349,136 Method and device for a display having transparent components integrated therein 7 2005
RE42119 Microelectrochemical systems device and method for fabricating same 6 2005
8,008,736 Analog interferometric modulator device 3 2005
7,710,629 System and method for display device with reinforcing substance 3 2005
8,124,434 Method and system for packaging a display 1 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 23 2005
7,471,444 Interferometric modulation of radiation 14 2005
7,388,706 Photonic MEMS and structures 11 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 6 2005
7,196,837 Area array modulation and lead reduction in interferometric modulators 26 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 59 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 6 2005
7,417,783 Mirror and mirror layer for optical modulator and method 8 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 13 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 8 2005
RE40436 Hermetic seal and method to create the same 8 2005
7,304,784 Reflective display device having viewable display on both sides 40 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 80 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 27 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 3 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 1 2005
7,310,179 Method and device for selective adjustment of hysteresis window 8 2005
7,724,993 MEMS switches with deforming membranes 2 2005
7,492,502 Method of fabricating a free-standing microstructure 11 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 31 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 16 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 15 2005
7,136,213 Interferometric modulators having charge persistence 14 2005
7,564,612 Photonic MEMS and structures 63 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 182 2005
7,369,294 Ornamental display device 42 2005
7,684,104 MEMS using filler material and method 9 2005
7,653,371 Selectable capacitance circuit 17 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 4 2005
7,675,669 Method and system for driving interferometric modulators 4 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 11 2005
7,545,550 Systems and methods of actuating MEMS display elements 4 2005
8,310,441 Method and system for writing data to MEMS display elements 1 2005
7,446,927 MEMS switch with set and latch electrodes 6 2005
7,486,429 Method and device for multistate interferometric light modulation 10 2005
7,236,284 Photonic MEMS and structures 90 2005
7,630,114 Diffusion barrier layer for MEMS devices 2 2005
8,014,059 System and method for charge control in a MEMS device 0 2005
7,776,631 MEMS device and method of forming a MEMS device 14 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 0 2005
7,403,323 Process control monitors for interferometric modulators 1 2005
7,369,252 Process control monitors for interferometric modulators 0 2005
7,259,865 Process control monitors for interferometric modulators 20 2005
8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays 0 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 2 2005
7,355,779 Method and system for driving MEMS display elements 3 2006
7,916,980 Interconnect structure for MEMS device 1 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 6 2006
8,194,056 Method and system for writing data to MEMS display elements 0 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 2 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 6 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 24 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 42 2006
7,483,197 Photonic MEMS and structures 17 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 12 2006
7,532,377 Movable micro-electromechanical device 34 2006
7,643,203 Interferometric optical display system with broadband characteristics 20 2006
7,948,457 Systems and methods of actuating MEMS display elements 1 2006
7,903,047 Mode indicator for interferometric modulator displays 3 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 1 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 6 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 4 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 45 2006
8,049,713 Power consumption optimized display update 2 2006
7,920,136 System and method of driving a MEMS display device 1 2006
7,706,044 Optical interference display cell and method of making the same 8 2006
7,880,954 Integrated modulator illumination 14 2006
7,369,292 Electrode and interconnect materials for MEMS devices 13 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 17 2006
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,907,319 Method and device for modulating light with optical compensation 22 2006
7,161,094 Modifying the electro-mechanical behavior of devices 24 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 80 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 14 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 4 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 68 2006
7,187,489 Photonic MEMS and structures 86 2006
7,636,151 System and method for providing residual stress test structures 0 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 6 2006
7,702,192 Systems and methods for driving MEMS display 0 2006
7,835,061 Support structures for free-standing electromechanical devices 8 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 47 2006
7,777,715 Passive circuits for de-multiplexing display inputs 3 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 11 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 4 2006
7,566,940 Electromechanical devices having overlying support structures 9 2006
7,534,640 Support structure for MEMS device and methods therefor 14 2006
7,830,586 Transparent thin films 15 2006
7,554,711 MEMS devices with stiction bumps 40 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 5 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 30 2006
7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge 3 2006
7,928,940 Drive method for MEMS devices 0 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 5 2006
7,619,810 Systems and methods of testing micro-electromechanical devices 2 2006
7,385,748 Visible spectrum modulator arrays 27 2006
7,388,697 System and method for addressing a MEMS display 8 2006
7,242,512 System and method for addressing a MEMS display 9 2006
7,667,884 Interferometric modulators having charge persistence 3 2006
7,355,782 Systems and methods of controlling micro-electromechanical devices 6 2006
7,706,042 MEMS device and interconnects for same 3 2006
7,535,621 Aluminum fluoride films for microelectromechanical system applications 30 2006
7,733,552 MEMS cavity-coating layers and methods 4 2007
8,059,326 Display devices comprising of interferometric modulator and sensor 4 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,625,825 Method of patterning mechanical layer for MEMS structures 2 2007
7,569,488 Methods of making a MEMS device by monitoring a process parameter 28 2007
8,068,268 MEMS devices having improved uniformity and methods for making them 1 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 16 2007
7,723,015 Method for manufacturing an array of interferometeric modulators 11 2007
7,852,545 Method and device for modulating light 13 2007
7,848,004 System and method for a MEMS device 8 2007
7,830,587 Method and device for modulating light with semiconductor substrate 14 2007
7,826,120 Method and device for multi-color interferometric modulation 13 2007
7,808,694 Method and device for modulating light 13 2007
7,738,157 System and method for a MEMS device 17 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 3 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 5 2007
7,556,917 Method for manufacturing an array of interferometric modulators 12 2007
7,561,321 Process and structure for fabrication of MEMS device having isolated edge posts 22 2007
8,111,445 Spatial light modulator with integrated optical compensation structure 4 2008
7,623,752 System and method of testing humidity in a sealed MEMS device 5 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 1 2008
7,863,079 Methods of reducing CD loss in a microelectromechanical device 0 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 3 2008
8,105,496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 1 2008
8,045,252 Spatial light modulator with integrated optical compensation structure 4 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 2 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 2 2008
8,226,836 Mirror and mirror layer for optical modulator and method 0 2008
8,115,988 System and method for micro-electromechanical operation of an interferometric modulator 0 2008
7,839,559 Controller and driver features for bi-stable display 0 2008
8,416,487 Photonic MEMS and structures 0 2009
8,169,687 Photonic MEMS and structures 0 2009
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
8,735,225 Method and system for packaging MEMS devices with glass seal 0 2009
8,368,124 Electromechanical devices having etch barrier layers 0 2009
8,736,590 Low voltage driver scheme for interferometric modulators 0 2010
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 5 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,952,789 MEMS devices with multi-component sacrificial layers 4 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,278,726 Controlling electromechanical behavior of structures within a microelectromechanical systems device 0 2010
8,264,763 Controller and driver features for bi-stable display 0 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
8,659,816 Mechanical layer and methods of making the same 0 2011
8,682,130 Method and device for packaging a substrate 0 2011
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 0 2012
 
INTELLECTUAL VENTURES I LLC (3)
6,381,061 Pixel structure having deformable material and method for forming a light valve 7 1999
6,445,433 Pixel structure having deformable material and method for forming a light valve 11 2000
6,903,872 Electrically reconfigurable optical devices 7 2002
 
DAEWOO ELECTRONICS CO., LTD. (2)
5,768,008 Actuator array and method for the manufacture thereof 0 1996
5,706,122 Method for the formation of a thin film actuated mirror array 4 1996
 
OPTOTUNE AG (2)
8,699,141 Lens assembly apparatus and method 0 2010
8,659,835 Lens systems and method 0 2010
 
PALO ALTO RESEARCH CENTER INCORPORATED (2)
6,930,817 Configurable grating based on surface relief pattern for use as a variable optical attenuator 5 2003
7,054,054 Optical modulator with a traveling surface relief pattern 7 2004
 
SHARP KABUSHIKI KAISHA (2)
5,493,427 Three-dimensional display unit with a variable lens 70 1994
6,201,589 Spatial light modulator and display with picture elements having electrically floating electrodes 11 1998
 
CENTOCOR ORTHO BIOTECH INC. (1)
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 25 2004
 
IRIDIGM DISPLAY CORPORATION (1)
7,256,922 Interferometric modulators with thin film transistors 29 2004
 
KOPIN CORPORATION (1)
6,414,783 Method of transferring semiconductors 24 2001
 
MOTOROLA, INC. (1)
5,517,348 Voltage controlled transparent layer for a bi-directinal device 2 1994
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 70 2004
 
TEXAS INSTRUMENTS INCORPORATED (1)
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 399 1993
 
UDC, LLC (1)
7,499,208 Current mode display driver circuit realization feature 9 2005
 
Other [Check patent profile for assignment information] (1)
8,791,897 Method and system for writing data to MEMS display elements 0 2012

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