Wafer transfer apparatus
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United States of America Patent
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-
Jun 30, 1992
Issued Date -
N/A
app pub date -
Jan 4, 1991
filing date -
May 24, 1982
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Apparatus for inserting a semiconductor wafer in a slot of a holding post including a wafer support member or paddle for supporting the wafer and inserting it into a slot and rotation device for rotating the support member by the angle necessary to cause edges of the wafer to be received at the centers of the slots.
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