Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
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United States of America Patent
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Jun 30, 1992
Grant Date -
N/A
app pub date -
Mar 20, 1991
filing date -
May 1, 1990
priority date (Note) -
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Abstract
A piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive unit each including a first electrode film, a piezoelectric/electrostrictive film and a second electrode film which are superposed on each other on a ceramic substrate, or at least one piezoelectric/electrostrictive unit each including a plurality of patterned spaced-apart electrode film strips formed on a ceramic substrate, and a plurality of patterned spaced-apart piezoelectric/electrostrictive film strips each formed on the ceramic substrate and disposed between and in contact with adjacent ones of the electrode film strips. The ceramic substrate includes ceramic particles and grain boundaries defined by the ceramic particles. Lead is included in the grain boundaries which exist in at least a selected portion of the ceramic substrate on which the unit or units is/are disposed.
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