Laser diode interferometer
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United States of America Patent
Stats
-
Aug 4, 1992
Grant Date -
N/A
app pub date -
May 30, 1990
filing date -
May 30, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A laser system for measuring dimensional aberrations across a target surface includes a laser diode for producing a diverging beam of laser emission. A mask spaced from the diode in the beam has an aperture therein and can be moved so as to translate the aperture to selected locations laterally with respect to the beam. The mask blocks emission from impinging on the target except for emission transitting the aperture. Emission reflected from a segment to the target returns through the aperture back into the laser diode. An AC current is added to the driver current to modulate the emission. A lock-in amplifier of a photodetector signal adds feedback current to the driver current to lock in phase angle, so that the feedback current is a measure of the aberrations.
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