Removably attachable fore-chamber for sequentially registering substrates with an opening in a vacuum treatment chamber and process of operation
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 4, 1992
Grant Date -
N/A
app pub date -
Jun 13, 1990
filing date -
Sep 11, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Apparatus and process for loading substrates into an evacuable fore-chamber and registering the substrates with an opening in a vacuum treatment chamber to which the fore-chamber is attached. The fore-chamber is removably attached to a an external surface of a wall of the vacuum treatment chamber such that an opening in a wall of the fore-chamber is registered with an opening in the wall of the vacuum treatment chamber. A rotatable plate lying along the wall of the fore-chamber has a plurality of substrate holders each dimensioned to register with the opening in the vacuum treatment chamber. Rotation of the plate enables sequential exposure of the substrates to the vacuum treatment chamber for treatment without breaking the vacuum in the vacuum treatment chamber.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully