Delivery of reactive gas from gas pad to process tool

United States of America Patent

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Aug 11, 1992
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N/A
app pub date
Aug 24, 1990
filing date
Aug 24, 1990

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Expired

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Abstract

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Remote delivery system for potentially toxic moisture sensitive process gas to a point of use (e.g. CVD system).

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Patent Owner(s)

Patent Owner	Address
VERSUM MATERIALS US LLC	8555 SOUTH RIVER PARKWAY TEMPE AS 85284

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B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
George, Mark	23 N. 12th St., Allentown, PA 18102	12	116

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Delivery of reactive gas from gas pad to process tool

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United States of America Patent

07572834

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PATENT NO	5137047
SERIAL NO	07572834
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