Method for aligning pole tips in a thin film head
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United States of America Patent
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-
Aug 25, 1992
Grant Date -
N/A
app pub date -
Feb 15, 1990
filing date -
Feb 15, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A thin film magnetic read/write head is manufactured using a multi-layered sacrificial mask in a pole tip alignment process. The sacrificial mask includes a layer of metal deposited upon the magnetic upper pole tip. Subsequent sacrificial mask layers include nickel-iron alloy or photoresist. Following an ion milling alignment process, residual sacrificial mask layers are removed using a process in which the medal layer is selectively chemically etched away from the thin film magnetic head.
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