Non-destructive semiconductor wafer probing system using laser pulses to generate and detect millimeter wave signals
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United States of America Patent
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Aug 25, 1992
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N/A
app pub date -
Apr 26, 1991
filing date -
Dec 13, 1988
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Abstract
Electrical devices are characterized by optically triggering an electrical signal onto the device and then optically sampling the electrical signal waveform on the device.
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