Non-destructive semiconductor wafer probing system using laser pulses to generate and detect millimeter wave signals

United States of America Patent

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Aug 25, 1992
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app pub date
Apr 26, 1991
filing date
Dec 13, 1988

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Abstract

Electrical devices are characterized by optically triggering an electrical signal onto the device and then optically sampling the electrical signal waveform on the device.

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Patent Owner(s)

COMSAT CORPORATION;M/A-COM TECHNOLOGY SOLUTIONS HOLDINGS, INC.

International Classification(s)

G01R:MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC V....

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Inventor Name	Address	# of filed Patents	Total Citations
Huang, Ho-Chung	Potomac, MD	9	409
Lee, Chi Hsiang	Potomac, MD	3	116
Smith, Thane	Middletown, MD	3	127

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Non-destructive semiconductor wafer probing system using laser pulses to generate and detect millimeter wave signals

Number of patents in Portfolio can not be more than 2000

United States of America Patent

07690329

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PATENT NO	5142224
SERIAL NO	07690329
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07690329

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