MIM element with a doped hard carbon film
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United States of America Patent
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Aug 25, 1992
Grant Date -
N/A
app pub date -
Feb 22, 1990
filing date -
Feb 23, 1989
priority date (Note) -
Expired
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Abstract
Disclosed herein is an MIM device having a hard carbon film as the insulator. The hard carbon film contains at least one of the following elements: a group III element, a group IV element, a group V element, an alkali metal element, an alkaline earth metal element, nitrogen, oxygen, a chalcogen element or a halogen element.
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