Apparatus for cleaning and drying workpieces
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United States of America Patent
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-
Sep 1, 1992
Grant Date -
N/A
app pub date -
Jan 4, 1991
filing date -
Jan 4, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for cleaning and drying workpieces which comprises a closable chamber, means for introducing a cleaning solvent to the chamber, means for removing the solvent from the chamber, means for introducing an inert gas to the chamber, means for receiving workpieces and for moving the workpieces with respect to the level of the solvent, and means for transmitting megasonic energy with respect to the solvent.
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Cited Art Landscape
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