Device for the ionization of metals having a high melting point, which may be used on ion implanters of the type using ion sources of Freeman or similar type
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United States of America Patent
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Sep 1, 1992
Grant Date -
N/A
app pub date -
Jan 16, 1991
filing date -
Jan 23, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The device comprises a cylindrical casing provided with an internal cavity and with a flange and an arc chamber superimposed over the cylindrical casing and including a filament electrically supplied through supply conductors external to said casing and supported by said flange, a repeller plate held at a negative voltage through supply conductors external to said casing and supported by said flange and an inlet for a gas which may be ionized, Inside the arc chamber there is also a support for the metal to be ionized supported and connected electrically to an electrode at a negative voltage by means of a rod passing through the internal cavity of said cylindrical casing.
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