Electrical contacts for an electro-optic modulator

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United States of America Patent

PATENT NO 5144472
SERIAL NO

07525280

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A contact structure and method of formation of a contact structure for an electro-optic modulator. Linear electrodes on a modulator crystal are covered with a dielectric layer. The electrodes are contacted by way of one or more vias through the dielectric layer. Contact pads are formed over the vias so as to contact the electrode and extend over several adjacent electrodes, providing significantly greater contact area for a driver chip applied to the modulator crystal.

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Patent Owner(s)

Patent OwnerAddress
XEROX CORPORATION45 GLOVER AVENUE P O BOX 4505 NORWALK CT 06856-4505

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berkovitz, Michael A Sebastopol, CA 4 85
Bernstein, Mark S Belmont, CA 3 47
Sang, Jr Henry W Cupertino, CA 15 813

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