Capacitive pressure sensor
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United States of America Patent
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-
Sep 22, 1992
Grant Date -
N/A
app pub date -
Jul 1, 1991
filing date -
Jul 1, 1991
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A capacitance pressure sensor includes a conductive diaphragm positioned between two pneumatically separate regions. The diaphragm is supported at its periphery by a concave base member. An electrode assembly establishes a substantially planar conductive surface opposite to, and spaced apart by a nominal gap from, the conductive diaphragm. The electrode assembly includes the conductive surface and a plurality of support legs extending through, and secured at, apertures in the base member.
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