Metrological apparatus and calibration method therefor

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United States of America Patent

PATENT NO 5150314
SERIAL NO

07542718

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A metrological apparatus for measuring form and texture of a surface employs an inductive transducer producing an AC gauge signal, and a tracking AC analogue to digital converter. In order to avoid errors in the output signal at a relatively high speed of traverse of the surface due to a non-flat frequency response of the converter, the output signal is processed by a digital filter to provide a combined frequency response which is flat over a desired range. In order to avoid errors in the output signal due to non-linearity of the transducer, a square or cubic correction is applied to the signal. A method calibrating the apparatus to obtain coefficients for the square and cube terms in the correction process is also described.

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Patent Owner(s)

Patent OwnerAddress
TAYLOR HOBSON LIMITEDLEICESTER LE4 9JQ

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Buehring, Ian K Leicester, GB 3 166
Garratt, John D Leicester, GB 1 80
Scott, Paul J Leicester, GB 3 85

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