Importance

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Abstract

A capacitive pressure sensor including a housing defining a chamber; a seal structure within the housing dividing the chamber into a central pressure chamber and a measurement chamber; a diaphragm positioned within the chamber with a central portion of the diaphragm positioned in the pressure chamber and an annular peripheral portion of the diaphragm positioned in the measurement chamber; and a measurement circuit including an annular electrode carried by the lower face of the annular portion of the diaphragm coacting with a further electrode carried by a confronting portion of the housing and operative to generate an output signal which varies in proportion to the deflection of the diaphragm in response to exposure of the opposite faces of the diaphragm to differential pressures.

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First Claim