High resolution imagery systems and methods
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United States of America Patent
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Oct 20, 1992
Issued Date -
N/A
app pub date -
May 8, 1990
filing date -
Oct 25, 1987
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The current limits of resolution of multi-element optical systems are exceeded by reducing the number of elements while introducing at the critical aperture a blazed transmission grating having grating rings of low bending power defined by multiple plateaus. By illuminating the optical train with monochromatic light that constitutes a multiplicity of distributed sources having a substantial temporal coherence but spatial incoherence and by varying the slopes and widths of the grating rings, local phase delays are introduced that adjust aberrations in the optical system, providing an aligned composite wavefront. The system and method may be used for presenting an image, as for a wafer stepper, or for viewing an image, as in a microscope.
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