Laser safe housing for a particle monitor in vacuum pump lines
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United States of America Patent
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-
Oct 20, 1992
Grant Date -
N/A
app pub date -
Jul 3, 1991
filing date -
Jul 3, 1991
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A housing for a laser based particle monitor comprising a pair of pipes for directing particle flow through a chamber. In one embodiment, elbows are disposed on the piping such that the interior of the chamber cannot be viewed from a point outside the housing.
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